• 한국진공학회지
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• 제7권3호
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• pp.167-272
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• 1998

ECR plasma CVD를 이용한 SiOF박막은 낮은 유전상수를 가지고 있으며, 기존의 공정과의 정합성이 우수해 다층배선 공정에 채용이 유망한 재료이지만 수분의 흡수로 인한 유전율의 상승과 후속공정의 안정성이 문제점으로 부각되고 있다. 따라서 본 연구에서는 SiOF박막의 내흡습성과 후속공정에서의 안정성을 향상시키기 위하여 SiOF박막을 증착한 후 후속 산소 플라즈마 처리를 행하였다. SiOF박막은 산소 플라즈마 처리를 수행함으로써 SiOF박막의 밀도가 증가하고, 수분과의 친화력이 강한 Si-F 결합이 감소하는 것이 주요한 원인으로 사료된다. 하지만 플라즈마 처리 시간이 5분 이상으로 증가하면 유전율의 증가가 일어난다. 따라서 본 실험에서는 산소 플라즈마 처리조건이 마이크로파 전력이 700W, 공정 압력이 3mTorr, 기판온도가 $300^{\circ}C$일 경우 플라즈마 처리시간은 3분이 적당한 것으로 생각 된다.

• 한국대기환경학회지
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• 제17권2호
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• pp.213-222
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• 2001

Cylindrical type ceramic filers, that is 60 O.D$\times$10t$\times$600L and 60 O.D$\times$10t$\times$1,000L were manufactured by vacuum forming processes using ceramic ray materials. For cylindrical type ceramic filters, porosity and bulk density were measured for, 80 to 90% and 0.3 to 0.4 g/㎤, respectively at uniform pore size of 41 to 45${\mu}{\textrm}{m}$. Bench scale candle filters (60$\psi$ $\times$10t$\times$600L) were tested using different dusts collected from many industries including chemical processing, glass processing and metal manufacturing pants. Collection efficiencies found out to range from 99.87% to 99.90%, while resistance coefficients from 1.1$\times$10(sup)11/$m^2$ to 1.7$\times$10(sup)11/$m^2$ . Full scale low density ceramic filters (60$\psi$ $\times$10t$\times$1,000L) were also tested at 1 atm, $600^{\circ}C$ to reveal the filtration efficiency, conditioning, and resistance coefficients using two different types of dust as chemical processing and metal refined processing. Darcys law resistance coefficients were measured to range 1.44$\times$10(sup)11/$m^2$ to 2.74$\times$10(sup)11/$m^2$, and collection efficiencies on the range 99.84 to 99.96%, Finally, results of long term performance test showed that filters were conditioned after 170hrs. Experimental conditions for effective filtration were examined under the condition 10 cm/sec face velocity, 3kg/$\textrm{cm}^2$ pulsing pressure, 5 min filtration cycle, and 300msec pulse opening time.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2001년도 춘계학술발표회 초록집
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• pp.14-14
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• 2001

Nitride films such as TiN, CrN etc. deposited on glass by PVD processes have been developed for many industrial applications. These nitride films deposited on glass were widely used for not only decorative and optical coatings but also wear and corrosion resistance coatings employed as dies and molds made of glass for the example of lens forming molds. However, the major problem of nitride coatings on glass by PVD process is non-uniform film owing to pin-hole and micro crack. It is estimated that nonuniform coating is influenced by a different surface energy between metal nitrides and glass due to binding states. In this work, therefore, for the evaluation of nucleation and growth mechanism of nitride films on glass TiN and CrN film were synthesized on glass with various nitrogen partial pressure by unbalanced magnetron sputtering. Prior to deposition, for the examination of relationship between surface energy and film microstructure plasma pre-treatment process was carried out with various argon to hydrogen flow rate and substrate bias voltage, duty cycle and frequency by using pulsed DC power supply. Surface energy owing to the different plasma pre-treatment was calculated by the measurement of wetting angle and surface conditions of glass were investigated by X-ray Photoelectron Spectroscopy(XPS) and Atomic Force Microscope(AFM). The microstructure change of nitride films on glass with increase of film thickness were analyzed by X-Ray Diffraction(XRD) and Scanning Electron Microscopy(SEM).

