• 제목/요약/키워드: intermediate annealing

검색결과 58건 처리시간 0.026초

Al 4343/3N03/4343 합금 3층 clad 재의 sagging 특성에 미치는 냉간압연조건의 영향 (Effect of cold rolling condition on sagging properties of Al 4343/3N03/4343 three-layer clad materials)

  • 김목순
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 1999년도 춘계학술대회논문집
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    • pp.157-160
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    • 1999
  • Aluminum 4343(filler thickness ; 10${\mu}{\textrm}{m}$/Al 3N03(core 80${\mu}{\textrm}{m}$)/Al 4343(filler 10${\mu}{\textrm}{m}$) clad sheet which is recently developed as brazing sheet materials for automotive condensers was fabricated by castinglongrightarrowhot rollinglongrightarrowcold rollinglongrightarrowintermediate annealing(IA)longrightarrowfinal cold rolling(CR). and the effect of IA/CR conditions on microstructure and sagging resistance were investigated the sheet which were fabricated by optimum conditions (IA'ed at 42$0^{\circ}C$ followed by CR'ed to 20~45%) showed good sagging resistance because the core obtained a coarsely recrystallized grain structure during brazing and consequently inhibited filled alloy penetration into the core.

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p-InP의 저항성 합금 접촉 특성 연구 (The Properties of Alloyed Ohmic Contact to p-InP)

  • 이중기;박경현;한정희;이용탁
    • 대한전자공학회논문지
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    • 제27권4호
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    • pp.555-562
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    • 1990
  • Alloyed ohmic contact properties of Au-Zn/Au, Au-Be/Au,Au-Zn/Cr/Au, and Au-Be/Cr/Au metal system to p-InP were investigated. Optimum alloying conditions were obtained at the annealing temperature of 425\ulcorner for all the metal systems using a rapid thermal annealing system. Surface AES analysis and auger depth profiling were done for each metal system annealed at the optimum conditions. Outdiffusions of In and P from the InP substrate were found in the metal systems without Cr intermediate layer. Also, small amount of In. P and Cr were detected at the surface in the case of Au-Zn/Cr/Au system, while there were occured no outdiffusion of In, P, and Cr for Au-Be/Cr/Au system. The best surface morpholoty and specific contact resistivity of 4.5x 10**-5 \ulcornercm\ulcornerhave been obtained in this Au-Be/Cr/Au material system alloyed at 425\ulcorner for 60 second.

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In Situ Transmission Electron Microscopy Study on the Reaction Kinetics of the Ni/Zr-interlayer/Ge System

  • Lee, Jae-Wook;Bae, Jee-Hwan;Kim, Tae-Hoon;Shin, Keesam;Lee, Je-Hyun;Song, Jung-Il;Yang, Cheol-Woong
    • Applied Microscopy
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    • 제45권1호
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    • pp.16-22
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    • 2015
  • The reaction kinetics of the growth of Ni germanide in the Ni/Zr-interlayer/Ge system was investigated using isothermal in situ annealing at three different temperatures in a transmission electron microscope. The growth rate of Ni germanide in the Ni/Zr-interlayer/Ge system was determined to be diffusion controlled and depended on the square root of the time, with the activation energy of $1.04P{\pm}0.04eV$. For the Ni/Zr-interlayer/Ge system, no intermediate or intermixing layer between the Zr-interlayer and Ge substrate was formed, and thus the Ni germanide was formed and grew uniformly due to Ni diffusion through the diffusion path created in the amorphous Zr-interlayer during the annealing process in the absence of any intermetallic compounds. The reaction kinetics in the Ni/Zr-interlayer/Ge system was affected only by the Zr-interlayer.

