• Journal of the Korean Society for Precision Engineering
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• v.22 no.12 s.177
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• pp.16-21
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• 2005

Photonic crystals, periodic structure with a high refractive index contrast modulation, have recently become very interesting platform for the manipulation of light. The existence of a photonic bandgap, a frequency range in which the propagation of light is prevented in all directions, makes photonic crystal very useful in application where the spatial localization of light is required, for example waveguide, beam splitter, and cavity. However, the fabrication of 3 dimensional photonic crystals is still difficult process. A concept that has recently attracted a lot of attention is a planar photonic crystal based on a dielectric membrane, suspended in the air and perforated with two dimensional lattice of hole. The fabrication of Si master with pillar structure using hot embossing process is investigated for two dimensional, low-index-contrast photonic crystal waveguide. From our research we show that the multiple stamp copy process proved to be feasible and useful.

• Proceedings of the KSME Conference
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• 2007.05a
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• pp.1277-1281
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• 2007

A Nano-tip as a cold field emitter for inducing a field emission current has manufactured in many ways. In the paper, the electrochemical etching method is used. Thus, in order to optimize the final shape as the field emitter, the reliable fabrication system for electrochemical etching was constructed. In addition, the effective parameters such as applied voltage, submerged length, meniscus height, electrolyte concentration and environmental condition(vibration, humidity, cut-off time) have investigated in detail. By controlling the parameters, reliable tungsten tip for field emitter was fabricated. And the fabricated tungsten tip was evaluated optically. Finally, the very sharp apex of the tungsten tip was observed with scanning electron microscope.

• Transactions on Electrical and Electronic Materials
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• v.5 no.4
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• pp.143-147
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• 2004

Surface defects and bulk defects on SOI wafers are studied. Two new metrologies have been proposed to characterize surface and bulk defects in epitaxial layer transfer (ELTRAN) wafers. They included the following: i) laser scattering particle counter and coordinated atomic force microscopy (AFM) and Cu-decoration for defect isolation and ii) cross-sectional transmission electron microscope (TEM) foil preparation using focused ion beam (FIB) and TEM investigation for defect morphology observation. The size of defect is 7.29 urn by AFM analysis, the density of defect is 0.36 /cm$^2$ at as-direct surface oxide defect (DSOD), 2.52 /cm$^2$ at ox-DSOD. A hole was formed locally without either the silicon or the buried oxide layer (Square Defect) in surface defect. Most of surface defects in ELTRAN wafers originate from particle on the porous silicon.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2015.11a
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• pp.332-332
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• 2015

Block Copolymer lithography는 deep nano-scale device 제작을 위한 기존의 top-down방식의 photo-lithography를 대체할만한 기술로 많은 연구가 진행되고 있다. polystyrene(PS)/poly-methyl methacrylate (PMMA)로 구성된 BCP의 nano-scale PS mask는 일반적인 플라즈마 공정에 쉽게 damage를 입는다. 중성빔 식각을 이용하여 식각 공정 중 발생하는 BCP의 degradation을 감소시키고, 비등방성 식각 profile을 얻을 수 있으며 sidewall roughness(SWR)와 sidewall angle(SWA)가 향상되는 것을 알 수 있었다.

• Advances in materials Research
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• v.8 no.3
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• pp.237-257
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• 2019

The present article researches large-amplitude thermal free vibration characteristics of nonlocal two-phase piezo-magnetic nano-size beams having geometric imperfections by considering piezoelectric reinforcement scheme. The piezoelectric reinforcement can cause an enhanced vibration behavior of smart nanobeams under magnetic field. All previous studies on vibrations of piezoelectric-magnetic nano-size beams ignore the influences of geometric imperfections which are crucial since a nanobeam is not always ideal or perfect. Nonlinear governing equations of a smart nanobeam are derived based on classical beam theory and an analytical trend is provided to obtain nonlinear vibration frequency. This research shows that changing the volume fraction of piezoelectric phase in the material has a great influence on vibration behavior of smart nanobeam under electric and magnetic fields. Also, it can be seen that nonlinear vibration behaviors of smart nanobeam is dependent on the magnitude of exerted electric voltage, magnetic imperfection amplitude and substrate constants.

