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Development of a Small-type Megasonic Module for Nano-scale Pattern Cleaning (나노패턴 세정을 위한 소형 메가소닉 모듈 개발)

  • Kim, Hyun-Se;Lee, Yang-Lae;Lim, Eui-Su
    • Proceedings of the KSME Conference
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    • 2008.11a
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    • pp.1810-1814
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    • 2008
  • A small L-type megasonic module for nano-pattern cleaning was designed and manufactured. The impedance graph of the quartz waveguide with a piezoelectric actuator was predicted using finite element method (FEM). The peak value of the piezoelectric actuator alone was 3.373 MHz, which was the same as the experimentally measured value of 3.373 MHz (0.0% error). In addition, the maximum impedance value of the quartz waveguide with the actuator was 3.373 MHz, which agreed well with the measured value of 3.362 MHz (0.3% error). The acoustic pressures of a conventional megasonic system (3 MHz) and the developed system under similar conditions were measured and compared. The results showed that the maximum values and standard deviations of the developed system decreased by 29% and 18%, respectively, compared with the conventional type. This suggests that the small L-type would have higher particle removal efficiency with lower possibilities of pattern damages.

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A Study on Synchronized AC Source Voltage Regulator of Voltage Fed Inverter using a Photovoltatic Effect

  • Hwang, Lak-Hoon;Lee, Chun-Sang;Kim, Jong-Lae;Jang, Byong-Gon
    • Proceedings of the KIPE Conference
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    • 1998.10a
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    • pp.547-553
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    • 1998
  • In this paper, we composed of utility interactive pv generation system of voltage source inverter, and represented uninterrutible power supply (UPS) equipment maintaining constant voltage, using a pulse width modulation(PWM) voltage fed inverter, as power source disconnection, voltage variation and output current variation with load variation. This system is driven by being synchronized voltage fed inverter and AC source, and in the steady state of power source charge battery connected to dc side with solar cell using a photovoltaic (PV) that it was so called constant voltage charge. In addition, better output waveform was generated because of PWM method, and it was proved to test by experiment maintained constant output voltage regardless of AC source disconnection, load variation, and voltage variation of AC power source.

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THE STARTING CHARACTERISTICS IMPROVEMENT OF SPIM WITH ONE-CHIP MICROCONTROLLER

  • Park, Su-Kang;Choi, Nak-Il;Cho, Geum-Bae;Oh, Keum-Gon;Baek, Hyung-Lae;Lim, Yang-Su
    • Proceedings of the KIPE Conference
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    • 1998.10a
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    • pp.321-324
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    • 1998
  • A single phase induction motor (SPIM) rated in fractional horsepower is widely used in home and industrial equipment: washing machines, fans, refrigerators, etc. In this paper, authors present the experimental results of the SPIM under controlling of currents of main and auxiliary windings by using a one-chip micro stator(OMS). This new starting method is developed to replace the conventional starting device consisted with a mechanical switch and a capacitor. In mentioned method, the soft-starting of SPIM is simply implemented and higher efficiency is obtained in comparison with conventional condenser type SPIM.

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Electrical Characteristics of Organic TFTs Using ODPA-ODA and 6FDA-ODA Polyimide Gate Insulators

  • Lee, Min-Woo;Pyo, Sang-Woo;Jung, Lae-Young;Shim, Jae-Hoon;Sohn, Byoung-Chung;Kim, Young-Kwan
    • 한국정보디스플레이학회:학술대회논문집
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    • 2002.08a
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    • pp.770-772
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    • 2002
  • A new dry-processing method of organic gate dielectric film in field-effect transistors (FETs) was proposed. The method use vapor deposition polymerization (VDP) that is continuous and low temperature process. It has the advantages of shadow mask patterning and dry processing in flexible low-cost large area applications. Here, 80 nm-thick Al as a gate electrode was evaporated through shadow mask. Gate insulators used two different polyimides. The one material was 4,4'-oxydiphtahlic anhydride (ODPA) and 4,4'-oxydianiline (ODA). Another was 2,2-bis(3,4-dicarboxyphenyl) Hexafluoropropane Dianhydride (6FDA) and 4,4' -oxydianiline (ODA). These were co-deposited by high-vaccum thermal-evapora and cured at 150 $^{\circ}C$ for 1 hour, respectively. Pentacene as a semiconductor and 100 nm-thick Au as a source and drain electrode were evaporated through shadow mask.

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A Study on Information Sharing in the MICE Industry (MICE산업의 정보공동활용에 관한 연구)

  • Kim, Kil-Lae;Jeong, So-Yeon
    • Journal of Information Management
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    • v.41 no.1
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    • pp.127-144
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    • 2010
  • The importance of MICE information sharing has recently emerged in MICE industry. However it is very difficult to provide a solution that would enable MICE industry to come to an agreement to share MICE information. In this context, the purpose of this study is to analyze the major problems in information sharing process of MICE industry and to develop the paradigm model by ground theory approach and to propose a guideline for MICE information sharing which have not been treated as a research topic in the domestic MICE areas sofar.

