• Title/Summary/Keyword: high temperature high pressure

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Solid Phase Crystallizations of Sputtered and Chemical Vapor Deposited Amorphous Hydrogenated Silicon (a-Si:H) Thin Film (스퍼터링 및 화학기상 증착 비정질 수소화 실리콘박막의 고상결정화)

  • 김형택
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.11 no.4
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    • pp.255-260
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    • 1998
  • Behavior of solid phase crystallizations (SPC) of RF sputtered and LPCVD amorphous hydrogenated silicon film were investigated. LPCVD films showed the higher degree of crystallinity and larger grain size than sputtered films. The applicable degree of crystallinity was also obtained from sputtered films. The deposition method of amorphous silicon film influenced the behavior of post annealing SPC. Observed degree of crystallinity of sputtered films strongly depended on the partial pressure of hydrogen in deposition. The higher deposition temperature of sputtering provided the better crystallinity after SPC. Due to the high degree of poly-crystallinity, the retardation of larger grain growth was observed on sputtering film.

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Evaluation of Oxidation Ozone for Superconductor Thin Film Growth (초전도 박막 제작을 위한 산화 오존의 평가)

  • Lim, Jung-Kwan;Park, Yong-Pil;Lee, Hee-Kab
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.04a
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    • pp.35-38
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    • 2004
  • Ozone is useful oxidizing gas for the fabrication of oxide thin films. Accordingly researching on oxidizing gas is required. In order to obtain high quality oxide thin films, higher ozone concentration is necessary. In this paper oxidation property was evaluated relation between oxide gas pressure and inverse temperature(CuO reaction). The obtained condition was formulated by the fabrication of Cu metal thin film by co-deposition using the Ion Beam Sputtering method. Because the CuO phase peak appeared at the XRD evaluation of the CuO thin film using ozone gas, this study has succeeded in the fabrication of the CuO phase at $825^{\circ}C$.

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An effective transmission in high quality multimedia based emergency telemedicine (응급 원격진료시스템을 위한 고품질 멀티미디어 데이터의 무선망에서의 효율적 전송)

  • Park, Jung-Hoon;Park, Jin-Bae;Yoon, Tae-Sung;Yoo, Sun-Kuk
    • Proceedings of the KIEE Conference
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    • 2003.07d
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    • pp.2343-2345
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    • 2003
  • 근래에 여러 종류의 다양한 원격응급진료시스템이 개발되어 왔고, 그중 무선원격진료시스템에 있어서는 환자기록데이터나 생체신호, 정지영상과 같은 미미한 데이터만을 보내는 시스템이 주류였다. 이에 무선응급진료시스템에 많은 시도가 이루어지기 시작하였고, 다양한 형태의 시스템이 특정목적에 맞게 구현 되기 시작하였다. 본 논문에서는 고품질 멀티미디어 데이터를 원격응급진료시스템에 적용하여, 고품질 영상데이터와 ECG(Electro Cardiogram), SPO2, BP(Blood Pressure), Body Temperature 데이터를 CDMA 무선망을 이용하여 효과적으로 전송하는 방법을 제안한다. 또한 다양한 시험을 통하여 고품질 환자동영상과 환자데이터를 효과적으로 전송할 수 있음을 확인하였다.

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Preparation of Thin Film for Perpendicular Magnetic Recording (수직자기기록용 박막의 제작)

  • 김경환;김명호;손인환;김재환
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1997.11a
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    • pp.309-312
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    • 1997
  • The Ce-Cr(-Ta) film are one of the most suitable candidates for perpendicular magnetic media. the control of the preparation conditions, such as Ar gas pressure P$\_$Ar/ substrates temperature T$\_$s/, films thickness $\delta$, deposition speed R$\_$d/, is considered to be important to attain ultra high density recording far perpendicular magnetic recording media. In this study, the Co-Cr thin films and Co-Cr-Ta thin films were deposited on the glass side substrates by using Facing Targets Sputtering apparatus(FTS). Crystallographic characteristics and magnetic characteristics were evaluated by X-ray diffractometry(XRD), Vibrating Sample Magnetometer(VSM) respectively.

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Performance Analysis of Carbon Canister for Reducing Evaporative Emissions in a Gasoline Automotive Engine

  • Chung, Yon-Jong;Cho, Gyu-Sang;Erickson, Paul A.;Han, Sung-Bin
    • Journal of Energy Engineering
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    • v.17 no.2
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    • pp.47-53
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    • 2008
  • The objective of this paper is to clarify the flow characteristic, velocity distribution, pressure loss, and other such fundamental data for the canister during loading and purging. The amount of gas that is loaded increases as the loading rate is decreased and the time increased, and the purging improves as the purge rate is increased. The hydrocarbons that are purged initially have a high concentration, and a large amount is purged. During loading and purging, the temperature initially increases and decreases drastically due to heat generation and heat loss.

