• Title/Summary/Keyword: gradient deposition

Search Result 69, Processing Time 0.023 seconds

Design of a Large Magnetron Sputtering System for TFT LCD and Investigation of Sputtered AI Film Properties (TFT LCD 제조용 대면적 Magnetron Sputtering 장치 설계와 Al 성장막 특성 조사)

  • 유운종
    • Journal of the Korean Vacuum Society
    • /
    • v.2 no.4
    • /
    • pp.480-485
    • /
    • 1993
  • Factros considered building the magnetron sputtering system for TFT LCD (thin film transistor liquid crystal display0 metallization were thin film thichnes uniformity, temperature uniformity and the pressure gradient of sputtering gas flow in vacuum chamber, base pressure, and the stability fo the carrier moving . The system was consisted of a deposition chamber, a pre-heating chamber, a RF-precleaning chamber and a load/unload lock chamber. The system was designed to handle a substrate with dimension of 400$\times$400mm. The temperautre uniformity of a heater table developed showed $250 ^{\circ}C\pm$5% accuracyon the substrate glass. A base pressure of 1.8 $\times$10-7 torr was obtained after 24 hours pumping with a cryo pump. After an aluminum target was installed in a sputtering source and the film wa sdeposited on the glass, the uniformity, reflectivity and sheet resistance of the deposited film were measured.

  • PDF

Direct-coupled First-order SQUID gradiometer for Nondestructive Evaluations (비파괴 평가용 직접결합형 1차 미분형 SQUID gradiometer)

  • Hwang, Yun-Seok;Choi, Hee-Seok;Kim, Jin-Tae;Lee, Soon-Gul;Lee, Dong-Hoon;Park, Yong-Ki;Park, Jong-Chul
    • 한국초전도학회:학술대회논문집
    • /
    • v.9
    • /
    • pp.161-164
    • /
    • 1999
  • We have fabricated the direct-coupled planar type 1st-order SQUID gradiometers. The gradiometer consists of moats or slots in SQUID loop. It is made by YBa$_2Cu_3O_7$ thin films using pulsed laser deposition method on SrTiO$_3$ single crystal and bi-crystal substrates. We have studied the effects of slots and moats in SQUID loop by measuring the voltage modulation signals under uniform field and 1st-order gradient, and the noise properties under non-shielded environment.

  • PDF

Characteristics of directly-coupled single -layer second-order high Tc SQUID gradiometer

  • Hwang, Yun-Seok;Moon, Sunk-Yung;Ahn, Jong-Rok;Lee, Soon-Gul;Kim, Jin-Tae
    • 한국초전도학회:학술대회논문집
    • /
    • v.10
    • /
    • pp.184-188
    • /
    • 2000
  • We have fabricated directly-coupled single-layer second-order high-Tc SQUID gradiometer. The gradiometer consisted of 3 parallel-connected square pickup loops, and each loop was directly coupled to SQUID. YBCO thin film was deposited by pulsed laser deposition and patterned by photolithography with ion milling technique. Optimum balancing condition was achieved by varying the outer diameter of the center loop. We have investigated nearly zero response of the SQUID to uniform and 1 st-order field gradient.

  • PDF

Interdiffusion effects in optical multilayer thinfilms (광 다층박막의 층간확산 효과)

  • 이영재;김영식
    • Korean Journal of Optics and Photonics
    • /
    • v.9 no.5
    • /
    • pp.300-306
    • /
    • 1998
  • We have studied the optical effects in dielectric multilayer due to the interdiffusion formed during the deposition process. We suggest a numerical method to calculate the optical properties of periodical multilayer thin-films with gradient-index profiles. Using this method the spectral transmittance and reflectance were obtained for Fabry-Perot type filters, broad-band total reflectors and antireflection filters with interdiffusion layers. Interdiffusion reduced the spectral band width of high reflectance in total reflectors, and deteriorated the characteristics of multilayer AR-coatings leading to a large variation of reflectance if the number of the layers is large.

