• 제목/요약/키워드: gap filling

검색결과 183건 처리시간 0.022초

Cu 배선의 평탄화를 위한 ECMD에 관한 연구 (Electro-chemical Mechanical deposition for the planarization of Cu film)

  • 정석훈;서헌덕;박범영;이현섭;정재우;박재홍;정해도
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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    • pp.649-650
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    • 2005
  • 반도체는 고집적화, 고속도화, 저전력화를 목적으로 발전하고 있다. 이를 위하여 design rule의 감소, 새로운 물질과 프로세스의 적용 등 많은 연구가 이루어지고 있으며, RC delay time을 줄이기 위한 Cu 와 저유전율 재료의 적용이 그 대표적인 예라 할 수 있다. Cu 배선은 기존의 Al 배선에 비하여 높은 전자이동 (electro-migration)과 응력 이동 (stress-migration) 저항을 가짐으로써 전기적인 성능 (electrical performance) 에서 이점을 가지고 있다. 반도체에서의 Cu 배선 구조는 평탄화된 표면 및 배선들 사이에서의 좋은 전기적인 절연성을 가져야 하며, 이는 디싱(dishing)과 에로젼(erosion)의 중요한 인자가 된다. 기존의 평탄화 공정인 Cu CMP(Chemical Mechanical Polishing)에 있어서 이러한 디싱, 에로전과 같은 결함은 선결되어져야 할 문제로 인식되고 있다. 따라서 본 연구에서는 이러한 결합들을 감소시키기 위한 새로운 평탄화 방법으로 Cu gap-filling 을 하는 동시에 평탄화된 표면을 이루는 ECMD(Electro-Chemical Mechanical Deposition) 공정의 전기적 기계적 특성을 파악하였다.

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50 nm 이상의 CMOS 기술에 이용되는 Spin-on Dielectric 박막 형성과 그 특성에 미치는 전구체의 영향 (The Effects of Precursor on the Formation and Their Properties of Spin-on Dielectric Films Used for Sub-50 nm Technology and Beyond)

  • 이완규
    • 한국진공학회지
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    • 제20권3호
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    • pp.182-188
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    • 2011
  • 탄소가 없는 폴리실라잔 계와 탄소가 함유된 폴리메틸 실라잔 계 전구체를 실리콘 기판에 스핀코팅하고 $150^{\circ}C$, $400^{\circ}C$, $850^{\circ}C$에서 열처리하여 형성된 박막의 물리적 화학적 특성을 평가하였다. 프리에 변환 적외선 분광, 수축 율, 갭-충진, 식각속도 등을 평가하여 박막형성과 형성된 박막의 물리화학적 특성에 미치는 탄소의 영향을 고찰하였다. 탄소함유 전구체는 (탄소가 없는 전구체보다) $400^{\circ}C$에서 질소, 수소, 탄소의 휘발량이 더 적고 산소 흡수량이 더 적어서 (15.6%)보다 낮은 14.5% 두께 수축을 나타내었으나, $800^{\circ}C$에서는 휘발 량이 더 많고 산소 흡수량도 더 많아져 (19.4%)보다 높은 37.4% 두께 수축을 나타냈다. 프리에 변환 적외선 분광분석결과, 전구체내의 탄소는 Spin-on dielectric (SOD) 박막으로 하여금 Si-O 결합형성을 적게, 박막특성을 불균일하게, 그리고 화학 용액에 더 빨리 식각되도록 만들었다.

