Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1998.07g
- /
- Pages.2547-2549
- /
- 1998
Development of automatic yield-test equipment for the Micromirror Array
Micromirror Array의 Yield 측정을 위한 방법 개발
- Cho, Kwang-Woo (Department of Electrical Engineering, Chung-Ang University) ;
-
Kim, Ho-Seong
(Department of Electrical Engineering, Chung-Ang University)
;
- Shin, Hyung-Jae (Samsung Electronics Co., LTD.)
- Published : 1998.07.20
Abstract
Automatic yield-test equipment for micro mirror array using image processing was developed. This computerized test equipment can classify the error states of the micromirrors. The test results are displayed on the monitor as a map which shows the error states and position. It is possible to measure yield and reliability with this test equipment for micromirror array using image processing.
Keywords