  • PDF

Characteristics of Thermo-Fluid Flow in Dilution Chamber of Micro-Dilution Tunnel for Diesel Particulate Measurement (디젤매연측정용 마이크로 희석터널의 희석챔버에서의 열유동 특성)

  • 김태권;김성훈;임문혁
    • Transactions of the Korean Society of Automotive Engineers
    • /
    • v.10 no.6
    • /
    • pp.90-99
    • /
    • 2002
  • The main purpose of this study lies on the development of micro dilution tunnel based on the Sierra Dilution chamber model. As a primary examination, characteristics of flow and temperature distributions during the steady dilution process in dilution chamber are observed with numerical analysis. The penetration of dilution air through porous tube as well as wall temperature and temperature gradient inside porous tube are examined. The thermophoretic velocity in terms of temperature behavior inside porous tube are defined and examined. Based on the ratio of penetration and thermophoretic velocities, all part of porous tube are shown to be safe from the particulate depositions. However, The inlet portion of porous tube in addition to the portion of impinging of dilution air are marginally safe from the particulate depositions. Generally the safer design against particulate deposition is required in provision f3r steady dilution process and for transient process as well.

Variational Data Assimilation for Optimal Initial Conditions in Air Quality Modeling

  • Park, Seon-Ki
    • Journal of Korean Society for Atmospheric Environment
    • /
    • v.19 no.E2
    • /
    • pp.75-81
    • /
    • 2003
  • Variational data assimilation, which is recently introduced to the air quality modeling, is a promising tool for obtaining optimal estimates of initial conditions and other important parameters such as emission and deposition rates. In this paper. two advanced techniques for variational data assimilation, based on the adjoint and quasi-inverse methods, are tested for a simple air quality problem. The four-dimensional variational assimilation (4D-Var) requires to run an adjoint model to provide the gradient information in an iterative minimization process, whereas the inverse 3D-Var (I3D-Var) seeks for optimal initial conditions directly by running a quasi -inverse model. For a process with small dissipation, I3D-Vu outperforms 4D-Var in both computing time and accuracy. Hybrid application which combines I3D-Var and standard 4D-Var is also suggested for efficient data assimilation in air quality problems.

Smartphone Digital Image Processing Method for Sand Particle Size Analysis (모래 입도분석을 위한 스마트폰 디지털 이미지 처리 방법)

  • Ju-Yeong Hur;Se-Hyeon Cheon
    • Journal of Korean Society of Coastal and Ocean Engineers
    • /
    • v.35 no.6
    • /
    • pp.164-172
    • /
    • 2023
  • The grain size distribution of sand provides crucial information for understanding coastal erosion and sediment deposition. The commonly used sieve analysis for grain size distribution analysis has limitations such as time-consuming processes and the inability to obtain information about individual particle shapes and colors. In this study, we propose a grain size distribution analysis method using smartphone digital images, which is simpler and more efficient than the sieve analysis method. During the image analysis process, we effectively detect particles from relatively low-resolution smartphone digital images by extracting particle boundaries through image gradient calculation. Using samples collected from four beaches in Gyeongsangbuk-do, we compare and validate the proposed boundary extraction image analysis method with the analysis method that does not extract boundaries, against sieve analysis results. The proposed method shows an average error rate of 8.21% at D50, exhibiting a 65% lower error compared to the method without boundary extraction. Therefore, grain size distribution analysis using smartphone digital images is convenient, efficient, and demonstrated accuracy comparable to sieve analysis.

Geochemistry of Total Gaseous Mercury in Nan-Ji-Do, Seoul, Korea (난지도 지역의 대기수은 지화학)