딥러닝 기반 음향 신호 대역 확장 시스템 (Deep Learning based Raw Audio Signal Bandwidth Extension System)

  • 김윤수;석종원
    • 전기전자학회논문지
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    • 제24권4호
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    • pp.1122-1128
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    • 2020
  • 대역 확장(Bandwidth Extension)이란 채널 용량 부족 혹은 이동통신 기기에 탑재된 코덱의 특성으로 인해 부호화 및 복호화 과정에서 대역 제한(band limited)되거나 손상된 협대역 신호(NB, Narrow Band)를 복원, 확장하여 광대역 신호(WB, Wide Band)로 전환 시켜주는 것을 의미한다. 대역 확장 연구는 주로 음성 신호 위주로 대역 복제(SBR, Spectral Band Replication), IGF(Intelligent Gap Filling)과 같이 고대역을 주파수 영역으로 변환하여 복잡한 특징 추출 과정을 거쳐 이를 바탕으로 사라지거나 손상된 고대역을 복원한다. 본 논문에서는 딥러닝 모델 중 오토인코더(Autoencoder)를 바탕으로 1차원 합성곱 신경망(CNN, Convolutional Neural Network)들의 잔차 연결을 활용하여 복잡한 사전 전처리 과정 없이 일정한 길이의 시간 영역 신호를 입력시켜 대역 확장 시킨 음향 신호를 출력하는 모델을 제안한다. 또한 음성 영역에 제한되지 않는 음악을 포함한 여러 종류의 음원을 포함하는 데이터셋에 훈련시켜도 손상된 고대역을 복원할 수 있음을 확인하였다.

In0.27Ga0.73N/GaN 다중 양자우물 구조에 대한 광전기적 특성 (Optoelectronics Properties of In0.27Ga0.73N/GaN Multi-Quantum-Well Structure)

  • 박헌보;배인호;김기홍
    • 한국재료학회지
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    • 제17권9호
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    • pp.489-492
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    • 2007
  • Temperature and injection current dependence of elctroluminescence(EL) spectral intensity of the $In_{0.27}Ga_{0.73}N/GaN$ multi-quantum-well(MQW) have been studied over a wide temperature and as a function of injection current level. EL peaks also show significant broadening into higher photon energy region with the increase of injection current. This is explained by the band-filling effect. When temperature is slightly increased to 300 from 15 K, the EL emission peak showed red-blue-red shift. It can be explained by the carrier localization by potential fluctuation of multiple quantum well and band-gap shrinkage as temperature increase. It is found that a temperature-dependent variation pattern of the EL efficiency under very low and high injection currents show a drastic difference. This unique EL efficiency variation pattern with temperature and current is explained field effects due to the driving forward bias in presence of internal(piezo and spontaneous polarization) fields.

워터블록 내부형상에 따른 수냉식 전자부품 냉각장치 성능변화에 관한 실험적 연구 (Experimental Study on the Performance of an Electric Component Liquid Cooling System with Variation of the Waterblock Internal Shape)

  • 함형창;박창용
    • 설비공학논문집
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    • 제25권6호
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    • pp.331-337
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    • 2013
  • An experimental study on the performance of a liquid electric component cooling system was performed. The thermal resistance and pressure drop at a heat sink were measured, for aluminum waterblocks with four different internal shapes, with either smooth surface, porous media filling, or with fins of 5 mm height, or of 7 mm height. The fins had 0.5 mm thickness, and the gap between the fins was 0.5 mm. The waterblock internal dimension was $36.5{\times}36.5{\times}7mm$. Compared with the waterblock with smooth surface, the thermal resistance reduction was 11%, 46%, and 42% for waterblocks with porous media filling, 5 mm, and 7 mm fins, respectively. A new dimensionless parameter was suggested to evaluate the waterblock performance, with the simultaneous consideration of thermal resistance and pressure drop. The performance of the waterblock with fins of 5 mm height was best by parameter.

