Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Micro Patterning Using Active Polymer Pen Array

능동 폴리머 펜 어래이를 이용한 미세 패터닝

  • 한윤수 (한국세라믹기술원 이천분원 엔지니어링 세라믹센터) ;
  • 홍지화 (한국세라믹기술원 이천분원 엔지니어링 세라믹센터)
  • Received : 2013.10.24
  • Accepted : 2013.11.21
  • Published : 2013.12.01
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Abstract

We design, develope and test a parallel active polymer pen lithography (PPL) device, which consists of individually addressable elastomeric probe tips. The PPL array chip is fabricated using soft lithography method with polydimethylsiloxane (PDMS) material. Individual probe can be pneumatically actuated via a computer controlled interface. We demonstrate parallel writing with 16 individually addressed pens, with each pen producing a different pattern in the same run. The largest proof-of-concept array fabricated is $4{\times}4$ with a spacing of $250{\mu}m$ in both x and y axes.

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