Simply Modified Biosensor for the Detection of Human IgG Based on Protein AModified Porous Silicon Interferometer

  • Park, Jae-Hyun;Koh, Young-Dae;Ko, Young-Chun;Sohn, Hong-Lae
    • Bulletin of the Korean Chemical Society
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    • v.30 no.7
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    • pp.1593-1597
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    • 2009
  • A biosensor has been developed based on induced wavelength shifts in the Fabry-Perot fringes in the visible reflection spectrum of appropriately derivatized thin films of porous silicon semiconductors. Porous silicon (PSi) was generated by an electrochemical etching of silicon wafer using two electrode configurations in aqueous ethanolic HF solution. Porous silicon displayed Fabry-Perot fringe patterns whose reflection maxima varied spatially across the porous silicon. The sensor system studied consisted of a mono layer of porous silicon modified with Protein A. The system was probed with various fragments of an aqueous Human Immunoglobin G (Ig G) analyte. The sensor operated by measurement of the Fabry-Perot fringes in the white light reflection spectrum from the porous silicon layer. Molecular binding was detected as a shift in wavelength of these fringes.

Integrated Fire Monitoring System Based on Wireless Multi-Hop Sensor Network and Mobile Robot (무선 멀티 홉 센서 네트워크와 이동로봇을 이용한 통합 화재 감시 시스템)

  • Kim, Tae-Hyoung;Seo, Gang-Lae;Lee, Jae-Yeon;Lee, Won-Chang
    • Journal of Institute of Control, Robotics and Systems
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    • v.16 no.2
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    • pp.114-119
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    • 2010
  • Network technology has been developed rapidly for digital service in these days. ZigBee, one of the IEEE 802.15.4 protocols, supporting local communication has become the core technology in the wireless network area. In this paper we designed an integrated fire monitoring system using a mobile robot and the ZigBee sensor nodes which are deployed to monitor fires. When a fire breaks out, the image information of the scene of a fire is transmitted by an autonomous mobile robot and we also monitor the current position of the robot. Furthermore, the data around the place where the fire breaks out and the positions of the sensor nodes can be transmitted to a server via the multi-hop communication in the real time.

Inverted Cart Pendulum Control Using CAN(Controller Area Network) (CAN(Contro1ler Area Network)을 이용한 역진자 시스템 제어)

  • Choi, Seong-Seop;Yu, Lae-Sung;Hong, Suk-Kyo
    • Proceedings of the KIEE Conference
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    • 2003.07d
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    • pp.2242-2244
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    • 2003
  • This paper considers a networked control system (NCS) that consists of an inverted cart pendulum, a digital controller, and a controller area network (CAN) in which the actuator and sensors of the pendulum are connected to form a closed-loop system. The worst-case message response time (WCMRT) in the CAN is analyzed and the analysis results are applied to the target control system. For the case where the control system cannot satisfy the WCMRT condition and therefore time delays are inevitable, the Luck and Ray method is used to compensate the network-induced time delays. Simulations are carried out to show the feasibility of the proposed scheme.

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Adaptive Repetitive Control for an Eccentricity Compensation of Optical Disk Driver (광 디스크 기기의 편심 보상을 위한 적응 반복 재어)

  • Kim, Jeong-Hun;Sim, Il-Ju;Park, Gwi-Tae;Roh, Hyung-Lae
    • Proceedings of the KIEE Conference
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    • 2003.07d
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    • pp.2146-2148
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    • 2003
  • This paper present a modified repetitive control scheme for an optical storage system to track a periodic reference signal with dynamic change in period. Periodic disturbances can be adequately attenuated using the concept of repetitive control, provided the period is know. An optical storage system supports various speeds. To deal with time varying periodic disturbances, an proposed repetitive controller is turned based on repetitive control to change sampling frequency to follow the change of reference Period. A modified repetitive control scheme is proposed and implement on experimental set up of a optical disk driver.

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Improvement of Starting Characteristics of Single Phase Induction Motor by Phase Angle Voltage Controller (위상각 전압제어기에 의한 단상유도전동기 기동특성 개선)

  • Lim, Yang-Su;Baek, Hyung-Lae
    • The Transactions of the Korean Institute of Power Electronics
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    • v.1 no.1
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    • pp.20-26
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    • 1996
  • The common drive method of the single phase induction motor(SPIM) is to install a start capacitor and a centrifugal switch in series with the auxiliary winding. In this paper, the phase angle voltage sequence controller is proposed to eliminate a start capacitor and a centrifugal switch of SPIM. In comparison with the capacitor start system of SPIM, the proposed control system shows that it contributes to saving the starting current about 57% and to improving of the starting efficiency of SPIM. The proposed starting characteristics of the SPIM is obtained with this strategy through simulation and experimental results.

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