솔-젤법으로 제조한 PZT 박막의 Nb 첨가에 따른 유전 및 전기적 특성 (Dielectric and Electric Properties of Nb Doped PZT Thin Films by Sol-gel Technique)

  • 김창욱;김병호
    • 한국세라믹학회지
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    • 제33권10호
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    • pp.1101-1108
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    • 1996
  • No-doped PZT thin films have been fabricated on Pt/Ti/SiO2/Si substrate using Sol-Gel technique. A fast annealing metho (three times of intermediate and final annealing) was used for the preparation of multi-coated 1800$\AA$ thick Nb-doped PZT thin films. As Nb doping percent was increased leakage current was lowered approximately 2 order but dielectic properties were degraded due to the appearance of pyrochlore phase and domain pinning. Futhermore the increase of the final annealing temperature up to 74$0^{\circ}C$lowered the pyrochlore phase content resulting in enhancing the dielectric properties of the Nb doped films. The 3%-Nb doped PZT thin films with 5% excess Pb showed a capacitance density of 24.04 fF/${\mu}{\textrm}{m}$2 a dielectric loss of 0.13 a switchable polarization of 15.84 $\mu$C/cm2 and a coercive field of 32.7 kV/cm respectively. The leakage current density of the film was as low as 1.47$\times$10-7 A/cm2 at the applied voltage of 1.5 V.

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MOCVD 방법으로 증착된 TaN와 무전해도금된 Cu박막 계면의 열적 안정성 연구 (Thermal Stability of the Interface between TaN Deposited by MOCVD and Electroless-plated Cu Film)

  • 이은주;황응림;오재응;김정식
    • 한국전기전자재료학회논문지
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    • 제11권12호
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    • pp.1091-1098
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    • 1998
  • Thermal stability of the electroless deposited Cu thin film was investigated. Cu/TaN/Si multilayer was fabricated by electroless-depositing Cu thin layer on TaN diffusion barrier layer which was deposited by MOCVD on the Si substrate, and was annealed in $H_2$ ambient to investigate the microstructure of Cu film with a post heat-treatment. Cu thin film with good adhesion was successfully deposited on the surface of the TaN film by electroless deposition with a proper activation treatment and solution control. Microstructural property of the electroless-deposited Cu layer was improved by a post-annealing in the reduced atmosphere of $H_2$ gas up to $600^{\circ}C$. Thermal stability of Cu/TaN/Si system was maintained up to $600^{\circ}C$ annealing temperature, but the intermediate compounds of Cu-Si were formed above $650^{\circ}C$ because Cu element passed through the TaN layer. On the other hand, thermal stability of the Cu/TaN/Si system in Ar ambient was maintained below $550^{\circ}C$ annealing temperature due to the minimal impurity of $O_2$ in Ar gas.

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디지틀 신호처리용 실리콘 컴파일러를 위한 사용자 툴 개발 (The Development of the User Interface Tool for DSP Silicon Compiler)

  • 이문기;장호랑;김종현;이승호;이광엽
    • 전자공학회논문지A
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    • 제29A권9호
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    • pp.76-84
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    • 1992
  • The DSP silicon compiler consists of language compiler, module generator, placement tool, router, layout generation tools, and simulator. In this paper, The language compiler, the module generator, placement tool, and simulator were developed and provided for the system designer. The language compiler translates the designer's system description language into the intermediate form file. The intermediate form file expresses the interconnections and specifications of the cells in the cell library. The simulator was developed and provided for the behavioral verification of the DSP system. For its implementation, the event-driven technique and the C$^{++}$ task library was used. The module generator was developed for the layout of the verified DSP system, and generates the functional block to be used in the DSP chip. And then the placement tool determines the appropriate positions of the cells in the DSP chip. In this paper, the placement tool was implemented by Min-Cut and Simulated Annealing algorithm. The placement process can be controlled by the several conditions input by the system designer.

