Journal of Mechanical Science and Technology

The Korean Society of Mechanical Engineers (대한기계학회)
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An Integrated Sensor for Pressure, Temperature, and Relative Humidity Based on MEMS Technology

  • Won Jong-Hwa (Samsung Advanced Institute of Technology, Display lab.) ;
  • Choa Sung-Hoon (Samsung Advanced Institute of Technology, Nano-Device lab.) ;
  • Yulong Zhao (Institute of Precision Engineering, Xi'an Jiao tong University)
  • Published : 2006.04.01
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Abstract

This paper presents an integrated multifunctional sensor based on MEMS technology, which can be used or embedded in mobile devices for environmental monitoring. An absolute pressure sensor, a temperature sensor and a humidity sensor are integrated in one silicon chip of which the size is $5mm\times5mm$. The pressure sensor uses a bulk-micromachined diaphragm structure with the piezoresistors. For temperature sensing, a silicon temperature sensor based on the spreading-resistance principle is designed and fabricated. The humidity sensor is a capacitive humidity sensor which has the polyimide film and interdigitated capacitance electrodes. The different piezoresistive orientation is used for the pressure and temperature sensor to avoid the interference between sensors. Each sensor shows good sensor characteristics except for the humidity sensor. However, the linearity and hysteresis of the humidity sensor can be improved by selecting the proper polymer materials and structures.

Keywords

References

  1. Center for Microcomputer Applications, Universiteit van Amsterdam, 2003, 'Relative Humidity Sensor,' (http://www.cma.science.uva.nl/english/download/pdf/manuals/d025i.pdf)
  2. DeHennis, A. D. and Wise,' K. D., 2005, 'A Wireless Microsystem for the Remoting Sensing of Pressure, Temperature, and Relative Humidity,' Journal of Microelectromechanical Systems, Vol. 14, No. 1, pp. 12-22 https://doi.org/10.1109/JMEMS.2004.839650
  3. Dokmeci, M. and Najafi, K., 2001, 'A High- Sensitivity Polyimide Capacitive Relative Humidity Sensor for Monitoring Anodically Bonded Hermetic Micropackages,' Journal of Microelectromechanical Systems, Vol. 10, No. 2, pp. 197-204 https://doi.org/10.1109/84.925735
  4. Fang, Z., Zhao, Z., Wu, Y., Zhang, B. and Wang, Y., 2004, 'Integrated Temperature and Humidity Sensor Based on MEMS,' Proc. of International Conference on Information Acquisition, pp. 84-87 https://doi.org/10.1109/ICIA.2004.1373325
  5. Fujita, T. and Maenaka, K., 2002, 'Integrated Multi-Environmental Sensing-System for the Intelligent Data Carrier,' Sensors and Actuators A, Vol. 97-98, pp. 527-534 https://doi.org/10.1016/S0924-4247(01)00819-6
  6. Guckel, H., 1991, 'Surface Micromachined Pressure Transducers,' Sensors and Actuators A, Vol. 28, No. 2, pp. 133-146 https://doi.org/10.1016/0924-4247(91)85021-F
  7. Laconte, J., Wilmart, V., Flandre, D. and Raskin, J. -P., 2003, 'High-Sensitivity Capacitive Humidity Sensor Using 3-Layer Patterned Polyimide Sensing Film,' Proc. of IEEE Sensors, Vol. 1, pp. 22-24 https://doi.org/10.1109/ICSENS.2003.1278961
  8. Lai, P. T., Bin Li, C. L. and Sin, J. K. O., 1999, 'Spreading-Resistance Temperature Sensor on Silicon-On-Insulator,' IEEE Electron Device Letters, Vol. 20, No. 11, pp. 589-591 https://doi.org/10.1109/55.798053
  9. Lee, S., Kim, J. and Shin, Y., 2006, 'The Influence of Residual Stress on the Frequency of Ultrasonic Transducers with Composite Membrane Structure,' Journal of Mechanical Science and Technology, Vol. 20, No. 1, pp. 76-84.(in Korea) https://doi.org/10.1007/BF02916202
  10. Matsuguch, M., Kuroiwa, T., Miyagishi, T., Suzuki, S., Ogura, T. and Sakai, Y., 1998, 'Stability and Reliability of Capacitive-Type Relative Humidity Sensors Using Crosslinked Polyimide Films,' Sensors and Actuators B, Vol. 52, pp. 53-57 https://doi.org/10.1016/S0925-4005(98)00255-X
  11. Obermeier, E. and Kopystinsky, P., 1992, 'Polysilicon as a Material for Microelectronic Applications,' Sensors and Actuators A, Vol. 30, pp. 149-155 https://doi.org/10.1016/0924-4247(92)80210-T
  12. Shim, J. J., Han, G. J. and Han, D. S., 2004, 'Evaluation of the Residual Stress with Respect to Supporting Type of Multi-layer Thin Film for the Metallization of Pressure Sensor,' Transactions of the Korean Society of Mechanical Engineers A, Vol. 28, No. 5, pp. 532-538. (in Korea) https://doi.org/10.3795/KSME-A.2004.28.5.532
  13. Story, P. R., Galipeau, D. W. and Mileham, R. D., 1995, 'A Study of Low-Cost Sensors for Measuring Low Relative Humidity,' Sensor and Actuators B, Vol. 24-25, pp. 681-685 https://doi.org/10.1016/0925-4005(95)85150-X
  14. Zhao, Y. L., Zhao, L. B. and Jiang, Z. D., 2003, 'A Novel High Temperature Pressure Sensor on the Basis of SOI layers,' Sensors and Actuators A, Vol. 108, pp. 108-111 https://doi.org/10.1016/j.sna.2003.07.011