• Journal of Sensor Science and Technology
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• v.23 no.1
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• pp.42-45
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• 2014

Recently, tremendous application utilizing electrospun nanofibers have been actively reported due to its several advantages, such as high surface to volume ratio, simple fabrication and high-throughput manufacturing. In this paper, we developed highly sensitive and consistent nanofiber humidity sensor by electrospinning. The humidity sensor was fabricated by rapid electrospinning (~2 sec) $TiO_2$/PVP/LiCl mixed solution on the micro-interdigitated electrode. In order to evaluate the humidity sensing performances, we measured current response using DC bias voltage under various relative humidity levels. The results show fast response / recovery time and marginal hysteresis as well as long-term stability. In addition, with the aid of micro-interdigitated electrode, we can reduce a total resistance of the sensor and increase the total reaction area of nanofibers across the electrodes resulting in high sensitivity and enhanced current level. Therefore, we expect that the electrospun nanofiber array for humidity sensor can be feasible and promising for diverse humidity sensing application.

• JSTS:Journal of Semiconductor Technology and Science
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• v.5 no.1
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• pp.30-37
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• 2005

We present an air bridge type electrode system with tunable electrode distance for detecting electroactive biomolecules. It is known that the narrower gap between electrode fingers, the higher sensitivity in IDA (interdigitated array) electrode. In previous researches on IDA electrode, narrower patterning required much precise and expensive equipment as the gap goes down to nanometer scale. In this paper, an improved method is suggested to replace nano gap pattering with downsizing electrode distance and showed that the patterning can be replaced by thickness control using metal deposition methods, such as electroplating or metal sputtering. The air bridge type electrode was completed by the following procedures: gold patterning for lower electrode, copper electroplating, gold deposition for upper electrode, photoresist patterning for gold film support, and copper etching for space formation. The thickness of copper electroplating is the distance between upper and lower electrodes. Because the growth rate of electroplating is $0.5{\mu}m\;min^{-1}$, the distance is tunable up to hundreds of nanometers. Completed electrodes on the same wafer had $5{\mu}m$ electrode distance. The gaps between fingers are 10, 20, 30, and $40{\mu}m$ and the widths of fingers are 10, 20, 30, 40, and $50{\mu}m$. The air bridge type electrode system showed better sensitivity than planar electrode.

• 한국생물공학회:학술대회논문집
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• 2000.11a
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• pp.115-118
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• 2000

A microfabricated cell chip was developed to evaluate drug effect on mouse B16-F1 melanoma cell line. The cell chip system consists of 8-well culture cartridge incorporated with interdigitated array gold electrodes on each well, lock-in amplifier, 8-well cell scanner and computer as a system controller. Impedance of an electrode is increased according to adherent cell growth on the electrode surface. In order to verify investigated. The change of impedance was measured differentially between a control electrode containing only media and cell-cultured sample electrodes with time.

• Journal of Mechanical Science and Technology
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• v.20 no.4
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• pp.505-512
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• 2006

This paper presents an integrated multifunctional sensor based on MEMS technology, which can be used or embedded in mobile devices for environmental monitoring. An absolute pressure sensor, a temperature sensor and a humidity sensor are integrated in one silicon chip of which the size is $5mm\times5mm$. The pressure sensor uses a bulk-micromachined diaphragm structure with the piezoresistors. For temperature sensing, a silicon temperature sensor based on the spreading-resistance principle is designed and fabricated. The humidity sensor is a capacitive humidity sensor which has the polyimide film and interdigitated capacitance electrodes. The different piezoresistive orientation is used for the pressure and temperature sensor to avoid the interference between sensors. Each sensor shows good sensor characteristics except for the humidity sensor. However, the linearity and hysteresis of the humidity sensor can be improved by selecting the proper polymer materials and structures.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.07b
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• pp.953-956
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• 2002

The electro-optical (EO) performances of a multidomain vertical-alignment (MVA) cell on a homeotropic photopolymer have been investigated. In the absence of an electric field, the MVA cell achieved black state as LC alignment is homeotropic. An electric field created by interdigitated electrodes and rib made after photolithograph using the photopolymer on both substrates causes a director deformation of a multidomain type. Good voltage-transmittance curves for a MVA cell on the homeotropic photopolymer were observed. Also, the stable response time of MVA cell on the homeotropic photopolymer can be achieved.

