• Journal of the Korean Vacuum Society
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• v.15 no.1
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• pp.89-96
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• 2006

Recent ULSI and multilevel structure trends in microelectronic devices minimize the line width down to less than $0.25{\mu}m$, which results in high current densities in thin film interconnections. Under high current densities, an EM(electromigration) induced failure becomes one of the critical problems in a microelectronic device. This study is to improve thin film interconnection materials by investigating the EM characteristics in Ag, Cu, Au, and Al thin films, etc. EM resistance characteristics of Ag, Cu, Au, and Al thin films with high electrical conductivities were investigated by measuring the activation energies from the TTF (Time-to-Failure) analysis. Optical microscope and XPS (X-ray photoelectron spectroscopy) analysis were used for the failure analysis in thin films. Cu thin films showed relatively high activation energy for the electromigration. Thus Cu thin films may be potentially good candidate for the next choice of advanced thin film interconnection materials where high current density and good EM resitance are required. Passivated Al thin films showed the increased MTF(Mean-time-to-Failure) values, that is, the increased EM resistance characteristics due to the dielectric passivation effects at the interface between the dielectric overlayer and the thin film interconnection materials.

• Journal of the Korean Society for Marine Environment & Energy
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• v.11 no.4
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• pp.227-231
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• 2008

The purpose of this study is to clarify the behavior of stranded crude oil and to estimate the restoration of seawater infiltration by application of dispersant as one of cleaning techniques. We made visualization of infiltration process of seawater and stranded crude oil on the sandy beach sediments by using of a model sandy beach. Major conclusions derived from this study are as follows. The seawater infiltration volume was reduced by the stranded crude oil. However, thirty percentage of the sweater infiltration into the sediments was restored by dispersant application to the penetrated oil in sandy beach. The penetration depth of stranded oil were dropped at first falling tide, but were not significantly fluctuated after that. Moreover, oil concentration was most high within the upper 2 cm. The stranded crude oil was broken into small size droplets and dispersed into the sediments by the dispersant application. Therefore, dispersant applications play an important roles in the large increase of surface area of given volume of oil, and it resulted in promoting to biological degradation process at the oil/water interface, dispersing the stranded oil into the water column and restoration of the supplement of the dissolved oxygen and nutrients to the benthic organisms.

• Journal of the Korean Society for Marine Environment & Energy
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• v.4 no.4
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• pp.21-31
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• 2001

When an oil-spilling accident occurs at sea, it is of the primary importance to predict the amount of oil leakage for the swift response and decision-making. The simplest method of oil-leakage estimation is based on the hydrostatic pressure balance between oil inside the tank and seawater outside of leakage hole, that is the so-called Torricelli equilibrium relation. However, there exists discrepancy between the reality and the Torricelli relation, since the latter is obtained from the quasi-steady treatment of Bernoulli equation ignoring viscous friction. A preliminary experiment has been performed to find out the oil-leaking speed and shape. Soy-bean oil inside the inner tank was ejected into water of the outer tank through four different leakage holes to record the amount of oil leakage. Furthermore, a CFD (Computational Fluid Dynamics) method was utilized to simulate the experimental situation. The Wavier-Stokes equations were solved for two-density flow of oil and water. VOF method was employed to capture the shape of their interface. It is found that the oil-leaking speed varies due to the frictional resistance of the leakage hole passage dependent on its aspect ratio. The Torricelli factor relating the speed predicted by using the hydrostatic balance and the real leakage speed is assessed. For the present experimental setup, Torricelli factors were in the range of 35%~55% depending on the aspect ratio of leakage holes. On the other hand, CFD results predicted that Torricelli factor could be 52% regardless of the aspect ratio of the leakage holes, when the frictional resistance of leakage hole passage was neglected.