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Fabrication of 1 km Bi-2223/Ag PIT Tapes

  • Ha, H.S.;Lee, D.H.;Yang, J.S.;Choi, J.K.;Hwang, S.Y.;Kim, S.C.;Ha, D.W.;Oh, S.S.;Kwon, Y.K.
    • 한국초전도학회:학술대회논문집
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    • 한국초전도학회 2003년도 High Temperature Superconductivity Vol.XIII
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    • pp.87-87
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    • 2003
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열처리조건이 BSCCO-2212 벌크의 특성에 미치는 영향 (Effect of Annealing Conditions on Properties of BSCCO-2212 Bulk)

  • 김규태;김찬중;임준형;박의철;박진현;주진호;현옥배;김혜림
    • Progress in Superconductivity
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    • 제9권2호
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    • pp.193-198
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    • 2008
  • We fabricated BSCCO-2212(2212) bulk superconductors by using a casting process and evaluated the superconducting properties. The effects of annealing conditions on microstructure and critical properties were studied. It was found that the homogeneous and uniform microstructure improved the critical properties and the microstructures of ingot and annealed rods were different with the size of 2212 rod and tube. The critical current($I_c$) of rods increased with increasing annealing time, probably due to increased grain size of 2212. Annealing time of the highest $I_c$ for the smaller rod(diameter of 10 mm) was shorter(150 hr) than that of the larger rod(diameter of 16 mm, 400 hr). This size effect seems to be related to different grain sizes of the intermediate phases such as 2201 and secondary phases in the ingot. In addition, we fabricated 2212 tubes from the rod by removing the center region which contained inhomogeneous microstructures. The $I_c$ of 2212 tube with the outer diameter of 16 mm and the thickness of 2 mm was measured to 844 A, which corresponds to the critical current density of $1017\;A/cm^2$ at 77 K.

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박막히터를 사용한 비정질 실리콘의 고상결정화 (A New process for the Solid phase Crystallization of a-Si by the thin film heaters)

  • 김병동;정인영;송남규;주승기
    • 한국진공학회지
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    • 제12권3호
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    • pp.168-173
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    • 2003
  • 유리 기판 위에 증착된 비정질 실리콘 박막의 고상 결정화에 대한 새로운 방법을 제시하였다. 비정질 실리콘 박막의 하부에 패턴 된 다양한 크기의 $TiSi_2$ 박막을 전기저항 가열 방식으로 가열함으로서 비정질 실리콘이 고상 결정화 되도록 하였다. 박막히터를 이용한 열처리는 매우 빠른 열처리 공정으로써, 일반적인 로에 의한 열처리에 비해 매우 낮은 thermal budget을 가지므로, 유리기판 위에서도 고온 열처리가 가능하다는 장점을 가진다. 본 연구에서는 500 $\AA$의 비정질 실리콘 박막을 약 $850^{\circ}C$ 이상의 높은 온도에서 수 초 내에 결정화 할 수 있음을 보였으며, 열처리 조건의 변화에 따른 영향과 지역선택성의 장점을 보였다.

자기정렬구조를 갖는 칼코겐화물 상변화 메모리 소자의 전기적 특성 및 온도 분포 (Electrical Characteristics of and Temperature Distribution in Chalcogenide Phase Change Memory Devices Having a Self-Aligned Structure)

  • 윤혜련;박영삼;이승윤
    • 한국전기전자재료학회논문지
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    • 제32권6호
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    • pp.448-453
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    • 2019
  • This work reports the electrical characteristics of and temperature distribution in chalcogenide phase change memory (PCM) devices that have a self-aligned structure. GST (Ge-Sb-Te) chalcogenide alloy films were formed in a self-aligned manner by interdiffusion between sputter-deposited Ge and $Sb_2Te_3$ films during thermal annealing. A transmission electron microscopy-energy dispersive X-ray spectroscopy (TEM-EDS) analysis demonstrated that the local composition of the GST alloy differed significantly and that a $Ge_2Sb_2Te_5$ intermediate layer was formed near the $Ge/Sb_2Te_3$ interface. The programming current and threshold switching voltage of the PCM device were much smaller than those of a control device; this implies that a phase transition occurred only in the $Ge_2Sb_2Te_5$ intermediate layer and not in the entire thickness of the GST alloy. It was confirmed by computer simulation, that the localized phase transition and heat loss suppression of the GST alloy promoted a temperature rise in the PCM device.