• Title/Summary/Keyword: optical metrology

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Nonlinear characteristics of photodetectors for optical fiber power measurements (광섬유 출력 측정용 광검출기의 비선형성 평가 연구)

  • 이덕희;류지욱;서정철
    • Korean Journal of Optics and Photonics
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    • v.15 no.4
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    • pp.321-324
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    • 2004
  • We have composed an experimental system using the superposition method to measure the nonlinearity of photodetectors for optical fiber power measurements. Also we have measured the nonlinearity of a high power detector and of a low power detector. The two detectors have shown good linearity within 0.01% and 0.02%, respectively, in the 50 ㏈ dynamic range. These detectors are used as reference detectors in optical fiber characteristics measurements.

Roughness Measurement Performance Obtained with Optical Interferometry and Stylus Method

  • Rhee Hyug-Gyo;Lee Yun-Woo;Lee In-Won;Vorburger Theodore V.
    • Journal of the Optical Society of Korea
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    • v.10 no.1
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    • pp.48-54
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    • 2006
  • White-light scanning interferometry (WLI) and phase shifting interferometry (PSI) are increasingly used for surface topography measurements, particularly for areal measurements. In this paper, we compare surface profiling results obtained from above two optical methods with those obtained from stylus instruments. For moderately rough surfaces ($Ra{\approx}500\;nm$), roughness measurements obtained with WLI and the stylus method seem to provide close agreement on the same roughness samples. For surface roughness measurements in the 50 nm to 300 nm range of Ra, discrepancies between WLI and the stylus method are observed. In some cases the discrepancy is as large as 109% of the value obtained with the stylus method. By contrast, the PSI results are in good agreement with those of the stylus technique.

Development of Optical Frequency Modulated Fiber Optic Interferometric Sensor (광주파수 변조 광섬유 간섭형 센서의 개발)

  • Kwon, Il-Bum;Kim, Chi-Yeop;Kim, Min-Soo;Lee, Wang-Joo
    • Journal of Sensor Science and Technology
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    • v.9 no.3
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    • pp.163-170
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    • 2000
  • Optical frequency modulated fiber optic interferometric sensor was developed to sense the mechanical quantities, such as displacement, strain, force etc. It has been difficult to distinguish whether the increase of the mechanical quantities or the decrease of the quantities measured by the conventional fiber optic interferometric sensors because their signals only have a sinusoidal wave pattern related to the change of mechanical quantities. In this study, in order to measure the mechanical quantifies with the distinction of the changing direction of the quantities, the fiber of optic Michelson interferometric sensor was simply constructed by the laser light modulated with saw tooth wave pattern. The output signal of the sensor was controlled as the sinusoidal wave. The signal processing was based on the counting of the wave number of the output signal during constant time duration. The strain was determined by the cumulative value of the wave number producted by the gage factor. In order to verify the strain measurement capability of this sensor, the strain increase-decrease test was performed by universal testing machine installed with the aluminum specimen bonded with the fiber optic sensor and electrical strain gage. In the result of the test, the strain from the fiber optic sensor had a good agreement with the values from the electrical strain gage.

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Integrated Cavity Output Spectroscopy Using an External Cavity Diode Laser for the Density Absorption Measurement of Trace Gases (미량 기체의 밀도 측정을 위한 외부 공진기 반도체 레이저 광학공동 적분 투과 분광법)

  • Ryoo Hoon Chul;Yoo Yong Shin;Lee Jae Yong;Hahn Jae Won
    • Journal of the Korean Vacuum Society
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    • v.15 no.1
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    • pp.24-30
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    • 2006
  • Integrated cavity output spectroscopy(ICOS) is a simple, non-intrusive absorption measurement technique that can detect and quantify trace-level gas species. The spectral absorbance of a gas is quantified from the integrated optical output of the modulated high-finesse cavity containing the sample which is irradiated by a wavelength-swept laser source. We constructed an experimental setup by using a tunable single mode external cavity diode laser operating at the wavelength near 765 nm and a Fabry-Perot cavity with length modulation achieved by a piezoelectric transducer where one of the cavity mirrors sat on. In the experiment performed on minute oxygen gas at the wave-length near 764.5nm, we demonstrated the minimum detectable absorption of $8.45\times10^{-8}cm^{-1}$.