Change of Percolation Threshold in Carbon Powder-Filled Polystyrene Matrix Composites

  • Shin, Soon-Gi
    • 한국재료학회지
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    • 제25권3호
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    • pp.119-124
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    • 2015
  • This paper investigates the change of the percolation threshold in the carbon powder-filled polystyrene matrix composites based on the experimental results of changes in the resistivity and relative permittivity of the carbon powder filling, the electric field dependence of the current, and the critical exponent of conductivity. In this research, the percolation behavior, the critical exponent of resistivity, and electrical conduction mechanism of the carbon powder-filled polystyrene matrix composites are discussed based on a study of the overall change in the resistivity. It was found that the formation of infinite clusters is interrupted by a tunneling gap in the volume fraction of the carbon powder filling, where the change in the resistivity is extremely large. In addition, it was found that the critical exponent of conductivity for the universal law of conductivity is satisfied if the percolation threshold is estimated at the volume fraction of carbon powder where non-ohmic current behavior becomes ohmic. It was considered that the mechanism for changing the gaps between the carbon powder aggregates into ohmic contacts is identical to that of the connecting conducting phases above the percolation threshold in a random resister network system. The electric field dependence is discussed with a tunneling mechanism. It is concluded that the percolation threshold should be defined at this volume fraction (the second transition of resistivity for the carbon powder-filled polystyrene matrix composites) of carbon powder.

Laboratory experiments on the improvement of rockfill materials with composite grout

  • Wang, Tao;Liu, Sihong;Lu, Yang
    • Geomechanics and Engineering
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    • 제17권3호
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    • pp.307-316
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    • 2019
  • Dam deformation should be strictly controlled for the construction of 300 m-high rockfill dams, so the rockfill materials need to have low porosity. A method of using composite grout is proposed to reduce the porosity of rockfill materials for the construction of high rockfill dams. The composite grout is a mixture of fly ash, cement and sand with the properties of easy flow and post-hardening. During the process of rolling compaction, the grout admixture sprinkled on the rockfill surface will gradually infiltrate into the inter-granular voids of rockfill by the exciting force of vibratory roller to reduce the porosity of rockfill. A visible flowing test was firstly designed to explore the flow characteristics of composite grout in porous media. Then, the compressibility, shear strength, permeability and suffusion susceptibility properties of composite grout-modified rockfill are studied by a series of laboratory tests. Experimental results show that the flow characteristics of composite grout are closely related to the fly ash content, the water-to-binder ratio, the maximum sand size and the content of composite grout. The filling of composite grout can effectively reduce the porosity of rockfill materials, as well as increase the compression modulus of rockfill materials, especially for loose and gap-graded rockfill materials. Composite grout-modified rockfill tends to have greater shear strength, larger suffusion erosion resistance, and smaller permeability coefficient. The composite grout mainly plays the roles of filling, lubrication and cementation in rockfill materials.

DNN-based LTE Signal Propagation Modelling for Positioning Fingerprint DB Generation

  • Kwon, Jae Uk;Cho, Seong Yun
    • Journal of Positioning, Navigation, and Timing
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    • 제10권1호
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    • pp.55-66
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    • 2021
  • In this paper, we propose a signal propagation modeling technique for generating a positioning fingerprint DB based on Long Term Evolution (LTE) signals. When a DB is created based on the location-based signal information collected in an urban area, gaps in the DB due to uncollected areas occur. The spatial interpolation method for filling the gaps has limitations. In addition, the existing gap filling technique through signal propagation modeling does not reflect the signal attenuation characteristics according to directions occurring in urban areas by considering only the signal attenuation characteristics according to distance. To solve this problem, this paper proposes a Deep Neural Network (DNN)-based signal propagation functionalization technique that considers distance and direction together. To verify the performance of this technique, an experiment was conducted in Seocho-gu, Seoul. Based on the acquired signals, signal propagation characteristics were modeled for each method, and Root Mean Squared Errors (RMSE) was calculated using the verification data to perform comparative analysis. As a result, it was shown that the proposed technique is improved by about 4.284 dBm compared to the existing signal propagation model. Through this, it can be confirmed that the DNN-based signal propagation model proposed in this paper is excellent in performance, and it is expected that the positioning performance will be improved based on the fingerprint DB generated through it.