• Proceedings of the KIEE Conference
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• 2002.07c
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• pp.1566-1568
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• 2002

본 논문은 혈당, 콜레스테롤센서에 적용이 가능한 과산화수소($H_2O_2$) 검출방식인 전기화학발광(Electrochemiluminescence:ECL)법 사용에 필요한 전극특성에 관한 연구이다. 전기화학전극으로 Pt박막전극을 사용하였으며, luminol(5-amino-2, 3-dihydro-1, 4-phthala edione)과 과산화수소($H_2O_2$)의 반응으로 발생한 빛을 포토다이오드(photodiode)를 사용하여 전류를 측정하였다. 사용된 전극은 직사각형(rectangular-type), 교차형(interdigitated-type)의 두 가지 형태를 사용하여, 전극간의 거리와 면적에 따른 ECL특성을 측정하였다. ECL 발광 특성은 전극 면적이 증가함에 따라, 전극거리가 감소함에 따라 증가함을 관찰할 수 있었다.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.25 no.8
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• pp.1261-1268
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• 2001

Effective material properties of active fiber composites with interdigitated electrodes are derived as a function of the fiber volume fraction. For the purpose of applying the rule of mixture, three unit cell models are introduced; each for the deformation and stress continuities in the out of plane and in-plane directions, and the continuity of the electrical displacement in the longitudinal direction. Derived effective material properties are compared with the results by the finite element method; good agreements are observed between them. As an application, the electromechanical behavior of the angle ply laminates with the active fiber layers bonded on the top and bottom surfaces are investigated; the angle of piezoelectric fiber to maximize the twisting curvature is obtained using the present model.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.16 no.3
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• pp.219-223
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• 2003

The electro-optical (EO) performances of a multidomain verticial-alignment (MYA) cell on a homeotropic photopolymer have been investigated. In the absence of an electric field, the WVA cell achieved black state as LC alignment is homeotropic An electric field created by interdigitated electrodes and rib made after photolithograph using the photopolymer on both substrates causes a director deformation of a multidomain type. Good voltage transmittance curves for a MVA cell on the homeotropic photopolymer were observed. Also, the stable response time of MYA cell on the homeotropic photopolymer can be achieved.

• Journal of Sensor Science and Technology
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• v.19 no.5
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• pp.356-360
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• 2010

Due to the high surface-to-volume ratio, the 3-dimensional(3D) nanostructures of metal oxides are regarded as the best candidate materials for the chemical gas sensors. Here we have synthesised flower-like 3D zinc oxide nanostructures through a simple hydrothermal route. Specific surface area of the 3D zinc oxide nanostructures synthesised in different pH values from 9.0 to 12.0 were evaluated by using a BET analyzer and the results were compared with that of a zinc oxide thin film fabricated by rf sputtering. Using interdigitated electrodes, superior CO gas sensing properties of the 3D zinc oxide nanostructures on the ZnO thin film to those of the ZnO thin film were demonstrated.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.11a
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• pp.88-91
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• 2003

Crystalline carbon nitride films have been attempted for an application of humidity sensors. The films were deposited on $Al_2O_3$ substrate having interdigitated electrodes by reactive RF magnetron sputtering system. The film revealed a good humidity-resistance characteristics as well as humidity-capacitance ones in the humidity range of $10\;{\sim}\;95\;RH(%)$. Temperature dependence was also investigated. These results suggest that carbon nitride film have a possibility for a new humidity-sensitive materials.