• 대한기계학회:학술대회논문집
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• 대한기계학회 2008년도 추계학술대회B
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• pp.2788-2793
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• 2008

A numerical analysis has been conducted for flow characteristics and performance of a micropump with piezodisk and MHD(Magnetohydrodynamics) fluid. Various micro systems which could not be considered in the past have been recently growing with the development of MEMS(Micro Electro Mechanical System) and micro machining technology. Especially, micropumps, essential part of micro fluidic devices, are being lively studies by many researchers. In the present study, the piezo electric micropump with electromagnetic resistance for electrically conducting fluids is considered. The prescribed grid deformation method is used for the displacement of the membrane. The change of the performance of the micropump and flow characteristics of the electrically conducting fluid with the magnitude of the magnetic fields, duct size, the position of the inlet and outlet duct are investigated in the present study.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2002년도 추계학술대회 논문집
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• pp.370-375
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• 2002

Recently, the interest on micro optical parts has increased rapidly with the development of technology related to microsystems. Among the optical parts, micro lens is one of the most broadly used micro parts. To mass-produce the micro lenses, it is very effective to use the mold insert and injection molding process. There are many methods to fabricate the mold insert for micro lenses: electroforming, etching, mechanical micromachining and so on. In this study, we fabricated the mold insert for micro lenses using a micro ball endmill to apply mechanical micromaching method and analyzed the effect of main process parameters such as spindle speed, feed rate, dwell time on the processed surface. Then, using fabricated the mold insert we fabricated the micro lenses through injection molding process.

• Korea-Australia Rheology Journal
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• 제19권2호
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• pp.89-95
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• 2007

The flow characteristics of chicken blood in a micro-tube with a $100{\mu}m$ diameter are investigated using a micro-Particle Image Velocimetry (PIV) technique. Chicken blood with 40% hematocrit is supplied into the micro-tube using a syringe pump. For comparison, the same experiments are repeated for human blood with 40% hematocrit. Chicken blood flow has a cell-free layer near the tube wall, and this layer's thickness increases with the increased flow speed due to radial migration. As a hemorheological feature, the aggregation index of chicken blood is about 50% less than that of human blood. Therefore, the non-Newtonian fluid features of chicken blood are not very remarkable compared with those of human blood. As the flow rate increases, the blunt velocity profile in the central region of the micro-tube sharpens, and the parabolicshaped shear stress distribution becomes to have a linear profile. The viscosity of both blood samples in a low shear rate condition is overestimated, while the viscosity in a high shear rate range is underestimated due to radial migration and the presence of a cell-depleted layer.

• 한국전기전자재료학회논문지
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• 제14권3호
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• pp.228-233
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• 2001

This paper presents the optimized design, fabrication and thermal characteristics of micro-heaters for thermal MEMS (micro elelctro mechanical system) applications usign SOI (Si-on-insulator) and trench structures. The micro-heater is based on a thermal measurement principle and contains for thermal isolation regions a 10㎛ thick Si membrane with oxide-filled trenches in the SOI membrane rim. The micro-heater was fabricated with Pt-RTD (resistance thermometer device) on the same substrate by suing MgO as medium layer. The thermal characteristics of the micro-heater wit the SOI membrane is 280$\^{C}$ at input power 0.9W; for the SOI membrane with 10 trenches, it is 580$\^{C}$ due to reduction of the external thermal loss. Therefore, the micro-heater with trenches in SOI membrane rim provides a powerful and versatile alternative technology for improving the performance of micro-thermal sensors and actuators.

