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Effect of hydrogen in Ni-silicide with Iodine Catalyst Deposited Ni Film by using Atomic Layer Deposition

  • Gang, Hui-Seong;Ha, Jong-Bong;Kim, Gi-Won;Kim, Dong-Seok;Im, Gi-Sik;Kim, Seong-Nam;Lee, Gwang-Man;Lee, Jeong-Hui
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.234-234
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    • 2010
  • 최근 CMOS 소자 크기가 축소됨에 따라 소스와 드레인 영역에서의 접촉저항을 줄이기 위하여, 실리사이드 공정이 많이 연구되고 있다. 실리사이드 물질로서 NiSi는 낮은 저항률과 낮은 실리콘 소모, 낮은 공정온도, 등의 장점을 가지고 있다. 그러나, 실리사이드 형성으로 인한 나노소자의 소오스/드레인에서정션(junction) 누설전류의 증가는 큰 문제가 되므로 실리콘과 실리사이드 계면의 특성이 중요하다. 본 연구에서는 니켈을 이용한 실리사이드 형성시 계면 활성제인 에틸 요오드를 이용하여 실험을 진행하였다. 금속 유기 전구체인 MABONi을 사용하여 ALD 방식으로 증착 한 니켈 박막과 니켈 핵 형성시 계면활성제인 에틸요오드의 처리 방법에 따른 Ni-silicide 박막의 특성을 비교, 분석하였다. 먼저 자연산화막을 건식식각으로 제거한 뒤, 첫 번째 샘플에서는 10회의 주기로 초기 니켈을 증착한 뒤, 에틸요오드로 니켈의 표면 위를 처리하고, 다시 200회의 주기로 니켈을 증착하였으며, 두 번째는 첫 번째 방식에서 에틸요오드 주입 시 동시에 수소도 함께 주입하였다. 세 번째는 비교를 위해 에틸요오드 처리를 하지 않고 니켈 박막만을 증착 하였다. 이어서, 각 샘플을 급속 열처리 장비에서 $400^{\circ}C$부터 $900^{\circ}C$까지 각각 30sec간 열처리를 진행후, 반응하지 않은 잔여 니켈을 제거한 후, XRD(x-ray diffraction), AES(auger), 그리고 4-point probe 등을 이용하여 형성된 실리사이드의 특성을 분석하였다. 에틸요오드와 함께 수소를 주입한 경우 계면에서의 산소 불순물과 카본 성분이 효과적으로 제거되어 $400^{\circ}C$에서 $2.9{\Omega}/{\Box}$ 의 낮은 면저항을 가지는 NiSi가 형성되었고 모든 온도구간에서 다른 샘플에 비하여 가장 낮은 면저항 분포를 보였다. 이는 분해 흡착된 요오드에 의한 계면 특성 향상과 카본 성분이 포함된 잔여물들이 수소처리에 의해 효율적으로 제거되어 실리사이드의 특성이 향상되었기 때문이다. 계면활성제를 사용하지 않은 경우에는 $500^{\circ}C$에서 NiSi가 형성되었다. 반면에 에틸요오드로만 표면을 처리한 경우에는 니켈과 실리콘 계면에서의 카본 성분에 의하여 silicidation 이 충분히 일어나지 않았다. 이러한 결과는 향후 45nm 이하의 CMOS 공정상에서 소스와 드레인의 낮은 누설전류를 가지고, 접촉저항을 줄이기 위한 니켈 실리사이드 형성에 큰 도움을 줄 것으로 기대된다.

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Mechanical Properties and Bio-Compatibility of Ti-Nb-Zr-HA Biomaterial Fabricated by Rapid Sintering Using HEMM Powders (고에너지 밀링분말과 급속소결을 이용한 Ti-Nb-Zr-HA 생체복합재의 기계적 성질 및 생체적합성)