• Journal of the Korean Society for Precision Engineering
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• v.24 no.6
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• pp.96-104
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• 2007

Calibration of the spring constants of atomic force microscopy (AFM) cantilevers is one of the issues in biomechanics and nanomechanies for quantified force metrology at pieo- or nano Newton level. In this paper, we present an AFM cantilever calibration system: the Nano Force Calibrator (NFC), which consists of a precision balance and a one-dimensional stage. Three types of AFM cantilevers (contact and tapping mode) with different shapes (beam and V) and spring constants (42, 1, 0.06 N $m^{-1}$) are investigated using the NFC. The calibration results show that the NFC can calibrate the micro cantilevers ranging from 0.01 ${\sim}$ 100 N $m^{-1}$ with relative uncertainties of less than 2%.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.30 no.12 s.255
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• pp.1557-1563
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• 2006

A scanning electron microscope (SEM) is well known as a measurement and analysis equipment in nano technology, being widely used as a crucial one in measuring objects or analyzing chemical components. It is equipped with an electron optical system that consists of an electron beam source, electromagnetic lenses, and a detector. The present work concerns numerical analysis for the electron optical system so as to facilitate design of each component. Through the numerical analysis, we investigate trajectories of electron beams emitted from a nano-scale field emission tip, and compare the result with that of experimental observations. Effects of various components such as electromagnetic lenses and an aperture are also discussed.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2003.10a
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• pp.136-137
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• 2003

In this study, in order to fabricate sintered dental implant, the effects of HA, Ti and TiN on corrosion and biocompatibility, cell toxicity, osseointegration of electroless Cu-plated and sintered stainless steel implant were investigated using various characteristics. The effects of Ti/TiN/HA coating on the interface activation and surface characteristics of sintered stainless steels(SSS) by electron-beam physical vapor deposition(EB-PVD) method have been studied. Stainless steel compacts containing 2, 4, and 10 wt%Cu were prepared by electroless Cu-plating method which results in the increased homogenization in alloying powder. The specimens were coated with HA, Ti and TiN with few $\mu\textrm{m}$ thickness respectively by EB-PVD method. The microstructures and phase analysis were conducted by using SEM. Biocompatibility were investigated in experimental dog. The corrosion behaviors were investigated using potentiosat in 0.9% NaCl solution and corrosion surface was observed using SEM and XPS.

• Advances in nano research
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• v.5 no.2
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• pp.179-192
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• 2017

The transverse vibration of double walled carbon nanotube (DWCNT) embedded in elastic medium with an initial imperfection is considered. In this paper, Timoshenko beam theory is employed. However the nonlocal theory is used for modeling the nano scale of nanotube. In addition, the governing Equations of motion are obtained utilizing the Hamilton's principle and simply-simply boundary conditions are assumed. Furthermore, the Navier method is used for determining the natural frequencies of DWCNT. Hence, some parameters such as nonlocality, curvature amplitude, Winkler and Pasternak elastic foundations and length of the curved DWCNT are analyzed and discussed. The results show that, the curvature amplitude causes to increase natural frequency. However, nonlocal coefficient and elastic foundations have important role in vibration behavior of DWCNT with imperfection.

• Advances in nano research
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• v.10 no.5
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• pp.493-507
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• 2021

This article focused on studying the buckling behavior of two-dimensional functionally graded (2D-FG) nanosize tubes, including porosity based on first shear deformation and higher-order theory of tube. The nano-scale tube is simulated based on the nonlocal gradient strain theory, and the general equations and boundary conditions are derived using Hamilton's principle for the Zhang-Fu's tube model (as higher-order theory) and Timoshenko beam theory. Finally, the derived equations are solved using a numerical method for both simply-supported and clamped boundary conditions. The parametric study is performed to study the effects of different parameters such as axial and radial FG power indexes, porosity parameter, nonlocal gradient strain parameters on the buckling behavior of di-dimensional functionally graded porous tube.