Transactions of the Korean Society of Mechanical Engineers B (대한기계학회논문집B)

The Korean Society of Mechanical Engineers (대한기계학회)
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Micro-Fabrication and Thermal Characteristics of a Thermal Mass Air Flow Sensor for Real-time Applications

고응답 열식 질량공기유량센서의 제작 및 열거동 특성

  • 박병규 (서울대학교 기계항공공학부) ;
  • 이준식 (서울대학교 기계항공공학부)
  • Published : 2008.07.01
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Abstract

A thermal mass air flow sensor (MAFS), which consists of a micro-heater and thermo-resistive sensors on the silicon-nitride ($Si_3N_4$) thin membrane structure, is micro-fabricated by MEMS processes. Two thermo-resistive temperature sensors are located at $100{\mu}m$ upstream and downstream from the micro-heater respectively. The thermal characteristics are measured to find the best measurement indicator. The micro-heater is operated under constant power condition, and four flow indicators are investigated. The normalized temperature indicator shows good physical meaning and is easy to use in practice. It is found that the configurations and heating power of thermal-resistive elements are the dominant factors to determine the range of the flow measurement in the MAFS with higher sensitivity and accuracy.

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References

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