Journal of the Institute of Electronics Engineers of Korea SD (대한전자공학회논문지SD)

The Institute of Electronics and Information Engineers (대한전자공학회)
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Electrostatic Microactuators operated at low drive voltages Using Triangular Tip

삼각 팁을 이용한 저전압 구동형 정전방식 마이크로액추에이터

  • Kim, Bong-Hwan (Dept.of Electric Computer Engineering, Seoul National University) ;
  • Seong, U-Gyeong (Dept.of Electric Computer Engineering, Seoul National University) ;
  • Jeon, Guk-Jin (Dept.of Electric Computer Engineering, Seoul National University)
  • 김봉환 (서울대학교 전기컴퓨터공학부) ;
  • 성우경 (서울대학교 전기컴퓨터공학부) ;
  • 전국진 (서울대학교 전기컴퓨터공학부)
  • Published : 2001.09.01
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Abstract

Electrostatic comb-drive microactuators with sub-micron gap were fabricated and tested. We designed and fabricated two type of electrodes which are rectangular and triangular tip. The fabricated microactuators with triangular tip resulted in the electrode gaps in the range of 0.55 ${\mu}{\textrm}{m}$~1.35 ${\mu}{\textrm}{m}$ Displacement of 1 ${\mu}{\textrm}{m}$ and electrostatic force of 2.3 $\mu$N were observed in a triangular-tip microactuator with 0.55 ${\mu}{\textrm}{m}$ gap when a DC drive voltage of 13 volts was applied. Measured 1st resonance frequency of microactuators was about 23 kHz.

본 연구에서는 저전압 구동형 정전방식을 이용하여 마이크론 이하 간격(sub-micron gap)을 갖는 마이크로액추에이터를 제작하였다. 사각 팁과 삼각 팁의 두 가지 방식으로 마이크로액추에이터를 제작하여 비교하였다. 삼각 팁으로 제작된 마이크로액추에이터의 gap은 0.55㎛∼l.35㎛었다. 0.55㎛ gap을 갖는 제작된 마이크로액추에이터의 경우에 13V의 낮은 전압에서 1㎛의 변위와 2.3μN의 발생력을 나타내었다. 이 마이크로액추에이터의 1차 공진주파수의 측정값의 23kHz이었다.

Keywords

References

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