• Journal of the Korean Ceramic Society
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• v.31 no.12
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• pp.1577-1587
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• 1994

TiO2 thin films with the substitution of oxygen with nitrogen were deposited on silicon substrate by metalorganic chemical vapor deposition (MOCVD) using Ti(OCH(CH3)2)4 (titanium tetraisopropoxide, TTIP) and N2O as source materials. X-ray diffraction (XRD) results indicated that the crystal structure of the deposited thin films was anatase TiO2 with only (101) plane observed at the deposition temperatures of 36$0^{\circ}C$ and 38$0^{\circ}C$, and with (101) and (200) plane at above 40$0^{\circ}C$. Raman spectroscopic results indicated that the crystal structure was anatase TiO2 in accordance with the XRD results without any rutile, fcc TiN, or hcp TiN structure. No fundamental difference was observed with temperature increase, but the peak intensity at 194.5 cm-1 increased with strong intensity at 143.0 cm-1 for all samples. The crystalline size of the films varied from 49.2 nm to 63.9 nm with increasing temperature as determined by slow-scan XRD experiments. The refractive index of the films increased from 2.40 to 2.55 as temperature increased. X-ray photoelectron spectroscopy (XPS) study showed only Ti 2s, Ti 2p, C 1s, O 1s and O 2s peaks at the surface of the film. The composition of the surface was estimated to be TiO1.98 from the quatitative analysis. In the bulk of the film Ti 2s, Ti 2p, O 1s, O 2s, N 1s and N 2s were detected, and Ti-N bonding was observed due to the substitution of oxygen with nitrogen. A satellite structure was observed in the Ti 2p due to the Ti-N bonding, and the composition of titanium nitride was determined to be about TiN1.0 from the position of the binding energy of Ti-N 2p3/2 and the quatitative analysis. The spectrum of Ti 2p energy level could be the sum of a 4, 5, or 6 Gaussian curve reconstruction, and the case of the sum of the 6 Gaussian curve reconstruction was physically most meaningful. From the results of Auger electron spectroscopy (AES), it was known that the composition was not varied significantly throughout the whole thickness of the film, and silicon oxide was not observed at the interface between the film and the substrate. The composition of the film was possible (TiO2)1-x.(TiN)x or TiO2-2xNx and in this experimental condition x was found to be about 0.21-0.16.

• Journal of the Microelectronics and Packaging Society
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• v.23 no.4
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• pp.87-92
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• 2016

The importance of heat dissipation for the electric device modules along the thickness direction is increasing. Two types of two-layered materials, metal-metal bonding and dielectric-metal bonding, have been fabricated by roll bonding process and a thermal diffusivity of the specimens was measured along the thickness direction. The thermal diffusivity of specimens with metal-metal bonding measured by light flash analysis (LFA) showed a same value independent on the direction of heat flow. However, the thermal diffusivity of specimens with dielectric-metal bonding showed a big difference of 17.5% when the direction of heat flow changed oppositely in the LFA process. The measured thermal diffusivity of specimens when the heat flows from metal to dielectric direction showed smaller value of 17.5% compared to the value when the heat flow from dielectric to metal direction. The difference in thermal diffusivity of specimens with dielectric-metal bonding dependence on direction of heat flow is due to the electron-phonon resistance that occurred transfer process of electron energy to phonon energy near the interface.

• Clean Technology
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• v.23 no.3
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• pp.270-278
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• 2017

This study introduces a method to easily fabricate highly monodisperse pectin hydrogel microfibers in a microfluidic device by using partial gelation. The hydrodynamic parameters between the pectin aqueous solution and the calcium ions containing oil solution are precisely controlled to form a stable elongation flow of the pectin aqueous solution, and partial gelation of the pectin aqueous solution is performed by the chelating of the calcium ions at the interface between the two phases. The partially gelled pectin aqueous solution is phase-separated from the oil solution in an aqueous calcium chloride solution outside the microfluidic device and is completely gelled to produce monodisperse pectin hydrogel microfibers. The thickness of the pectin hydrogel microfiber is controlled in a reproducible manner by controlling the volumetric flow rate of the initially injected pectin aqueous solution. The pectin hydrogel microfibers were 200 to 500 micrometers in diameter and had a coefficient of variation below 5% under all thickness conditions, indicating that the pectin hydrogel microfibers produced by partial gelation are highly monodisperse. In addition, biomaterials can be immobilized to the pectin hydrogel microfibers produced by a single process, demonstrating the possibility that our pectin hydrogel microfiber can be used as carriers for biomaterials or tissue engineering.

