• 제목/요약/키워드: micro system technology

검색결과 1,366건 처리시간 0.032초

미세 부품 성형을 위한 소형 마이크로 성형시스템 개발 및 재료의 변형 거동 고찰 (Development of a Miniaturized Microforming System and Investigation of Deformation Behavior of Material for the Production of Micro Components by Forming)

  • 남정수;박일구;이상원;김홍석
    • 한국정밀공학회지
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    • 제29권11호
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    • pp.1221-1227
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    • 2012
  • As demands on micro-products increase significantly with raising functional integration and increasing complexity, microfoming attracts a lot of attention in the manufacture of micro-products. Since the conventional big forming systems are not adequate to achieve sufficient tolerances of micro-scale parts, it is necessary to reduce the scale of the forming equipment and devices. In addition, understandings on the size effects, which exist in the material behavior and process characterization of microforming processes, need to be expanded. In this study, a miniaturized forming system based on the ball screw and servo motor actuator was developed for the efficient micro-parts production. In addition, tensile tests and cylindrical upsetting experiments were performed to evaluate the performance of the microforming system and to investigate the flow stress and friction size effects in microforming processes.

초정밀 평삭가공과 마이크로 펀칭가공을 위한 하이브리드 가공장비 및 공정기술 개발 (Development of Hybrid Machining System and Hybrid Process Technology for Ultra-fine Planing and Micro Punching)

  • 김한희;전은채;차진호;이재령;김창의;최환진;제태진;최두선
    • 한국기계가공학회지
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    • 제12권6호
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    • pp.10-16
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    • 2013
  • Ultra-fine planing and micro punching are separately used for improving surface roughness and machining dot patterns, respectively, of metal molds. If these separate machining processes are applied for machining of identical molds, there could be an aligning mismatch between the machine tool and the mold. A hybrid machining system combining ultra-fine planing and micro punching was newly developed in this study in order to solve this mismatch; hybrid process technology was also developed for machining dot patterns on a mirror surface of a metal mold. The hybrid machining system has X, Y, and Z axes, and a cam axis for ultra-fine planing. The cam axis and attachable and removable solenoid actuators for micro punching can make large and small sizes of dot patterns, respectively. Ultra-fine planing was applied in the first place to improve the surface roughness of a metal mold; the measured surface roughness was about 20nm. Then, micro punching was applied to machine dot patterns on the same mold. It was possible to control the diameter of the dot patterns by changing the input voltage of the solenoid actuator. Before machining, severe inhomogeneous plastic deformation around the machined dot patterns was also removed by annealing heat treatment. Therefore, it was verified that metal molds with dots patterns for optical products can be machined using a hybrid machining system and the hybrid process technology developed in this study.

PCD공구를 이용 미소가공시 표면거칠기 특성 (Characteristics of Surface Roughness in Micro fuming using PCD Tools)

  • 한복수;이소영
    • 한국공작기계학회논문집
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    • 제10권5호
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    • pp.31-38
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    • 2001
  • This paper deals with the micro turning property of setting angle using diamond tool. The bed of the system has used the granite which has the thermal and vibrational characteristics superior to the cast iron bed for the common machine tool. To minimize the inner and outer vibration of the fuming system, an air pad system was manufactured and tested. The aero-static spindle system which has the excellent rotation accuracy was designed and manufactured. As a result of the micro-cutting test on aluminum alloy, tool setting angel have effected on surface roughness. From the results, the micro-cutting conditions hope to provide the useful actual data using in industrial fields.

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Micro-AAJ를 이용한 엔진 피스톤 링의 마찰 저감 표면 개발 (Development of Engine Piston Ring Surface for Friction Reduction using Micro Abrasive Air Jet)

  • 최수창;노승국;이현화;박종권
    • 한국정밀공학회지
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    • 제31권5호
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    • pp.389-394
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    • 2014
  • In this paper, we report a new manufacturing method for friction reduction using micro-AAJ (abrasive air-jet) machining. AAJ machining employs compressed air to accelerate a jet of high-speed particles to mechanically machine features, including micro-channels and micro-holes, into glass, metal, or polymer substrates for use in microfluidics, MEMS (micro electromechanical systems). And we introduce the micro-AAJ machining system, which consists of a micro-AAJ nozzle and a five-axis positioning system. Various micro-AAJ nozzles can be used, depending on the required surface structure, and three-dimensional machining is possible. We machined samples under six different conditions and describe machining results obtained while using it. We also measured the coefficient of friction of micro-textured surfaces. We report the coefficient of friction of micro-textured surfaces patterned using micro-AAJ machining for engine piston ring.

자율주행 내시경을 위한 공압 구동장치의 이동특성에 관한 실험적 연구 (Experimental Study on the Movement of Pneumatic Actuating Mechanism for Self-Propelling Endoscope)

  • 임영모;박지상;김병규;박종오;김수현
    • 한국정밀공학회지
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    • 제18권10호
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    • pp.194-199
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    • 2001
  • In this paper, we propose a new locomotive mechanism using impulsive force for microcapsule-type endoscope. It has the compact size for movement in the colon and actuating mechanisms for hi-directional movement. The actuating mechanism resembles a pneumatic cylinder and consists of body, inertia mass(piston). spring. pneumatic source and calve. When valve is ON, the pneumatic impulsive force between piston and body drives them in two opposite direction. As the air in the body is passed away, the contrary movements are occurred by spring reaction. Therefore, the direction of body's motion is determined by the relative magnitude of two opposite impulsive forces, i.e., pneumatic and spring force. The effect of two impulsive forces can simply be controlled by On-Off time of solenoid valve.

