Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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A study on the humidity sensing properties of crystalline carbon nitride films

결정성 질화탄소막의 습도 감지특성에 관한 연구

  • Lee, Ji-Gong (Department of Electrical and Electronic Engineering, Kyungnam University) ;
  • Ha, Se-Guen (Department of Electrical and Electronic Engineering, Kyungnam University) ;
  • Kim, Jung-Hun (Department of Electrical and Electronic Engineering, Kyungnam University) ;
  • Lee, Sung-Pil (Department of Electrical and Electronic Engineering, Kyungnam University)
  • 이지공 (경남대학교 전기전자공학부) ;
  • 하세근 (경남대학교 전기전자공학부) ;
  • 김정훈 (경남대학교 전기전자공학부) ;
  • 이성필 (경남대학교 전기전자공학부)
  • Published : 2003.11.13
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Abstract

Crystalline carbon nitride films have been attempted for an application of humidity sensors. The films were deposited on $Al_2O_3$ substrate having interdigitated electrodes by reactive RF magnetron sputtering system. The film revealed a good humidity-resistance characteristics as well as humidity-capacitance ones in the humidity range of $10\;{\sim}\;95\;RH(%)$. Temperature dependence was also investigated. These results suggest that carbon nitride film have a possibility for a new humidity-sensitive materials.

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