Proceedings of the Optical Society of Korea Conference (한국광학회:학술대회논문집)

Optical Society of Korea (한국광학회)
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Meltback Micro-lens Array for New Optical devices

  • Hahm, S.H. (Dept. of elec. Eng., KAIST) ;
  • Yoo, T.K. (Gold-Star Central Research Labaratories) ;
  • Kwon, Y.S. (Dept. of elec. Eng., KAIST)
  • Published : 1990.02.01
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Abstract

The mechanisms of the meltback etching and regrowth processes are studied experimentally. The depth and time of the meltback is poltted with the experimental data and fitted with some functions. The method to reduce the anisotropy and elliminate the gallium is lands are also developed. It is possible to fabricate the AlGaAs micro-lens array by the use of the process and apply it to a new optical devices.

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