• Proceedings of the Optical Society of Korea Conference
• /
• 2005.02a
• /
• pp.314-315
• /
• 2005

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.26 no.12
• /
• pp.853-857
• /
• 2013

We design, develope and test a parallel active polymer pen lithography (PPL) device, which consists of individually addressable elastomeric probe tips. The PPL array chip is fabricated using soft lithography method with polydimethylsiloxane (PDMS) material. Individual probe can be pneumatically actuated via a computer controlled interface. We demonstrate parallel writing with 16 individually addressed pens, with each pen producing a different pattern in the same run. The largest proof-of-concept array fabricated is $4{\times}4$ with a spacing of $250{\mu}m$ in both x and y axes.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.19 no.10
• /
• pp.894-900
• /
• 2006

This paper reports the fabrication and characterization of $32{\times}32$ thermal cantilever array for nano-scaled memory device applications. The $32{\times}32$ thermal cantilever array with integrated tip heater has been fabricated with micro-electro-mechanical systems(MEMS) technology on silicon on insulator(SOI) wafer using 9 photo masking steps. All of single-level cantilevers(1,024 bits) have a p-n junction diode in order to eliminate any electrical cross-talk between adjacent cantilevers. Nonlinear electrical characteristic of fabricated thermal cantilever shows its own thermal heating mechanism. In addition, n-channel high-voltage MOSFET device is integrated on a wafer for embedding driver circuitry.

• Journal of Biomedical Engineering Research
• /
• v.30 no.2
• /
• pp.103-112
• /
• 2009

Neuron-on-a-Chip technology is based on advanced neuronal culture technique, surface micropatterning, microelectrode array technology, and multi-dimensional data analysis techniques. The combination of these techniques allowed us to design and analyze live biological neural networks in vitro using real neurons. In this review article, two underlying technologies are reviewed: Microelectrode array technology and Neuronal patterning technology. There are new opportunities in the fusion of these technologies to apply them in neurobiology, neuroscience, neural prostheses, and cell-based biosensor areas.

• Proceedings of the KIEE Conference
• /
• 1987.07b
• /
• pp.1256-1259
• /
• 1987

This paper gives a new SRF (Sonic Range Finder) Array formation on the mobile robot. This SRF Array formation obtaine the mobile robot's environmental informations wider and faster than the other systems and detects the obstacles in the robot's path. It is processed and controlled by 8031, on-chip micro-computer. SRF Array sensors are drived by the LM1812 transceiver and selected by the 8-channel channel multiplexer. In this paper, it detects the obstacles in wider range and gives them to the MAIN to design the shortest modify path.

• JSTS:Journal of Semiconductor Technology and Science
• /
• v.2 no.4
• /
• pp.288-294
• /
• 2002

This paper presents the design, fabrication and characterization of a 32 by 32 electroplated micromirror array on a glass, a low cost substrate. Approaches taken in this work for the fabrication of micromachined mirror arrays include a line addressing scheme, a seamless array design for high fill factor, planarization techniques of polymeric interlayers, a high yield methodology for the removal of sacrificial polymeric interlayers, and low temperature and chemically safe fabrication techniques. The micromirror is fabricated by aluminum and the size of a single micromirror is 200 $\mu\textrm{m}{\;}{\times}200{\;}\mu\textrm{m}$. Static deflection test of the micro-mirror has been carried out and pull-in voltage of 44V and releasing voltage of 30V was found.

• Proceedings of the Korean Society of Propulsion Engineers Conference
• /
• 2006.11a
• /
• pp.30-33
• /
• 2006

Onset voltage plays a crucial role in the design of a spray microthruster. This paper presents an analytical electrostatic model to predict the behavior of onset voltage in an array of emitters. The basic idea of this method is to superimpose the electric potentials obtained from each individual emitter in an array of emitters. The results show that if one emitter operates and the other neighboring emitters are dry, the potential required for cone-jet spraying generally increases as the emitter spacing decreases (due to electrical shielding). However at very close spacing the potential can decrease. If all emitters operate at the same time, the phenomenon that even at very close spacing the onset voltage required for cone-jet spraying increases merely as the emitter spacing decreases.

• Journal of Sensor Science and Technology
• /
• v.20 no.6
• /
• pp.428-433
• /
• 2011

We report on the building of a micro sensor array based on typical semiconductor fabrication processes aimed at monitoring selectively a specific gas in ambient of other gases. Chemical sensors can be applied for an electronic nose and/or robots using this technique. Microsensor array was fabricated on the same chip using 0.6${\mu}m$ CMOS technology, and unique gas sensing patterns were obtained by principal component analysis from the array. $SnO_2$/Pt sensor for CO gas showed a high selectivity to buthane gas and humidity. $SnO_2$ sensor for hydrogen gas, however, showed a low selectivity to CO and buthane gas. We can obtain more distinguishable patterns that provide the small sensing deviation(the high seletivity) toward a given analyte in the response space than in the chemical space through the specific parameterization of raw data for chemical image formation.

• The Transactions of the Korean Institute of Electrical Engineers C
• /
• v.53 no.9
• /
• pp.488-493
• /
• 2004

In this paper, we present the fabrication of copper electrode array and test of electrochemical discharge machining(ECDM) for glass machining. An array of 72 Cu electrodes is used to machine Borofloat33 glass. The height and diameter of a Cu electrode are 400 $\mu\textrm{m}$ and 100 $\mu\textrm{m}$ respectively. It is fabricated by ICP-RIE, Au-Au thermo-compression bonding, and copper electroplating. Borofloat33 glass is machined by the fabricated copper electrode array in 60 seconds at 55 V. The surface roughness of the machined glass is measured and the machined glass is anodically bonded with silicon.

• Transactions of the Korean Society of Mechanical Engineers
• /
• v.18 no.11
• /
• pp.2967-2972
• /
• 1994

The multiple character of the contact interaction and the collective behavior of elementary microcontacts play a significant role in all the processes occurring in the surface layers, including the failure due to friction and wear. The array of metal spheres compressed between flat plates has been used for simulation of the contact behavior of multiple contact of solids under normal loading. An experimental design has been made providing regular array of the spheres at the same size with different spatial order. Measurement of electrial contact resistance has been made using the equipment providing the adequate accuracy in the range of micro Ohms. The data on electrical contact resistance have been compared with theoretical predictions using the multiple contact model of constriction resistance. The effect of single spots number and array on conductivity of contact has been evaluated.