  • Park, Sang-Hoon;Woo, Kee-Do;Kim, Sang-Hyuk;Lee, Seung-Min;Kim, Ji-Young;Ko, Hye-Rim;Kim, Sang-Mi
    • Korean Journal of Materials Research
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    • v.21 no.7
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    • pp.384-390
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    • 2011
  • Ti-6Al-4V ELI (Extra Low Interstitial) alloy has been widely used as an alternative to bone due to its excellent biocompatibility. However, it still has many problems, including a high elastic modulus and toxicity. Therefore, nontoxic biomaterials with a low elastic modulus should be developed. However, the fabrication of a uniform coating is challenging. Moreover, the coating layer on Ti and Ti alloy substrates can be peeled off after implantation. To overcome these problems, it is necessary to produce bulk Ti and Ti alloy with hydroxyapatite (HA) composites. In this study, Ti, Nb, and Zr powders, which are biocompatible elements, were milled in a mixing machine (24h) and by planetary mechanical ball milling (1h, 4h, and 6h), respectively. Ti-35%Nb-7%Zr and Ti-35%Nb-7%Zr-10%HA composites were fabricated by spark plasma sintering (SPS) at $1000^{\circ}C$ under 70MPa using mixed and milled powders. The effects of HA addition and milling time on the biocompatibility and physical and mechanical properties of the Ti-35%Nb-7%Zr-(10%HA) alloys have been investigated. $Ti_2O$, CaO, $CaTiO_3$, and $Ti_xP_y$ phases were formed by chemical reaction during sintering. Vickers hardness of the sintered composites increases with increased milling time and by the addition of HA. The biocompatibilty of the HA added Ti-Nb-Zr alloys was improved, but the sintering ability was decreased.

Salinity and Distribution of Zooplankton in the Estuarine System of Mankyong River and Dongjin River (만경 동진강 하구계의 동물플랑크톤의 분포와 염분)

  • 서해립;서호영
    • 한국해양학회지
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    • v.26 no.3
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    • pp.181-192
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    • 1991
  • Zooplankton were sampled horizontally with a standard net from the surface layer of the estuarine system of Mankyong River and Dongjin River in October, 1989, March, May, and July, 1990. Among dominant taxa of the zooplankton community, copepods were predominant in October, 1989 and March, 1990 and Noctiluca scintillans in May and July, 1990. Abundance of zooplankton showed considerable spatial and temporal fluctuations with a range of $12~9,256ind./m^3$ in wet weight. In the copepod community, Pseudodiaptomus inopinus and Paracalanus inducus were predominant in October, 1989: Acartia hudosonica and P. inducus in March, 1990; A. hudosonica and Centropages abdoinalis in May, 1990; A. pacifica, P. indicus and Tortanus spinicaudatus in July. 1990. In summer (July),there were large seasonal changes in salinity ($0.7~28.9\textperthousand$), due to monsoonal flooding, and associated changes in community structured of copepods. There were eight species of copepods in the mixo-mesohaline zone ($5.0~28.8\textperthousand$), namely Acartia pacifica, A. hudosonica, Centropages tenuiremis, C. abdominalis, Labidocera Euchaeta, Tortanus spinicaudatus, corycaeus affinis and Paracalanus indicus. On the other hand, Thermocouple hyalinus, Pseudodiaptomus inopinus and Sinocalanus tenellus occurred in the mixo-oligohaline zone ($0.5~5.0\textperthousand$), showing more tolerant of low salinity than any of the other species. In the mixoeuhaline zone ($>28.0\textperthousand$), Labidocera bipinnata, Oithona similes, Calanus sinicus, Acartia omorii and Tortanus forcipatus were founded.

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Effects of Bagging Periods on Pericarp Characteristics and Berry Cracking in 'Kyoho' Grape (Vitis sp.) (괘대시기가 '거봉' 포도의 과피 특성과 열과에 미치는 영향)

  • Son, In-Chang;Kim, Dae-Il
    • Horticultural Science & Technology
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    • v.28 no.3
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    • pp.381-386
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    • 2010
  • The berry growth and pericarp characteristics were characterized to confirm the effects of bagging periods on berry cracking during berry development in 'Kyoho' grape. The berry weight was the highest at 13.4 g in late period of bagging treated at 7 to 9 weeks after full bloom (WAFB) as compared with the lowest of 12.3 g in total period bagging. The berry cracking rate under critical turgor pressure in the non-bagging control was 53.3%, while those of bagging treatments were decreased in the order of 42.7%, 37.3%, 33.3%, and 18.7% in bagged during 3 to 9, 3 to 5, 5 to 7, and 7 to 9 WAFB, respectively. In the results of observation on histological characteristics of pericarp, berry lenticels of whole bagging treatments had smaller and normal shape compared with non-bagging control treatment. Especially on the pericarp of late period bagged during 7 to 9 WAFB, suberization around stomata and micro-cracking were not observed and structural strength of pericarp was increased with thicker sub-epidermal layer and cell wall. Therefore, the results indicate that bagging treatment for two weeks just before the veraison when the day length and daylight is relatively longer and stronger can effectively reduce berry cracking by strengthening structure of pericarp in 'Kyoho' grape.