• 대한기계학회논문집B
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• 제32권7호
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• pp.542-548
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• 2008

A thermal mass air flow sensor (MAFS), which consists of a micro-heater and thermo-resistive sensors on the silicon-nitride ($Si_3N_4$) thin membrane structure, is micro-fabricated by MEMS processes. Two thermo-resistive temperature sensors are located at $100{\mu}m$ upstream and downstream from the micro-heater respectively. The thermal characteristics are measured to find the best measurement indicator. The micro-heater is operated under constant power condition, and four flow indicators are investigated. The normalized temperature indicator shows good physical meaning and is easy to use in practice. It is found that the configurations and heating power of thermal-resistive elements are the dominant factors to determine the range of the flow measurement in the MAFS with higher sensitivity and accuracy.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 추계학술대회 논문집
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• pp.403-404
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• 2006

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.481-482
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• 2006

Chemical-mechanical polishing, the dominant technology for LSI planarization, is trending to play an important function in micro-electro mechanical systems (MEMS). However, MEMS CMP process has a couple of different characteristics in comparison to LSI device CMP since the feature size of MEMS is bigger than that of LSI devices. Preliminary CMP tests are performed to understand material removal rate (MRR) with blanket wafer under a couple of polishing pressure and velocity. Based on the blanket CMP data, this paper focuses on the consumable approach to enhance MEMS CMP by the adjustment of slurry and pad. As a mechanical tool, newly developed microstructured (MS) pad is applied to compare with conventional pad (IC 1400-k Nitta-Haas), which is fabricated by micro melding method of polyurethane. To understand the CMP characteristics in real time, in-situ friction force monitoring system was used. Finally, the topography change of poly-si MEMS structures is compared according to the pattern density, size and shape as polishing time goes on.

• 소성∙가공
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• 제15권9호
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• pp.692-696
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• 2006

Micro fabrication of polymeric materials becomes increasingly important. And it is considered as a low-cost alternative to the silicon or glass-based Micro Electro-Mechanical System(MEMS) technologies. In the present study, micro channels were fabricated via LiGA(Lithographie, Galvanoformung, Abformung) process used for Capillary Electrophoresis(CE) chip. Taguchi method was applied to investigate the effects of process conditions in injection molding(melt temperature, injection speed, mold temperature and packing pressure) on the transcription characteristics of the micro channel. It was found that the skin layer disturbs a formation of micro channel. Furthermore, mold temperature and injection speed were two important factors to affect the replication characteristics of micro channel.

• 한국추진공학회:학술대회논문집
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• 한국추진공학회 2012년도 제38회 춘계학술대회논문집
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• pp.309-317
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• 2012

Recent years have witnessed the use of micro shock tube in various engineering applications like micro combustion, micro propulsion, particle delivery systems etc. The flow characteristics occurring in the micro shock tube shows a considerable deviation from that of well established conventional macro shock tube due to very low Reynolds number and high Knudsen number effects. Also the diaphragm rupture process, which is considered to be instantaneous process in many of the conventional shock tubes, will be crucial for micro shock tubes in determining the near diaphragm flow field and shock formation. In the present study, an axi-symmetric CFD method has been applied to simulate the micro shock tube, with Maxwell's slip velocity and temperature jump boundary conditions. The effects of finite diaphragm rupture process on the flow field and the shock formation was investigated, in detail. The results show that the shock strength attenuates rapidly as it propagates through micro shock tubes.

• Current Applied Physics
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• 제18권11호
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• pp.1368-1374
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• 2018

In this paper, forced vibration was used to regulate the droplet migration, fully recording the transient migration of droplets on a micro-textured substrate under the resonance frequency by a high-speed camera. The influence of resonance frequency and dynamic migration characteristics of droplets on the solid micro-texture surface under lateral vibration were researched. The experiment demonstrates that the driving force is caused by the difference between the left and right contact angles made the droplet oscillate and migrate, and as time t increases, the left and right contact points are periodically shifted and the amplitude of migration increases. Therefore, based on the droplet migration behavior and its force balance mechanism, a spring vibration model of migration behavior of the vibrating droplet micro unit was set up to predict the complete trajectory of its migration on a solid surface. The calculation results show that the theoretical displacement is less than the experimental displacement, and the longer the time, the larger the difference. Affected by the vibration, part of the droplet permeates through the micro-texture, resulting in the droplet losing height and the contact angle becoming smaller as well. While the other part of droplet overcomes the internal surface tension to migrate.