AQuaKET Overview - A Nano-Accuracy Testing Method for Very Large Optics (AQuaKET 개괄 - 초대구경 나노정밀도 광학측정법)

  • 김영수
    • Proceedings of the Optical Society of Korea Conference
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    • 2002.07a
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    • pp.24-25
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    • 2002
  • 밀레니움을 전후하여 세계적으로 8m급 초대형 망원경들이 만들어지고 있다. ESO (European Southern Observatory)의 VLT (Very Large Telescopes) 4기, 미국 영국 카나다 등의 연합 Gemini telescope 2기, 일본의 Subaru 1기 등, 10여기의 망원경들이 완성되었고, 차세대 망원경들이 50m급으로 디자인되고 있다. 우주망원경도 지름 2.4m인 허블 우주망원경(Nubble Space Telescope)의 뒤를 이어 6m급의 차세대 우주망원경 (Next Generation Space Telescope)이 개발되고 있어서 2010년경에 발사될 예정이다. (중략)

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Energy Relaxation Dynamics of Excited Triplet States of Directly Linked Zn(II)Porphyrin Arrays

  • Song, Nam-Woong;Cho, Hyun-Sun;Yoon, Min-Chul;Aratani, Naoki;Osuka, Atsuhiro;Kim, Dong-Ho
    • Bulletin of the Korean Chemical Society
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    • v.23 no.2
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    • pp.271-276
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    • 2002
  • The energy relaxation dynamics of the lowest excited singlet and triplet states of the Zn(II)porphyrin monomer and its directly linked arrays were comparatively investigated with increasing the number of porphyrin moieties. While the fluorescence decay rates and quantum yields of the porphyrin arrays increased with the increase of porphyrin units, their triplet-triplet (T-T) absorption spectra and decay times remained almost the same. The difference in the trends of energy relaxation dynamics between the excited singlet and triplet states has been discussed in view of the electronic orbital configurations.

A Study on the Optical Communication System using Heterodyne Detection Method(Design of Thermal Chamber for LD Frequency Stabilization) (헤테로다인검파방식을 이용한 광통신시스템에 관한 연구 (LD의 주파수안정화를 위한 항온기설계 에 관하여))

  • 임명섭;홍완희;박한규
    • The Journal of Korean Institute of Communications and Information Sciences
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    • v.10 no.4
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    • pp.168-174
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    • 1985
  • The wavelength and output power of semiconductor laser is varying sensitively with temperature. It must be stabilized by the aid of some proper stabilization technique in order to use it as a radiative source for heterodyne optical communication, optical metrology, and high resolution spectroscopy. In this paper, the temperature of the thermal chamber was variable from -27$-50^{\circ}C$ to +73$-50^{\circ}C$ and the temperature stability was within ${\pm}2m{\circ}K$ or better.

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Four Degree-of-Freedom Geometric Error Measurement System with Common-Path Compensation for Laser Beam Drift

  • Qibo, Feng;Bin, Zhang;Cuifang, Kuang
    • International Journal of Precision Engineering and Manufacturing
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    • v.9 no.4
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    • pp.26-31
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    • 2008
  • A precision four-degree-of-freedom measurement system has been developed for simultaneous measurement of four motion errors of a linear stage, which include straightness and angular errors, The system employs a retro-reflector to detect the straightness errors and a plane mirror to detect the angular errors. A common-path compensation method for laser beam drift is put forward, and the experimental results show that the influences of beam drift on four motion errors can be reduced simultaneously. In comparison with the API 5D laser measuring system, the accuracy for straightness measurement is about ${\pm}1.5{\mu}m$ within the measuring range of ${\pm}650{\mu}m$, and the accuracy for pitch and yaw measurements is about ${\pm}1.5$ arc-seconds within the range of ${\pm}600$ arc-seconds.

BGA Height Measurement Using Pattern Beam (패턴 빔을 이용한 BGA 단차 측정)

  • Shin, Sang-Hoon;Yu, Young-Hun
    • Korean Journal of Optics and Photonics
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    • v.20 no.6
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    • pp.361-365
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    • 2009
  • We describe a simple method to obtain an optical sectioning in a conventional wide-field microscope by projecting a single spatial frequency grid pattern onto the object. Using a patterned beam, we have measured the height of BGA with a rough surface that provide the coherence noise. The configuration of the height measurement system using pattern beam is simple. The image acquired by this system is not depend on the coherence noises. This system is also applicable to the sample reference plan that has no pattern on ground. The reappearance and accuracy are outstanding and applicable to many industrial optical metrology.

Precision Profile Measurement of Mirror Surfaces by Phase Shifting Interferometry (광위상간섭에 의한 경면의 정밀 형상측정)

  • 김승우;공인복;민선규
    • Transactions of the Korean Society of Mechanical Engineers
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    • v.16 no.8
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    • pp.1530-1535
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    • 1992
  • An optical method of phase shifting interferometry is presented for the 3-dimensional profile measurement of mirror surfaces with nanometer resolution. A series of optical interferometric fringes are generated by comparing the surface to be measured with a reference flat. The fringes are captured by a CCD camera and then analyzed to obtain actual surface profile. Detailed principles are described along with necessary image processing algorithms. finally, several measurement examples are discussed which were performed on lapped surfaces, hard discs, and semiconductor wafers.