Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
권호 표지

The Fabrication of Micro-heaters with Low Consumption Power Using SOI and Trench Structures and Its Characteristics

SOI와 트랜치 구조를 이용한 초저소비전력형 미세발열체의 제작과 그 특성

  • 정귀상 (동서대학교 정보시스템공학부 메카트로닉스전공) ;
  • 홍석우 (삼성종합기술원 MEMS팀) ;
  • 이원재 (KERI 신소재응용그룹) ;
  • 송재성 (KERI 신소재응용그룹)
  • Published : 2001.03.01
Download PDF
⟨ Previous Next ⟩

Abstract

This paper presents the optimized design, fabrication and thermal characteristics of micro-heaters for thermal MEMS (micro elelctro mechanical system) applications usign SOI (Si-on-insulator) and trench structures. The micro-heater is based on a thermal measurement principle and contains for thermal isolation regions a 10㎛ thick Si membrane with oxide-filled trenches in the SOI membrane rim. The micro-heater was fabricated with Pt-RTD (resistance thermometer device) on the same substrate by suing MgO as medium layer. The thermal characteristics of the micro-heater wit the SOI membrane is 280$\^{C}$ at input power 0.9W; for the SOI membrane with 10 trenches, it is 580$\^{C}$ due to reduction of the external thermal loss. Therefore, the micro-heater with trenches in SOI membrane rim provides a powerful and versatile alternative technology for improving the performance of micro-thermal sensors and actuators.

Keywords

References

  1. Sensor & Actuators A v.31 Sensor Technology Stategy in Silicon P. M. Sarro
  2. Sensor & Actuators A v.49 Application of Thermal Si Sensors on Membranes M. A. Gajda(et. al.)
  3. Trans. Eurosensors. Ⅸ v.130-C2 A Microsensor with Integrated Heat Sink and Flow Guide for Gas Flow Sensing Application L. Qiu(et. al.)
  4. IEEE Electron Device Letters v.13 no.2 Micromachined Thermal Radiation Emittr from a Commercial CMOS Prosess M. Parameswaran(et. al.)
  5. IEEE Trans. on Electron Devices v.39 no.6 An Integrated Mass Flow Sensor with One-chip CMOS Interface Ciruitry E. Yoon(et. al.)
  6. Sensor & Actuators B v.26-27 Interated Array Sensors for Detection Organic Solvants J. W. Garderer(et. al.)
  7. Sensor & Actuators B v.2 A Substrate for Thin-film Gas Sensors in Microelectronic Technology U. Dibbern
  8. 7th Conf. on Sensor Technology Microtechnology and Equipment for Manufacturing SiC-based Sensor of Physical Values for Exterm Operation Conditions V. V. Luchinin
  9. Sensor & Actuators B v.2 A Substrate for Thin-film Gas Sensor in Microelectrocnic Technology U. Dibbern
  10. Trans. Eurosensors. Ⅸ v.57 no.PA6 Basic Micro-module for Chemical Sensor with One-chip Heater Buried Sensor Structure D. Mutschall(et. al.)
  11. J. Korean Sensors Society v.5 no.5 A Thermal Properties of Microhot Plate and the Characteristics of Pt/Cr Bilayers due to Annealing Temperature S. H. Lee(et. al.)
  12. Sensors & Materials v.10 no.5 The Fabrication of Pt Microheater Using Aluminum Oxide as Medium Layer and It's Characteristics G. S. Chung(et. al.)
  13. J. KIEEME v.13 no.6 The Fabrication of Pt Thin-film Type Microheater for Micro Thermal Sensors and Its Characteristics G. S. Chung(et. al.)
  14. Sensors & Materials v.12 no.3 Anisotropic Etching Characteristics of Silicon in TMAH:IPA:Pyrazine Solutions G. S. Chung(et. al.)
  15. J. Korean Sensors Society v.9 no.3 the Fabrication and Characteristics of RTD's for Micro Thermal Sensors G. S. Chung(et. al.)
  16. J. KIEEME v.9 no.9 Deposition of Pt Thin-Films for RTD G. S. Chung(et. al.)
  17. J. Korean Sensors Society v.6 no.2 Characteristics of Pt Thin-film RTD with Annealing Conditions G. S. Chung(et. al.)