• Journal of the Korean Society of Manufacturing Process Engineers
• /
• v.18 no.8
• /
• pp.44-50
• /
• 2019

CMP is the most critical process in the manufacture of silicon wafers, and the use of retaining rings, which are consumable parts used in CMP equipment, is increasingly important. Since the retaining ring is made of plastic, it is not only weak in strength but also has the problem of taking a long time for the flattening operation of the ring itself performed before the CMP process, and of the imbalance of force due to bolt tightening causing uneven wear. In order to solve this problem, the retaining ring and the insert ring are integrally used, and the flatness of the retaining ring may be affected depending on the material of the insert ring. Also, the residual stress generated in the manufacturing process of the insert ring may cause distortion of the ring, which may adversely affect the precision polishing. In this study, when the insert ring is made of Zn or STS304, the thickness variation and the flatness of the retaining ring are compared and, finally, the material removal rate is analyzed by polishing the wafer by the oxide CMP process. Through these experiments, the effects of the insert ring material on the polishing accuracy of the wafers were investigated.

• Transactions of Materials Processing
• /
• v.27 no.3
• /
• pp.165-170
• /
• 2018

In order to increase the lifetimes of cold forging dies, insert rings are generally used. In this study, an insert ring and shrunk ring of the flange upsetting die were designed for the cold forging of an automotive wheel nut. The Stress distribution occurring in the die during forging was simulated using a commercial finite element analyzing program. The effects of the fitting interference and inclined angle of the insert ring on the compressive stress of the die inside were also investigated. The simulated data were compared with the real lifetimes of the forging dies. The maximum compressive stress acting on the edge of a forging die should have the most influence on die lifetime, an idea which could help develop the die design with the longest lifetime. The design of the most optimal forging die with the longest lifetime is made possible by analyzing the maximum inner pressure and principal stress between the shrunk ring and insert ring.

• Journal of the Korean Society for Precision Engineering
• /
• v.16 no.6
• /
• pp.114-122
• /
• 1999

By using the FEM, a method for the stress analysis of the presented dies has been proposed. In this method, FEM and Lame equation are used for the analysis of the die insert and the stress ring, respectively. The proposed method includes the calculation of the contact pressure between the die insert and the stress ring. To show the validity, the proposed method has been applied to the simple test problem. The results of the stress analysis have been compared with the results of ANSYS, a commercial FE-code. Cold extrusion has been simulated by using the rigid-plastic FEM and the results of the deformation analysis have been used as the input of the die structure analysis. The stress states of the prestressed extrusion die have been obtained. The stress analysis of the die insert with stress rings has also been performed during extrusion.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2012.05a
• /
• pp.125-126
• /
• 2012

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2011.06a
• /
• pp.17-18
• /
• 2011

• Proceedings of the Korean Society for Technology of Plasticity Conference
• /
• 2001.11a
• /
• pp.99-106
• /
• 2001

The design for cold extrusion dies is very important, because the die insert is subjected to very high radial and hoop stresses. The design of cold extrusion dies has many constrained conditions. In this paper, the used assumptions are such that the yield strength of each ring is selected according to the allowable tensile or compressive hoop stress in each ring and the maximum allowable inner pressure, when yielding occurs in one ring of the dies, is obtained by the proposed equation. In order to obtain design variables, such as diameter ratios and interferences, using the maximum inner pressure, the flexible tolerance method was used for shrink-fitted thick-walled cylinders. ANSYS APDL was used to perform the repeated analysis of deformation of the dies due to the variation of the design variables. The response surface methodology is utilized to analyze the relationship between the design variables and the maximum radial displacement of the die insert during extrusion. From the results, it is found that outer diameter of the die Insert has the largest effect on the minimization of maximum radial displacement at the inner surface of the dies.

• Journal of the Korean Society for Precision Engineering
• /
• v.22 no.1
• /
• pp.167-174
• /
• 2005

The design for cold extrusion dies is very important, because the die insert is subjected to very high radial and hoop stresses. The design of cold extrusion dies has many constrained conditions. In this paper, the used assumptions are such that the yield strength of each ring is selected according to the allowable tensile or compressive hoop stress in each ring and the maximum allowable inner pressure, when yielding occurs in one ring of the dies, is obtained by the proposed equation. In order to obtain design variables, such as diameter ratios and interferences, using the maximum inner pressure, the flexible tolerance method was used for shrink-fitted thick-walled cylinders. ANSYS APDL was used to perform the repeated analysis of deformation of the dies due to the variation of the design variables. The response surface methodology is utilized to analyze the relationship between the design variables and the maximum radial displacement of the die insert during extrusion. From the results, it is found that outer diameter of the die insert has the largest effect on the minimization of maximum radial displacement at the inner surface of the dies.

• Journal of the Korean Society for Precision Engineering
• /
• v.28 no.3
• /
• pp.301-307
• /
• 2011

In this paper, effects of major design parameters of cold forging dies on die mechanics are quantitatively investigated with emphasis on shrink fit using a thermoelastic finite element method. A ball-stud cold forging process found in a cold forging company is selected as a test process and the effects of die insert material, magnitude of shrink fit, dimension of shrink ring, number of shrink rings, partition of die insert and clamping force on effective stress and circumferential stress are analyzed. It has shown that the number of shrink rings, magnitude of shrink fit, and Young's modulus of die insert material have strong influence on compressive circumferential stress in die insert but that the influence of the other design parameters is relatively weak.

• Membrane and Water Treatment
• /
• v.3 no.1
• /
• pp.51-62
• /
• 2012

The permeate flux declination along an ultrafilter membrane is due mainly to the concentration-polarization resistance increment and the decline in transmembrane pressure. It was found in previous works that the concentration polarization resistance could be reduced in a ring-rod tubular membrane ultrafilter using the turbulent behavior. In the present study, the performance was further improved by properly and gradually decreasing the baffled-ring distance along the cross-flow channel coupled with properly adjusting the number of baffled rings. This theoretical analysis is based on the mass and momentum balances as well as the application of the resistance-in-series model. The correlation predictions are confirmed with the experimental results for dextran T500 aqueous solution ultrafiltration.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
• /
• 1996.10a
• /
• pp.180-186
• /
• 1996

Using carbon steel or ceramic as a shaft material of monolithic and slited insert ring clamped on it. The fitting strengths of the sgrink fitted assemblies measured from room temperature to 30$0^{\circ}C$ and following conclusions were obtained as results of this investigation. 1) The fitting condition under which the shrink fitted assemble was stronger than that using simple fit in high temperature. 2) When both material of the 30mm-diameter shaft and 55mm-diameter boss are SM45C the clamping torque is increased 2.7times as the interference increases 3 times from 20${\mu}{\textrm}{m}$ at the contact length of 6mm monolithic fit. 3) When only the material of boss is changed to STS 304 the clamping torque is increased at the rate of 37.3N.m per 1mm increase of the contact length at the interference of 50${\mu}{\textrm}{m}$ monolithic fit.