The Performance of the Combined Operation of Sprinkler and Smoke Curtain for Smoke Control in the Sloped Stairway Corridor (경사통로로 전파되는 연기에 대한 스프링클러와 제연커텐의 통합제연성능)

  • Jeon, Heung-Kyun;Choi, Young-Sang;Choo, Hong-Lok
    • Fire Science and Engineering
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    • v.20 no.4 s.64
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    • pp.1-12
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    • 2006
  • In this study, CFD computer simulations by FDS are carried out in order to confirm the performance of the combined operation of both sprinkler system and smoke curtain of 0.54 m depth installed for cooling and blocking the smoke which propagates beneath the sloped ceiling of a stairway corridor of which dimensions are 17.92 m long, 4.00 m wide, and 6.12 m high. It is shown that the response time of sprinklers decreases with fire size and it increases more about 1.1 second in case without smoke curtain than in case with smoke curtain, that the time of smoke transport from the fire source to the stairway outlet decreases considerably with fire size, and that the delay effect of smoke transport is not related to the sprinkler system, whether it is operated or not. This study shows that the combined operation of both sprinkler system and smoke curtain is very effective in smoke cooling, but it is a little for effect on smoke blockage. Although the hazard of skin burn due to radiative heat flux from hot smoke layer is decreased by spray cooling effect, the hazard of smoke suffocation and the weakening of visibility is increased by smoke downdrag and the turbulence of smoke-air mixing due to water spray. These conditions may result in preventing occupants from going out of the stairway during evacuation.

Histochemical and Physiological Characteristics during Korean Native Ogol Chicken Development (성장 단계에 따른 한국 재래 오골계 근육의 조직학 및 생리학적 특성)

  • Nam, Yun-Ju;Kim, Dong-Uk;Choi, Young-Min;Ryu, Youn-Chul;Lee, Sang-Hoon;Kim, Byoung-Chul
    • Food Science of Animal Resources
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    • v.27 no.4
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    • pp.401-408
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    • 2007
  • This study examined the histochemical and physiological characteristics during Korean native Ogol chickens (KNOC) development. The body weight, Pectoralis major and soleus muscle weights, and muscle samples were taken at hatching as well as at 3, 5, and 15 weeks of age. The fiber characteristics of the Pectoralis major and soleus muscles from the KNOC at hatching to 15 weeks of age were determined, and the deoxyribonucleic acid (DNA), ribonucleic acid (RNA), and protein concentrations were measured from the left Pectoralis major muscles. A greater increase in body and muscle weights was detected between hatching and 3 weeks of age than during any other period. Moreover, the cross sectional area (CSA) of the fibers, as well as the total concentration of DNA, RNA, and protein also showed a greater increase betweenhatching and 3 weeks of age than during any other period. The KNOC breed is a dual purpose breed, however, the it has lower body and muscle weights than commercial meat type chickens or layer type chickens. Moreover, the KNOC breed has a small muscle fiber CSA of and a low nucleic acid concentration.

A Comparison of Characteristics of Minerals and Phytate between Korean and Imported Wheat Varieties (한국산 소맥과 수입 소맥의 무기질 특성과 phytate 비교)

  • Koh, Bong-Kyung;Lim, Seung-Taik;Lee, Gui-Ju
    • Korean Journal of Food Science and Technology
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    • v.32 no.2
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    • pp.231-237
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    • 2000
  • A Comparative study was performed among five Korean wheat(Greu, Eunpa, Tapdong, Allgreu, Woori) and three imported wheat(Dark Northern Spring, Austrian Standard Wheat, Western White) to investigate the characteristics of minerals and phytate from Korean wheat varieties. Ash contents of kernel was higher in Korean wheat than in imported wheat and related to ash contents and darkness of flour. More contents of Fe, P, and Mg from Korean wheat grains and Fe from Korean wheat flours were observed in comparison to imported wheat varieties. Fe concentration in Korean flour show high, indicating Fe was distributed at endosperm layer of kernels and not eliminated with milling. In addition, phytate affecting availability of minerals was determined from kernels and flours. Even though Korean wheat kernels had more phytate than that of imported wheat kernels, it is believed that most of phytate was removed with milling and there was no major difference between Korean and imported wheat flours. We also observed that the content of phosphate closely parallels the content of phytate from both the flours and kernels.

