• 센서학회지
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• 제22권5호
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• pp.333-337
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• 2013

This study proposes a simply fabricated micro stator for higher output power than previously reported micro stators. The stator has been fabricated by inserting enamel coil in silicon mold formed by micro etching process. The most merits of the proposed micro stator are the simple fabrication process and high output power. Previously reported micro stators have high resistance because the micro coil is fabricated by relatively thin-film-based deposition process such as sputtering and electroplating. In addition, the previously reported micro coil has many electrical contact points for forming the coil structure. These characteristics of the micro stator can lead to low performance in output power. However, the proposed micro stator adopts commercially available enamel coil without any contact point. Therefore, the enamel coil of the proposed micro stator has low junction resistance due to the good electrical quality compared with the deposited or electroplated metal coil. Power generation tests were performed and the fabricated stator can produce 5.4 mW in 4000 RPM, $1{\Omega}$ and 0.3 mm gap. The proposed micro stator can produce larger output power than the previously reported stator spite of low RPM and the larger gap between the permanent magnet and the stator.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제48권2호
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• pp.147-152
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• 1999

Semiconductor piezoresistive type vibration sensor was fabricated by using semiconductor process and micromachining technology. To measure the micro electromagnetic force between coil and magnet, fabricated vibration sensor was used. Toapply micro electromagnetic force produced from the micro exciter, small-sized NdFeB permanent magnet was attached on the mass of the fabricated vibration sensor. The measured electromagnetic force are about 5~180dyne when the applied sinusoidal current of 1KHz in the range of 1.5~8mA. The measurement of micro electromagnetic forcewas performed by changing the distance between coil and magnet. Output characteristics of micro electromagnetic force according to the applied coil current were linear. Furthermore, output results were used to get the transfer constant that is important to decide the efficiency and the performance of the coil and magnet.

• 한국표면공학회지
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• 제53권4호
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• pp.138-143
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• 2020

In this study, we produced a coil of micro-pattern that can be used for electromagnetic wave absorber, heating material, wireless charging, sensor, antenna, etc. by using electrochemical additive manufacturing method. Currently, it contains research contents for manufacturing a micro pattern coil having practicality through control of process control variables such as applied voltage, distance between electrode, and nozzle injection. Circulation of the electrolyte through the nozzle injection control can significantly contribute to improving the surface characteristics of the coil because of minimizing voltage fluctuations that may occur during the additive manufacturing process. In addition, by applying the pulse method in the application of voltage, the lamination characteristics of the plated body were improved, which showed that the formation of a fine line width plays an important role in the production of a micro pattern coil. By applying the pulse signal to the voltage application, the additive manufacturing characteristics of the produced product were improved, and it was shown that the formation of a fine line width plays an important role in the production of a micro pattern coil.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2008년도 추계학술대회 논문집
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• pp.95-96
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• 2008

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2001년도 추계학술대회 논문집
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• pp.255-259
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• 2001

The spring constant of a micro coil spring was measured by uniaxial tensile test. The inner diameter of it is $35{\mu}m$ and the pitch size is about $23{\mu}m$. A suing constant measurement system was developed. It consists of control units, load cell units, linear stages and several specially designed jigs and fixtures. Load and displacement are measured using a commercial load cell of 1000g capacity and a magnetic scale of $0.5{\mu}m$ resolution. In this study, a method to measure the spring constant of micro coil spring is presented and the relationship between misalignment of specimen and measurement error is discussed.

• 신재생에너지
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• 제2권3호
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• pp.10-14
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• 2006

We have designed and fabricated coil structures by gold electroplating technique. The thickness, width, and length are $7{\mu}m,\;20{\mu}m$, and 1.6m, respectively. With vibrating a magnet on the surface of a fabricated electroplated coil, the micro power generator produce an alternating voltage. We have changed the vibrational frequency from 0.5Hz to 8Hz. The generated voltage was 106mV at 3Hz and 198mV at 6Hz. We have rectified and stepped up the input voltage using a quadrupler circuit. After using the step up circuit, the measured voltage was 81mV at 3Hz and 235mV at 6Hz.

• Journal of Magnetics
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• 제13권1호
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• pp.34-36
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• 2008

For the measurement of the magnetic field distribution with high spatial resolution and high accuracy, the magnetic field sensing probe must be non-magnetic, but the MFM probe and sub-millimeter-meter size Hall probe use a ferromagnetic tip and block, respectively, to increase the sensitivity. To overcome this drawback, we developed a micro-size search coil magnetometer which consists of a single turn search coil, Terfenol-D actuator, scanning system, and control software. To reduce the noise generated by the stray ac magnetic field of the actuator driving coil, we employed an even function $\lambda$-H magnetostriction curve and lock-in technique. Using the developed magnetometer, we were able to measure the magnetic field distribution with a magnetic field resolution of 1 mT and spatial resolution of $0.1mm{\times}0.2mm$ at a coil vibration frequency of 1.8 kHz.

• 신재생에너지
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• 제2권3호
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• pp.5-9
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• 2006

We have fabricated a micro power generator which changes vibrational energy into useful energy. With vibrating a magnet on the surface of a winding coil, the micro power generator produce alternating voltage. We have changed the vibrational frequency from 0.5Hz to 10Hz. AC voltage of $20{\sim}25mV$ was generated at the frequency of 1Hz. When the vibration was 3Hz, AC voltage of 80mV was obtained. We have rectified and stepped up the input voltage using a quadrupler circuit. The voltage was stepped up to 130mV.

• 한국정밀공학회지
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• 제33권7호
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• pp.601-606
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• 2016

In this paper, an energy harvester is developed that has advantages regarding piezoelectric noise minimization, mass production, and an easily available environmental energy source, electromagnetic induction, as well as low-frequency bandwidth and high amplitude. A process for fabricating a three-dimensional multilayered planar coil using micro-electro-mechanical systems (MEMS) on a flexible printed circuit board FPCB is introduced. Optimal shape and size were calculated via internal resistance and inductance, and a prototype was fabricated through the MEMS procedure while considering the possibility of mass production. Although the internal resistance matched the designed value, the electromotive force generated did not reach the intended amount. The main reason for the decrease in efficiency was the low area of coil outskirt exposed to the magnetic field while there was relative motion between the magnet and the coil.

• 한국전기전자재료학회논문지
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• 제23권3호
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• pp.194-198
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• 2010

Recently as the electronic devices are getting to be more and more smaller, transformers are needed to be micro fabricated using MEMS technology. In this paper transformers have been fabricated and measured by depositing insulation layer to reduce the loss of eddy current and in the middle core a high permeability permalloy was designed based on the turns ratio between primary coil and secondary coil which are 1:1 transformers. (the number of turns of primary coil and secondary coil: 3/3, 5/5, 7/7). The size of the transformers including ground shield are $1mm{\times}1.5mm$, $1mm{\times}1.95mm$, $1mm{\times}2.35mm$ respectively. The line width, pitch and the height of post are 50um. Based on the measured data from the micro fabricated transformers, the 3/3 turns in the primary coil and secondary coil showed the lowest insertion loss with 1.5 dB at 480 MHz and the 7/7 turns in the primary coil and secondary coil showed the highest insertion loss with 2.5 dB at 280 MHz. Also confirmed that the bandwidth goes up as the number of turns goes down. There was some difference between the actual measured data and the HFSS simulation result. It looks as if it is an error of the difference between oxidation of copper or the permeability of SU-8.