• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.250-253
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• 2004

This study deals with the microvalve, which is composed of the multilayer bender type PZT actuator, actuator controller and microvalve body. The object of this study is to develope the microvalve with multilayer bender type PZT actuator. In order to achieve this object, prototype PZT actuator and microvalve were suggested and manufactured. Also, the performance of this model was evaluated through the experiments.

• Journal of Sensor Science and Technology
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• v.13 no.6
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• pp.473-478
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• 2004

This study focused on the charateristic of magnetic fluids, the viscosity deviation of magnetic fluids due to temperature changes, and fabrication of a 'purely' liquid type microvalve. The viscosity of magnetic fluids decreases sharply during increasing of temperature. The viscosity of magnetic fluids is rated 1,000 cP at the room temperature and 25 cP when the temperature reaches $100^{\circ}C$. Briefly, it is remarkable that the fluid flow can be controlled by the temperature and this characteristic can be adopted to the microfluidics as a microvalve. The fabrication of a liquid type microvalve is more easy than solid state microvalves and which can increase an efficiency of the controlability with respect to the thermo-pneumatic micropump which is studied broadly for many years. When the magnetic fluid used as a sealant for high level sealing, the pressure leakage is less than solid state microvalve. The experimental results show that the pressure drop in microchannel, filled with the magnetic fluid, is significant in the temperature range of $20^{\circ}C{\sim}50^{\circ}C$ and this result explains why the use of magnetic fluids is possible as a microvalve searcher uses this characteristics. Well known thermo-pnumatic.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.11a
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• pp.383-386
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• 2002

This paper reports on the fluid flow simulation results of an active microvalve. The mechanical and fluidic analysis are done by finite element method. The designed structure is normally closed microvalve using buckling effect, which is consist of three separate structures; a valve seat die, an actuator die and a small piezoelectric actuator. It is confirmed that the complete laminar flow and the lowest flow leakage are strongly depend on the valve seat geometry. In addition, turbulent flow was occurs in valve outlet according to increase seat dimension, height and inlet pressure. From this, we was deducts the optimum geometry of the valve seat and diaphragm deflection that have an great influence fluid flow in microvalve. Thus, it is expected that our simulation results would be apply for constructing integrated chemical analyzing system or drug delivery system.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.53 no.4
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• pp.231-236
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• 2004

A normally open thermopneumaticc-actuated microvalve has been fabricated and their properties are investigated. The advantages of the proposed microvalve are of the low cost fabrication process and the transparent optical property using polydimethylsiloxane (PDMS) and indium tin oxide (ITO) glass. The fabricated microvalves with in-channel configuration are easily integrated with other microfluidic devices on the same substrate. The fabrication process of thermopneumatic-actuated microvalvesusing PDMS is very simple and its performance is very suitable for a disposable lab-on-a-chip. The PDMS membrane deflection increases and the flow rates of the microchannel with microvalvels decrease as the applied power to the ITO heater increases. The powers at flow-off are dependent on the membrane thickness and the applied inlet pressure but are independent of the channel width of microvalves. The flow rate is well controlled by the switching function of ITO heater and the closing/opening times are around 20 sec and 25 sec, respectively.

• Proceedings of the KSME Conference
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• 2005.11a
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• pp.44.1-44.1
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• 2005

• JSTS:Journal of Semiconductor Technology and Science
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• v.2 no.4
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• pp.253-258
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• 2002

This paper reports the design, modeling, fabrication and measurement of passive microvalves, which are applicable to glaucoma implants. The proposed microvalves were designed using fluidic theory. The microvalves consisted of microchannels and chambers. The microchannels had a constant fluidic resistance generating a pressure difference. Six kinds of microvalves were designed using fluidic equations for laminar flow and fabricated to examine the influences of chamber size, channel length and the shape of channel cross section. The pressure difference between the designed microvalve and the fabricated microvalve was measured to be less than 4%.

• Journal of Sensor Science and Technology
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• v.15 no.1
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• pp.47-52
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• 2006

This paper describes the design, fabrication and characteristics of a buckling microvalve using a MCA (multilayer ceramic actuator). The mechanical and fluidic analysis are done by finite element method. The designed structure is normally closed microvalve using buckling effect, which is consist of three separate structures; a valve seat die, an actuator die and a small piezoelectric actuator. The flow rate of the fabricated MCA valve was 0-8.13 ml/min at the applied pressure of 0-50 kPa. Maximum non-linearity was 2.24 % FS at a duty cycle of 50 %. The maximum pressure was 230 kPa and the leak rate was $3.03{\times}10^{-8}\;Pa{\cdot}m^{3}/cm^{2}$ at a supply voltage of 100 V.

• Proceedings of the KIEE Conference
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• 2007.07a
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• pp.1526-1527
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• 2007

This paper presents the design, fabrication and experimental results of an electromagnetic microvalve for drug delivery systems. The microvalve consists of two silicon substrates with a silicone rubber diaphragm and a flow channel, a PDMS layer, and an electromagnetic actuator. Each substrate is fabricated by using the silicon wet etch, SU-8 mold process and $O_2$ plasma bonding.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1989.06a
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• pp.66-69
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• 1989

After reviewing previous work done on two piezoelectric thin films(PZT, ZnO), ZnO thin piezofim of 1-3UM is fabricated by sputtering on the different substrates(i. e., P+Si/N-Si, SiO2/P+Si/ N-Si, Al/SiO2/ P+Si/ N+Si). The result shows that ZnO piezofilm on the Al has the best c-axis orientation. One of applications for the ZnO piezofilm as an microvalve to control liquid flow is introduced, and which can be controlled electrically and remotely.

• Bulletin of the Korean Chemical Society
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• v.34 no.10
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• pp.2921-2924
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• 2013

Immunoliposomes (antibody-conjugated liposomes) are highly useful as both a drug carrier in drug delivery and as a reporting probe in immunodiagnostics. However, antibody conjugation is lengthy and cumbersome, because this includes several steps such as derivatization of the antibody, conjugation of the derivatized antibody to liposomes, and separation of the unbound antibodies from immunoliposomes. Recently, liposome preparation steps have simplified by using microfluidic devices (${\mu}FDs$) where liposomes are formed when a stream of lipids in solvent is hydrodynamically focused between two oblique buffer streams in a microchannel. Herein, we report a simple method for the production of immunoliposomes (rabbit IgG-conjugated liposomes) using microvalve-controlled ${\mu}FD$. The presence of antibody on the liposome was verified by observing the binding of immunoliposomes to rabbit IgG on the surface. The results suggest that immunoliposomes can be easily prepared through sequential mixing of antibody, conjugation reagents, preformed liposomes using microvalve-controlled ${\mu}FD$.