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Design and Implementation of the Flash File System that Maintains Metadata in Non-Volatile RAM (메타데이타를 비휘발성 램에 유지하는 플래시 파일시스템의 설계 및 구현)

  • Doh, In-Hwan;Choi, Jong-Moo;Lee, Dong-Hee;Noh, Sam-H.
    • Journal of KIISE:Computer Systems and Theory
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    • v.35 no.2
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    • pp.94-101
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    • 2008
  • Non-volatile RAM (NVRAM) is a form of next-generation memory that has both characteristics of nonvolatility and byte addressability each of which can be found in nonvolatile storage and RAM, respectively. The advent of NVRAM may possibly bring about drastic changes to the system software landscape. When NVRAM is efficiently exploited in the system software layer, we expect that the system performance can be significantly improved. In this regards, we attempt to develop a new Flash file system, named MiNVFS (Metadata in NVram File System). MiNVFS maintains all the metadata in NVRAM, while storing all file data in Flash memory. In this paper, we present quantitative experimental results that show how much performance gains can be possible by exploiting NVRAM. Compared to YAFFS, a typical Flash file system, we show that MiNVFS requires only minimal time for mounting. MiNVFS outperforms YAFFS by an average of around 400% in terms of the total execution time for the realistic workloads that we considered.

Development of component architecture to support IoT management (IoT 및 네트워크 관리 지원을 위한 컴포넌트 아키텍처 개발)

  • Seo, Hee Kyoung
    • Smart Media Journal
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    • v.6 no.2
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    • pp.42-49
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    • 2017
  • It is important to realize automation services by communicating in IoT with humans, objects & objects, and forming a common network. People used web like the most powerful network way to sharing things and communication. Therefore the efficiency method communication between each device and the web in IoT could be different from ones. The best method for high quality software product in web applications is software reuse ; Modules, classes, patterns, frameworks, and business components are reusable elements of various perspectives. Components is plugged with others through well-defined interfaces, which can overcome the operation and complexity of application development. A web-based distributed environment for IoT applications is a standard architecture use information collected from various devices for developing and using applications. For that reason, the network management which manages the constituent resources for the best service control in IoT application is required as a sub-layer support service in most applications as well as individual applications. In this paper, we measure to develop a network management system based not only by components but on heterogeneous internetworks. For procedure this, we clarify a component architecture for classifying and classify also the component needed in the IOT and network domain or order the type of real network management system.

Change of Vegetation Structure for 6 years (1994-1999) at the Harvested Forest Area (I) - A Case of (Mt.) Baegwoonsan Research Forest at Kwangyang City - (산림(山林) 벌채적지(伐採跡地)의 6년간 식생구조(植生構造) 변화(變化) (I) - 광양시(光陽市) 백운산(白雲山) 연습임지역(演習林地域)을 중심(中心)으로 -)

  • Jee, Yong-Ki;Oh, Koo-Kyoon
    • Journal of Korean Society of Forest Science
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    • v.90 no.6
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    • pp.673-682
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    • 2001
  • The objective of this study was to monitor vegetation development process after timber harvesting at (Mt.) Baekwoonsan Seoul National University Forests, Korea. Two monitoring plots were established in 1994 and woody plant were monitored from 1994 to 1999. Vegetation development pattern during last six years(1994-1999) after timber harvesting were as follows; Styrax obassia, Styrax japonica and Lindera erythrocarpa as of the existing tree were competitive species in the first year after clearcut, and Styrax japonica and Lindera erythrocarpa as of sprout tree) and Aralia elata as of seedling were dominant species in the sixth years after clearcut. Species diversity indices of harvested forest interior was decreased at the southwestern slope and increased at the northeastern slope. According to DBH distribution pattern, No. of individuals of Lindera erythrocarpa and Aralia elata showed vigorous growth in the sub-canopy layer and then Styrax japonica, Quercus serrata, Maackia amurensis, Lespedeza maximowixzii, Lindera obtusiloba, Staphylea bumalda, Clero-dendrum trichotomum, Weigela subsessilis, in order showed good growth in the sixth year after clearcut. Lindera erythrocarpa with a reversed J-shaped curve pattern by DBH class will be increased while Aralia elata with a J-shaped curve pattern will be decreased.

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