Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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Design, Fabrication of Electromagnetic Microvalve for Drug Delivery Systems

약물 전달용 전자력 마이크로 밸브의 설계 및 제작

  • Lim, In-Ho (Divison of Electrical & Computer Engineering, Ajou University) ;
  • Lee, Ki-Jung (Divison of Electrical & Computer Engineering, Ajou University) ;
  • Yoon, Hyeun-Joong (Divison of Electrical & Computer Engineering, Ajou University) ;
  • Sim, Woo-Young (Divison of Electrical & Computer Engineering, Ajou University) ;
  • Yang, Sang-Sik (Divison of Electrical & Computer Engineering, Ajou University)
  • Published : 2007.07.18
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Abstract

This paper presents the design, fabrication and experimental results of an electromagnetic microvalve for drug delivery systems. The microvalve consists of two silicon substrates with a silicone rubber diaphragm and a flow channel, a PDMS layer, and an electromagnetic actuator. Each substrate is fabricated by using the silicon wet etch, SU-8 mold process and $O_2$ plasma bonding.

Keywords