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MEMS Packaging 기술 및 마이크로센서 (MEMS Packaging Technology and Micro Sensors)

  • 최상언
    • 한국마이크로전자및패키징학회:학술대회논문집
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    • 한국마이크로전자및패키징학회 2000년도 The IMAPS-Korea Workshop 2000 Emerging Technology on Packaging
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    • pp.55-85
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    • 2000
  • MEMS(Micro Electro Mechanical System) technology. MEMS Inertial Sensors promise a new wide market for many areas -Challenge. significant cost reduction by wafer level packaging and testing. decreasing of power consumption by miniaturization. enhancing of performance and reliability. on-chip integration for multiplicity. MEMS is newly emerging technology.

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마이크로 스테퍼를 활용한 역설계 시스템의 성능 평가 (The performance evaluation of reverse engineering system using micro stepper)

  • 한민식;이지용;김수용;김태호;전언찬
    • 한국공작기계학회:학술대회논문집
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    • 한국공작기계학회 2004년도 추계학술대회 논문집
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    • pp.340-344
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    • 2004
  • This paper is the performance evaluation of reverse engineering system using simple mechanism. The existing equipment didn't use in the field popularly as it is too expensive. So we constructed the reverse engineering system of simple mechanism using the laser sensor, LM guide, micro step driver and control program. And we caught the Characteristics to measure some product. Finally we confirmed the precision to compare measured data and CAD date.

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Development and Verification of PZT Actuating Micro Tensile Tester for Optically Functional Materials

  • Kim Seung-Soo;Lee Hye-Jin;Lee Hyoung-Wook;Lee Nak-Kyu;Han Chang-Soo;Hwang Jai-Hyuk
    • International Journal of Control, Automation, and Systems
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    • 제3권3호
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    • pp.477-485
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    • 2005
  • This paper is concerned with the development of a micro tensile testing machine for optically functional materials such as single or poly crystalline silicon and nickel film. This micro tensile tester has been developed for testing various types of materials and dimensions. PZT type actuation is utilized for precise displacement control. The specifications of the PZT actuated micro tensile testers developed are as follows: the volumetric size of the tester is desktop type of 710mm' 200mm' 270mm; the maximum load capacity and the load resolution in this system are IKgf and 0.0152mgf respectively and; the full stroke and the stoke resolution of the PZT actuator are $1000{\mu}m$ and 10nm respectively. Special automatic specimen installing and setting equipment is applied in order to prevent unexpected deformation and misalignment of specimens during handling of specimens for testing. Nonlinearity of the PZT actuator is compensated to linear control input by an inverse compensation method that is proposed in this paper. The strain data is obtained by ISDG method that uses the laser interference phenomenon. To test the reliance of this micro tensile testing machine, a $200{\mu}m$ thickness nickel thin film and SCS (Single Crystalline Silicon) material that is made with the MEMS fabrication process are used.

열화학기상증착법을 이용한 프리스탠딩 ZnO/Zn 코어셀 마이크로 다면체 구조물의 합성 (Synthesis of free-standing ZnO/Zn core-shell micro-polyhedrons using thermal chemical vapor deposition)

  • 최민열;박현규;정순욱;김상우
    • 한국결정성장학회지
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    • 제18권4호
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    • pp.155-159
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    • 2008
  • 본 연구에서는 금속 Zn 팰렛을 원료 물질로 이용하여 열화학기상증착법으로 마이크로 크기의 프리스탠딩 ZnO/Zn 코어셀 다면체 구조물을 합성하였다. 마이크로 크기로 성장된 ZnO/Zn 코어셀 다면체의 형태와 구조적인 특성을 분석하기 위해서 주사전자현미경과 투과전자현미경을 이용하였다. 성장된 마이크로 크기의 다면체는 단결정 ZnO 나노막대 배열에 의해 둘러싸인 단결정 금속 Zn로 구성되어 있음을 확인할 수 있었다. 마이크로 크기의 단결정 Zn는 육방정 결정구조로 이루어져 있으며, 표면을 구성하고 있는 c-축 배향된 ZnO 나노막대가 10 nm와 100 nm 이하의 직경과 높이를 각각 가지며 육방정 결정구조의 단결정임을 확인하였다.

$H_{\infty}$ filter for flexure deformation and lever arm effect compensation in M/S INS integration

  • Liu, Xixiang;Xu, Xiaosu;Wang, Lihui;Li, Yinyin;Liu, Yiting
    • International Journal of Naval Architecture and Ocean Engineering
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    • 제6권3호
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    • pp.626-637
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    • 2014
  • On ship, especially on large ship, the flexure deformation between Master (M)/Slave (S) Inertial Navigation System (INS) is a key factor which determines the accuracy of the integrated system of M/S INS. In engineering this flexure deformation will be increased with the added ship size. In the M/S INS integrated system, the attitude error between MINS and SINS cannot really reflect the misalignment angle change of SINS due to the flexure deformation. At the same time, the flexure deformation will bring the change of the lever arm size, which further induces the uncertainty of lever arm velocity, resulting in the velocity matching error. To solve this problem, a $H_{\infty}$ algorithm is proposed, in which the attitude and velocity matching error caused by deformation is considered as measurement noise with limited energy, and measurement noise will be restrained by the robustness of $H_{\infty}$ filter. Based on the classical "attitude plus velocity" matching method, the progress of M/S INS information fusion is simulated and compared by using three kinds of schemes, which are known and unknown flexure deformation with standard Kalman filter, and unknown flexure deformation with $H_{\infty}$ filter, respectively. Simulation results indicate that $H_{\infty}$ filter can effectively improve the accuracy of information fusion when flexure deformation is unknown but non-ignorable.