Modelling headed stud shear connectors of steel-concrete pushout tests with PCHCS and concrete topping

  • Lucas Mognon Santiago Prates;Felipe Piana Vendramell Ferreira;Alexandre Rossi;Carlos Humberto Martins
    • Steel and Composite Structures
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    • 제46권4호
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    • pp.451-469
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    • 2023
  • The use of precast hollow-core slabs (PCHCS) in civil construction has been increasing due to the speed of execution and reduction in the weight of flooring systems. However, in the literature there are no studies that present a finite element model (FEM) to predict the load-slip relationship behavior of pushout tests, considering headed stud shear connector and PCHCS placed at the upper flange of the downstand steel profile. Thus, the present paper aims to develop a FEM, which is based on tests to fill this gap. For this task, geometrical non-linear analyses are carried out in the ABAQUS software. The FEM is calibrated by sensitivity analyses, considering different types of analysis, the friction coefficient at the steel-concrete interface, as well as the constitutive model of the headed stud shear connector. Subsequently, a parametric study is performed to assess the influence of the number of connector lines, type of filling and height of the PCHCS. The results are compared with analytical models that predict the headed stud resistance. In total, 158 finite element models are processed. It was concluded that the dynamic implicit analysis (quasi-static) showed better convergence of the equilibrium trajectory when compared to the static analysis, such as arc-length method. The friction coefficient value of 0.5 was indicated to predict the load-slip relationship behavior of all models investigated. The headed stud shear connector rupture was verified for the constitutive model capable of representing the fracture in the stress-strain relationship. Regarding the number of connector lines, there was an average increase of 108% in the resistance of the structure for models with two lines of connectors compared to the use of only one. The type of filling of the hollow core slab that presented the best results was the partial filling. Finally, the greater the height of the PCHCS, the greater the resistance of the headed stud.

CISG 제78조(연체이자(延滯利子) 청구권(請求權))에 대한 고찰(考察) (A Study on Article 78 CISG: Interest on Sums in Arrears)

  • 김태경
    • 무역상무연구
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    • 제31권
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    • pp.3-25
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    • 2006
  • This study focus on interest for arrears and filling of the gaps left in Article 78 of CISG. In the case of CISG, Article 78 provides for interest any time a payment under a contract is untimely, but does not specify a particular rate of interest or a method to determine such a rate. This issue did not cause any uncertainty under ULIS, the CISG's antecedent, since Article 83 of ULIS provided for 1%p above the official discount rate in the creditor's country. Lacking any CISG general principle as well as any indication by the very same CISG, one can only conclude that the matter must be deferred to the domestic rule of private international law. Actually, resorting to private international law is not only admissible, but expressly required by Article 7(2). In the interpretation and filling of the gaps left in Article 78, there is a considerable difference of opinion especially amongst commentators on whether the gap is a lacuna praeter legem, i.e., one being governed by, but not expressly settled in the CISG, or whether it is an issue falling outside the scope of application of the CISG, i.e. a lacuna intra legem. The protagonists of the former view lay emphasis on the overall objective of the CISG, namely to create a uniform law, whereas the supporters of the latter view refer to the legislative history of Article 78 as the dominant principle in interpreting Article 78. Some authors believe that the issue of determining the rate of interest is not dealt with by CISG and it is, therefore, governed by the applicable domestic law, which is the subsidiary law applicable to the sales contract, since "no special connecting points seem to have developed for the entitlement to interest." In the light of the relevant case law, it seems correct to conclude that the interest rate is not determined by CISG and that courts normally determine it according to their own rules of private international law. While CISG Article 78 expressly does not deal with this issue, PICC Article 7.4.9 and PECL Article 9.508, on the other hand, set forth a precise method for computing interest. Although a method like the one set by PICC may be useful and may encourage uniformity, it still cannot be used under the CISG. The PICC or PECL formula may, however, be a very good starting point in a de jure condendum analysis when a new Article 78 will be drafted, if an interest rate method will ever be embodied in the text of an international convention.

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