• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2002년도 하계종합학술대회 논문집(2)
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• pp.21-24
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• 2002

A sensor array (35mm'! in diaphragm dimension) of 12 sensing elements with different operating temperatures was optimized with respect to thermal operation. This sensor array with single heater on a glass diaphragm over back-etched silicon bulk realizes a novel concept of a sensor array: an way of sensor elements operated at different temperatures can yield more information than single measurement. The proposed micro sensor array could provide well-integrated way structure because it has only single heater at the center of the diaphragm and used the various sensing properties of two kinds of metal oxide layers with various operating temperatures.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 1987년도 한국자동제어학술회의논문집; 한국과학기술대학, 충남; 16-17 Oct. 1987
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• pp.87-90
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• 1987

This paper gives the Sonic Range Finder(SRF) Array which detects the unknown obstacles on the mobile robot's path. This SRF Array gives mobile robot's circumstance information wider, processes and transfers them to the locomotion module to construct the modify path. In this system, 8 pairs of the 40 KHz ultrasonic sensors constitute the SRF Array, including a pair of reference sensors to correct the errors, 4051 analog multiplexer and demultiplexer swtch the sensor with time and 8031-on chip micro computer controls processes the data and communication the others.

• JSTS:Journal of Semiconductor Technology and Science
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• 제6권4호
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• pp.293-298
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• 2006

Thermopiezoelectric method, using poly silicon heater and a piezoelectric sensor, was proposed for writing and reading in a probe based data storage system. Resistively heated tip writes data bits while scanning over a polymer media and piezoelectric sensor reads data bits from the self-generated charges induced by the deflection of the cantilever. 34${\times}$34 array of thermopiezoelectric nitride cantilevers were fabricated by a single step wafer level transfer method. We analyzed the noise level of the charge amplifier and measured the noise signal. With the sensor and the charge amplifier 20mn of deflection could be detected at a frequency of 10KHz. Reading signal was obtained from the cantilever array and the sensitivity was calculated.

• 한국광학회:학술대회논문집
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• 한국광학회 1990년도 제5회 파동 및 레이저 학술발표회 5th Conference on Waves and lasers 논문집 - 한국광학회
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• pp.207-210
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• 1990

The mechanisms of the meltback etching and regrowth processes are studied experimentally. The depth and time of the meltback is poltted with the experimental data and fitted with some functions. The method to reduce the anisotropy and elliminate the gallium is lands are also developed. It is possible to fabricate the AlGaAs micro-lens array by the use of the process and apply it to a new optical devices.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2008년도 춘계학술대회 논문집
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• pp.573-574
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• 2008

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2011년도 춘계학술대회 논문집
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• pp.205-206
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• 2011

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2004년도 추계학술대회논문집
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• pp.36-39
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• 2004

Glass molding is an advantageous method to manufacture glass micro optical components. However, it is difficult to make Tungsten Carbide core for glass microlens array. We have developed novel method to fabricate Tungsten Carbide core for micro glass components using pressure forming. Silicon masters were fabricated by micro machining. Tungsten Carbide core was fabricated by pressure forming and sintering. And we made high quality surface of Tungsten Carbide core by using the magnetic-field-assisted polishing process.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2002년도 춘계학술대회 논문집
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• pp.94-97
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• 2002

Micromolding methods are most suitable for mass production of plastic microlens and lens array with low cost. Among the procedures related with micromolding of microlens array, fabrication of mold insect which contains micro cavity of lens shape is the most important stage. In this study, nickel mold inserts for 45 $\mu\textrm{m}$ and 95 $\mu\textrm{m}$ diameters lens way were fabricated using electroforming process. The mother for metal mold inset was made using reflow method. A micro compression molding with polymer powders was used to test the qualities of the metal mold insets. Micro lens profile and surface roughness was measured by interferometric technique and AFM, respectively. The final molded lens replicated the mother well, and had good surface quality.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1998년도 하계학술대회 논문집 G
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• pp.2547-2549
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• 1998

Automatic yield-test equipment for micro mirror array using image processing was developed. This computerized test equipment can classify the error states of the micromirrors. The test results are displayed on the monitor as a map which shows the error states and position. It is possible to measure yield and reliability with this test equipment for micromirror array using image processing.

• 한국전자통신학회논문지
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• 제8권12호
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• pp.1875-1882
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• 2013

마이크로 어레이 기술은 유전자 네트워크의 순서 와 게놈의 통합과 같은 많은 업적을 기여하고 있으며, 이러한 기술은 유전자 발현의 패턴을 조사하기 위한 수단 등으로 잘 확립 되어있다. DNA 마이크로배열은 Affymetric 칩을 이용하여 대량의 DNA 서열을 합성 할 수 있는데 기존의 DNA 어레이 스포팅에는 일반적으로 접촉방식과 압전전자 방법등 두가지 유형이 있다. 접촉방법은 유리 슬라이드 표면과 접촉하도록 스포팅핀을 사용하는데 이 방법은 표면 매트릭스의 손상이나 상처가 발생할 수 있어 단백질이 오염 되거나 특정 결합을 방해할 위험이 있다. 반면에 압전전자 방법은 대량 생산이 가능함에도 불구하고 결과를 인쇄할 분석기가 필요하므로 현재 실험실 내에서만 수행 가능한 실정이다. 본 논문에서 유리 슬라이드 표면에 닿지 않고 지속적으로 일관성 있게 스포팅이 가능하도록 하는 진보된 방법을 제시한다.