  • Kim, Min-Young;Lee, Gang-Woong;Shin, Jae-Young;Kim, Ki-Hyun
    • Journal of the Korean earth science society
    • /
    • v.21 no.5
    • /
    • pp.611-622
    • /
    • 2000
  • To investigate the exchange rates of mercury(Hg) across soil-air boundary, we undertook the measurements of Hg flux using gradient technique from a major waste reclamation site, Nan-Ji-Do. Based on these measurement data, we attempted to provide insights into various aspects of Hg exchange in a strongly polluted soil environment. According to our analysis, the study site turned out to be not only a major emission source area but also a major sink area. When these data were compared on hourly basis over a full day scale, large fluxes of emission and deposition centered on daytime periods relative to nighttime periods. However, when comparison of frequency with which emission or deposition occurs was made, there emerged a very contrasting pattern. While emission was dominant during nighttime periods, deposition was most favored during daytime periods. When similar comparison was made as a function of wind direction, it was noticed that there may be a major Hg source at easterly direction to bring out significant deposition of Hg in the study area. To account for the environmental conditions controlling the vertical direction of Hg exchange, we compared environmental conditions for both the whole data group and those observed from the wind direction of strong deposition events. Results of this analysis indicated that the concentrations of pollutant species varied sensitively enough to reflect the environmental conditions for each direction of exchange. When correlation analysis was applied to our data, results indicated that windspeed and ozone concentrations best reflected changes in the magnitudes of emission/deposition fluxes. The results of factor analysis also indicated the possibility that Hg emission of study area is temperature-driven process, while that of deposition is affected by a mixed effects of various factors including temperature, ozone, and non-methane HCs. If the computed emission rate is extrapolated to the whole study area we estimate that annual emission of Hg from the study area can amount to approximately 6kg.

  • PDF

CNT Growth Behavior on Ti Substrate by Catalytic CVD Process with Temperature Gradient in Tube Furnace (촉매 화학기상증착 공정에서 온도구배 설정을 통한 타이타늄 기판에서의 CNT 성장 거동)

  • Park, Ju Hyuk;Byun, Jong Min;Kim, Hyung Soo;Suk, Myung-Jin;Oh, Sung-Tag;Kim, Young Do
    • Journal of Powder Materials
    • /
    • v.21 no.5
    • /
    • pp.371-376
    • /
    • 2014
  • In this study, modified catalytic chemical vapor deposition (CCVD) method was applied to control the CNTs (carbon nanotubes) growth. Since titanium (Ti) substrate and iron (Fe) catalysts react one another and form a new phase ($Fe_2TiO_5$) above $700^{\circ}C$, the decrease of CNT yield above $800^{\circ}C$ where methane gas decomposes is inevitable under common CCVD method. Therefore, we synthesized CNTs on the Ti substrate by dividing the tube furnace into two sections (left and right) and heating them to different temperatures each. The reactant gas flew through from the end of the right tube furnace while the Ti substrate was placed in the center of the left tube furnace. When the CNT growth temperature was set $700/950^{\circ}C$ (left/right), CNTs with high yield were observed. Also, by examining the micro-structure of CNTs of $700/950^{\circ}C$, it was confirmed that CNTs show the bamboo-like structure.

Analysis of Residual Stresses at Manufacturing Precesses for Microaccelerometer Sensors (미소가속도계 센서의 제조공정에서 잔류응력 해석)

  • 김옥삼
    • Journal of Advanced Marine Engineering and Technology
    • /
    • v.25 no.3
    • /
    • pp.631-635
    • /
    • 2001
  • The major problems associated with the manufacturing processes of the microaccelerometer based on the tunneling current concept is the residual stress. This paper deals with finite element analysis of residual stress causing pop up phenomenon which are induced in micromachining processes for a microaccelerometers sensor using silicon on insulator(SOI) wafer. After heating the tunnel gap up to $100^{\circ}C$and get it through cooling process and the additional beam up to $80^{\circ}C$get it through the cooling process. We learn the residual stress of each shape and compare the results with each other, after heating the tunnel gap up to $400^{\circ}Cduring$ the Pt deposition process. The equivalent stresses produced during the heating process of focused ion beam(FIB) cut was also to be about $0.02~0.25Pa/^{\circ}C$and cooling process the gradient of residual stresses of about $8.4\{times}10^2Pa/{\mu}m$ still at cantilever beam and connected part of paddle. We want to seek after the real cause of this pop up phenomenon and diminish this by change manufacturing processes of microaccelerometer sensors.

  • PDF