The Oxidation of TiB$_2$ Ceramics (TiB$_2$ 세라믹스의 산화)

  • 이동복;이영찬
    • Journal of Surface Science and Engineering
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    • v.34 no.1
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    • pp.25-32
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    • 2001
  • $TiB_2$ ceramics were oxidized at 800, 900 and $1000^{\circ}C$ in air for 40 hr, and their oxidation property was investigated using TGA, XRD, SEM and EPMA. The oxidation resistance decreased with an increase in oxidation temperature. The scale was essentially composed of $TiO_2$ only. $B_2$$O_3$ formed during oxidation escaped from the $TiO_2$ oxide scale owing to its high vapor pressure. This made the oxide scale highly porous and thick. The oxidation reaction was mainly governed by the inward transport of oxygen.$ TiO_2$ existing at the outermost scale grew into peculiarly shaped blades, as the reaction progressed.

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Design of Hardward Diagnostic System for Reactor Internal Structures Using Neutron Noise (중성자 신호이용 원자로 내부 구조물 감시시스템 하드웨어 설계)

  • Park, Jong-Beom;Park, Jin-Ho;Hwang, Choong-Hwan;Kim, Soo-Hong
    • Proceedings of the KIEE Conference
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    • 2001.07d
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    • pp.2166-2168
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    • 2001
  • Reactor Noise is defined as the fluctuations of measured instrumentation signals during full-power operation of reactor which have informations on reactor system dynamics such as neutron kinetics. The Reactor internal structures which consist of many complex components are subjected to flow-induced vibration due to high temperature and pressure in reactor coolant system. The above flow-induced vibration causes degradation of structural integrity of the reactor and may result in loosing mechanical binding component which might impact other equipment and component or cause flow blockage. It is important to analyze reactor noise signal for the early detection of potential problem or failure in order to diagnosis reactor integrity in the point of view of safety and plant economics. Detailed design of hardware diagnostic system reactor internal structures using neutron noise(RIDS).

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The study of UV emission in ZnO thin films fabricated by Pulsed Laser Deposition (레이저 증착법에 의해 제작된 ZnO 박막의 UV 발광특성연구)

  • 배상혁;이상렬;진범준;우현수;임성일
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1999.11a
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    • pp.95-98
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    • 1999
  • ZnO thin films on (001) sapphire substrates have been deposited by pulsed laser deposition technique using a Nd:YAG laser with the wavelength of 355 nm. In order to investigate the effect of the deposition conditions on the properties of ZnO thin films at an oxygen pressure of 350 mTorr, the experiment has been Performed at various substrate temperatures in the range of 20$0^{\circ}C$ to $700^{\circ}C$. According to XRD, (002) textured ZnO films of high crystalline quality have been obtained and the intensity of UV emission was the highest at 40$0^{\circ}C$ substrate temperature.

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Superconducting Characteristics of Bi Thin Films Fabricated by Ion Beam Sputtering (이온빔 스퍼터법으로 제작한 Bi 박막의 초전도 특성)

  • 이희갑;박용필;오금곤
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2000.07a
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    • pp.222-225
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    • 2000
  • BSCCO thin films have been fabricated by co-deposition at an ultralow growth rate using ion beam sputtering(IBS) method. Bi 2212 phase appeared in the temperature range of 750 and $795^{\circ}C$ and single phase of Bi 2201 existed in the lower region than $785^{\circ}C$. Whereas, $Po_3$ dependance on structural formation was scarcely observed regardless of the pressure variation. And high quality of c-axis oriented Bi 2212 thin film with $T_c$ (onset) of about 90 K and $T_c$(zero) of about 45 K is obtained. Only a smd amount of CuO in some films was observed as impurity, and no impurity phase such as $CaCuO_2$ was observed in d of the obtained films.

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Characteristics of Ambient Gas for Bi-Superconductor Thin Films Growth (Bi 초전도 박막 성장을 위한 분위기가스의 특성)

  • Lim, Jung-Kwan;Park, Yong-Pil;Jang, Kyung-Uk;Lee, Hee-Kab
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2005.07a
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    • pp.587-588
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    • 2005
  • Ozone is useful oxidizing gas for the fabrication of BSCCO thin films. In order to obtain high quality oxide BSCCO thin films, higher ozone concentration is necessary. The growth rates of the films was set in the region from 0.17 to 0.27 nm/min. MgO(100) was used as a substrate. In this paper oxidation property was evaluated relation between oxide gas pressure and inverse temperature(CuO reaction). The obtained condition was formulated by the fabrication of Cu metal thin film by co-deposition using the Ion Beam Sputtering method. Because the CuO phase peak appeared at the XRD evaluation of the CuO thin film using ozone gas, this study has succeeded in the fabrication of the CuO phase at $825^{\circ}C$.

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