• Fire Science and Engineering
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• v.27 no.3
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• pp.1-7
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• 2013

The wildland fire intensity and scale are getting bigger owing to climate change in the world. In the case of domestic, the forest is distributed over approximately 63.7 % of country and the main facilities like a industrial facility or gas facility abuts onto it. Therefore there is potential that the wildland fire is developed to a large-scale disaster. In this study, the effect distances of the radiant heat flux from the crown fire are analysed according to the change of wind velocity. The safety criteria concerning the radiant heat flux to influence on the surrounding were researched to analyse the effect distances. The criteria of radiant heat flux were chosen $5kW/m^2$, $12.5kW/m^2$, $37.5kW/m^2$. WFDS, which is an extension of NIST's Fire Dynamics Simulator, was used to consequence analysis of the forest fire. In order to apply the analysis conditions, it is researched the forest conditions that is generally distributed in domestic region. As the result, the maximum effect distances by radiant heat were showed at the horizontal and vertical direction. When the wind velocity varied from 0 to 10 m/s, the maximum effect distance increased as the wind velocity increases. Interesting point is that the maximum effect distance were shown at the wind velocity of 8 m/s. The maximum effect distance was decreased according as the fuel moisture of trees increase. This study can contribute to analyse quantitative risk about the damage effect of the surrounding facilities caused by wildland fire.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.256-256
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• 2012

Cu가 기존 배선물질인 Al을 대체함에 따라 resistance-capacitance delay와 electromigration (EM) 등의 문제들이 어느 정도 해결되었다. 그러나 지속적인 배선 폭의 감소로 배선의 저항 증가, EM 현상 강화 그리고 stability 악화 등의 문제가 지속적으로 야기되고 있다. 이를 해결하기 위한 방법으로 Cu alloy seed layer를 이용한 barrier 자가형성 공정에 대한 연구를 진행하였다. 이 공정은 Cu 합금을 seed layer로 사용하여 도금을 한 후 열처리를 통해 $SiO_2$와의 계면에서 barrier를 자가 형성시키는 공정이다. 이 공정은 매우 균일하고 얇은 barrier를 형성할 수 있고 별도의 barrier와 glue layer를 형성하지 않아 seed layer를 위한 공간을 추가로 확보할 수 있는 장점을 가지고 있다. 또한, via bottom에 barrier가 형성되지 않아 배선 전체 저항을 급격히 낮출 수 있다. 합금 물질로는 초기 Al이나 Mg에 대한 연구가 진행되었으나, 낮은 oxide formation energy로 인해 SiO2에 과도한 손상을 주는 문제점이 제기되었다. 최근 Mn을 합금 물질로 사용한 안정적인 barrier 형성 공정이 보고 되고 있다. 하지만, barrier 형성을 하기 위해 300도 이상의 열처리 온도가 필요하고 열처리 시간 또한 긴 단점이 있다. 본 실험에서는 co-sputtering system을 사용하여 Cu-V 합금을 형성하였고, barrier를 자가 형성을 위해 300도에서 500도까지 열처리 온도를 변화시키며 1시간 동안 열처리를 실시하였다. Cu-V 공정 조건 확립을 위해 AFM, XRD, 4-point probe system을 이용하여 표면 거칠기, 결정성과 비저항을 평가하였다. Cu-V 박막 내 V의 함량은 V target의 plasma power density를 변화시켜 조절 하였으며 XPS를 통해 분석하였다. 열처리 후 시편의 단면을 TEM으로 분석하여 Cu-V 박막과 $SiO_2$ 사이에 interlayer가 형성된 것을 확인 하였으며 EDS를 이용한 element mapping을 통해 Cu-V 내 V의 거동과 interlayer의 성분을 확인하였다. PVD Cu-V 박막은 기판 온도에 큰 영향을 받았고, 200도 이상에서는 Cu의 높은 표면에너지에 의한 agglomeration 현상으로 거친 표면을 가지는 박막이 형성되었다. 7.61 at.%의 V함량을 가지는 Cu-V 박막을 300도에서 1시간 열처리 한 결과 4.5 nm의 V based oxide interlayer가 형성된 것을 확인하였다. 열처리에 의해 Cu-V 박막 내 V은 $SiO_2$와의 계면과 박막 표면으로 확산하며 oxide를 형성했으며 Cu-V 박막 내 V 함량은 줄어들었다. 300, 400, 500도에서 열처리 한 결과 동일 조성과 열처리 온도에서 Cu-Mn에 의해 형성된 interlayer의 두께 보다 두껍게 성장했다. 이는 V의 oxide formation energy가 Mn 보다 작으므로 SiO2와의 계면에서 산화막 형성이 쉽기 때문으로 판단된다. 또한, $V^{+5}$이온 반경이 $Mn^{+2}$이온 반경보다 작아 oxide 내부에서 확산이 용이하며 oxide 박막 내에 여기되는 전기장이 더 큰 산화수를 가지는 V의 경우 더 크기 때문으로 판단된다.

