• Title/Summary/Keyword: nDrive

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Electrical Characteristics of p+/n Junctions with Cu/Ti-capping/NiSi Electrode (Cu/Ti-cappng/NiSi 전극구조 p+/n 접합의 전기적 특성)

  • Lee Keun-Yoo;Kim Ju-Youn;Bae Kyoo-Sik
    • Korean Journal of Materials Research
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    • v.15 no.5
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    • pp.318-322
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    • 2005
  • Ti-capped NiSi contacts were formed on $p^+/n$ junctions to improve the leakage problem and then Cu was deposited without removing the Ti-capping layer in an attempt to utilize as a diffusion barrier. The electrical characteristics of these $p^+/n$ diodes with Cu/Ti/NiSi electrodes were measured as a function of drive-in RTA(rapid-thermal annealing) and silicidation temperature and time. When drive-in annealed at $900^{\circ}C$, 10 sec. and silicided at $500^{\circ}C$, 100 sec., the diodes showed the most excellent I-V characteristics. Especially, the leakage current was $10^{-10}A$, much lower than reported data for diodes with NiSi contacts. However, when the $p^+/n$ diodes with Cu/Ti/NiSi contacts were furnace-annealed at $400^{\circ}C$ for 40 min., the leakage current increased by 4 orders. The FESEM and AES analysis revealed that the Ti-capping layer effectively prohibited the Cu diffusion, but was ineffective against the NiSi dissociation and consequent Ni diffusion.

Electrostatic Microactuators operated at low drive voltages Using Triangular Tip (삼각 팁을 이용한 저전압 구동형 정전방식 마이크로액추에이터)

  • Kim, Bong-Hwan;Seong, U-Gyeong;Jeon, Guk-Jin
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.38 no.9
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    • pp.605-610
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    • 2001
  • Electrostatic comb-drive microactuators with sub-micron gap were fabricated and tested. We designed and fabricated two type of electrodes which are rectangular and triangular tip. The fabricated microactuators with triangular tip resulted in the electrode gaps in the range of 0.55 ${\mu}{\textrm}{m}$~1.35 ${\mu}{\textrm}{m}$ Displacement of 1 ${\mu}{\textrm}{m}$ and electrostatic force of 2.3 $\mu$N were observed in a triangular-tip microactuator with 0.55 ${\mu}{\textrm}{m}$ gap when a DC drive voltage of 13 volts was applied. Measured 1st resonance frequency of microactuators was about 23 kHz.

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New Double-Connected Multi-Step Inverter for High Power Motor Drive Applications (대용량 모터드라이브 적용을 위한 새로운 이중접속방식의 멀티스텝 인버터)

  • Yang, Seung-Uk;Choe, Gyu-Ha;Mok, Hyung-Soo
    • The Transactions of the Korean Institute of Power Electronics
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    • v.11 no.3
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    • pp.209-215
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    • 2006
  • Now, in this paper, going to present you with an Idea related to a new inverter of multi-step voltage source, that Is, the double-connected 12-step inverter with an auxiliary circuit. It possibly can be 24-step inverter with 3-phase voltage source which will enable us make full application even to medium and high power-level Motor drive, UPS, STATCOM, SVC, etc. in which the PWM method could not be employed. 24-step operation can be obtained from the link between the existing 12-step inverter and the additional auxiliary circuit in which the transformer of auxiliary circuit generates ripple voltage delivered to the inverter. Through a lot of experiments and simulations, (from which the validity of this scheme is confirmed,) we came to the conclusion that the increase of the primary winding number on transformer by 2N(N=1,2,3....) leads to the 12M-step(M=2,3,4...) inverter. The validity of the proposed scheme is confirmed by the simulated and experimental results.