• The Journal of Korean Academy of Prosthodontics
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• v.43 no.5
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• pp.599-610
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• 2005

Purpose: The success of the bonding between electroformed gold and ceramic is dependent on the surface treatment of the pure gold coping. The purpose of this study was to evaluate the bonding strength between the electroformed gold and ceramic with varying surface treatment. Materials and methods: A total of 32 disks,8 were using conventional ceramometal alloy, 24 were using electroforming technique as recommended by manufacturer, were prepared. 24 electroformed disks were divided 3 groups according to surface treatment, i.e. 50 microns aluminium oxide sandblasting(GES-Sand), gold bonder treatment(GES-Bond) and $Rocatec^{TM}$ system(GES-Rocatec). For control group of conventional alloy 50 microns aluminium oxide treatment was done(V-Supragold). Energy dispersive x-ray analysis and scanning electron microscope image were observed. Using universal testing machine, shear bond strength and bonding failure mode at metal-porcelain interface were measured. Results and Conclusion: The following conclusions were drawn: 1. In the energy dispersive x-ray analysis, the Au was main component in electroformed gold(99.9wt%). After surface treatment, a little amount of $Al_2O_3(2.4wt%)$ were found in GES-Sand, and $SiO_2(4wt%)$ in GES-Bond. In GES-Rocatec, however, a large amount of $SiO_2(17.4wt%)$ were found. 2. In the scanning electron microscopy, similar pattern of surface irregu larities were observed in V-Supragold and GES-Sand. In GES-Bond, surface irregularities were increased and globular ceramic particles were observed. In GES-Rocatec, a large amount of silica particles attached to metal surface with increased surface irregularities were observed. 3. The mean shear bond strength values(MPa) in order were $22.9{\pm}3.7(V-Supragold),\;22.1{\pm}3.8(GES-Bond),\;20.1{\pm}2.8(GES-Rocatec)\;and\;13.0{\pm}1.4(GES-Sand)$. There was no significant difference between V-Supragold, GES-Bond, and GES-Rocatec. (P>0.05) 4. Most bonding failures modes were adhesive type in GES-Sand. However, in V-Supragold, GES-Bond and GES-Rocatec, cohesive and combination failures were commonly observed. From the result, with proper surface treatment method electroformed gold may have enough strength compare to conventional ceramometal alloy.

• Journal of the Korean Ceramic Society
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• v.39 no.9
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• pp.884-889
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• 2002

In order to investigate the calcium phosphate forming ability of nanocrystalline $ZrO_2$ film, we prepared $ZrO_2/Si$ structure by using a chemical solution deposition with a zirconium naphthenate as a starting material. Precursor sol was spin-coated onto the (100)Si substrate and prefired at 500$^{\circ}C$ for 10 min in air, followed by final annealing at 800$^{\circ}C$ for 30 min in air. Crystallinity of the annealed film was examined by X-ray diffraction analysis. Surface morphology and surface roughness of the film were characterized by field emission-scanning electron microscope and atomic force microscope. After annealing, nanocrystalline $ZrO_2$ grains were obtained on the surface of the film with a homogeneous interface between the film and substrate. After immersion for 1 or 5 days in a simulated body fluid, formation of calcium phosphate was observed on $ZrO_2$ film annealed at 800$^{\circ}C$ by energy dispersive X-ray spectrometer. The fourier transform infrared spectroscopy revealed that carbonate was substituted into the calcium phosphate.