• 천문학회보
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• 제41권2호
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• pp.54.1-54.1
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• 2016

Stellar wind and radiation pressure from massive stars can trigger the formation of new generation of stars. The sequential age distribution of stars, the morphology of cometary globules, and bright-rimmed clouds have been accepted as evidence of triggered star formation. However, these characteristics do not necessarily suggest that new generation of stars are formed by the feedback of massive stars. In order to search for any physical connection between star forming events, we have initiated a study of gas and stellar kinematics in NGC 1893, where two prominent cometary nebulae are facing toward O-type stars. The spectra of gas and stars in optical and near-infrared (NIR) wavelength are obtained with Hectochelle on the 6.5m MMT and Immersion GRating INfrared Spectrograph on the 2.7m Harlan J. Smith Telescope at McDonald observatory. In this study, the radial velocity field of gas across the cluster is investigated using $H{\alpha}$ and [N II] ${\lambda}$ 6584 emission lines, and that of the cometary nebula Sim 130 is also probed using 1-0 S(1) transition line of $H_2$. We report a distinctive velocity field of the cometary nebulae and many ro-vibrational transitions of $H_2$ even at high energy levels in the NIR spectra. These properties indicate the interaction between the cometary nebulae and O-type stars, and this fact can be a clue to triggered star formation in NGC 1893.

• Transactions on Electrical and Electronic Materials
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• 제4권2호
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• pp.29-34
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• 2003

Ferroelectric YMnO$_3$ thin films were etched with Ar/C1$_2$ and CF$_4$/C1$_2$ Plasma. The maximum etch rate of YMnO$_3$ thin film was 300 $\AA$/min at a Cl$_2$/Ar gas mixing ratio of 8/2, an RF power of 800 W, a do bias of-200 V, a chamber pressure of 15 mTorr, and a substrate temperature of 3$0^{\circ}C$. From the X-ray photoelectron spectroscopy (XPS) analysis, yttrium was not only etched by chemical reactions with Cl atoms, but also assisted by Ar ion bombardments in Ar/C1$_2$ plasma. In CF$_4$/C1$_2$ plasma, yttrium formed nonvolatile YF$_{x}$ compounds and remained on and the etched surface of YMnO$_3$. Manganese etched effectively by forming volatile MnCl$_{x}$ and MnF$_{y}$. From the X-ray diffraction (XRD) analysis, the (0004) diffraction peak intensity of the YMnO$_3$ thin film etched in Ar/Cl$_2$ plasma shows lower than that in CF$_4$/Cl$_2$ plasma. It indicates that the crystallinty of the YMnO$_3$ thin film is more easily damaged by the Af ion bombardment than the changes of stoichiometry due to nonvolatile etch by-products.cts.s.

• 한국융합학회논문지
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• 제9권6호
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• pp.147-154
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• 2018

본 연구는 문학치료의 입장에서 조지훈의 시에 나타나는 전이적 작용을 통해 부호화되는 치유의 구조를 밝혀 문학치료에 활용하고자 하는 것이다. 특히 감정의 코드가 신경생리학적으로 시냅스 되기 위해 어떠한 과정을 거치며 활성화 되는지에 대한 탐색으로 진행되었다. 조지훈의 시에 전개되는 감정 코드들의 변이는 문학치료의 부호화와 맞닿아 있다. 시적 진술을 통해 배출하는 감정은 새로운 감정의 전이를 불러 일으켜 치유의 감정을 활성화시킨다. 조지훈의 시는 여러 시적 전이의 부유물들을 통해 감정을 융합한다. 그러면서 총체적인 치유의 숲을 형성하는 것이다. 그 치유의 콘텐츠는 전이의 구조에 의해 논의되는데 그 구조들은 모두 치유의 콘텐츠로 연결되어 있음을 알 수 있다. 그것은 하강과 상승의 작용에 의한 한의 서정과 잎새들로 우거지는 초록의 미학이 그 주를 이룬다. 앞으로 조지훈의 시에 대한 연구가 활성화된다면, 우리는 친자연적이며 문학치유적인 그의 삶에 대한 진솔한 이야기들을 만날 수 있을 것으로 사료된다.

• 구강회복응용과학지
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• 제34권3호
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• pp.239-245
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• 2018

만약 혀 절제술로 인해 식괴의 형성 및 이동에 장애가 생기는 경우, 식괴가 기도를 막거나 기도로 흡인되는 연하장애가 발생할 수 있으며, 이런 경우에 구개 증대 보철물은 도움이 될 수 있다. 구강암으로 인해 부분 혀 절제술을 받은 후 음식물을 삼키기 어렵다는 주소로 내원한 환자에게 혀의 기능 운동을 인기한 상악의 연마면 인상채득을 통해 구개 증대 보철개념을 활용한 상악 총의치를 제작하여, 구개-혀 접촉 압력을 증가시켜서 연하 및 발음에 양호한 결과를 얻을 수 있었다.

• 대기
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• 제24권1호
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• pp.1-15
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• 2014

This study compared ensemble mean and probability forecasts of snow depth amount associated with winter storm over South Korea on 28 December 2012 at five operational forecast centers (CMA, ECMWF, NCEP, KMA, and UMKO). And cause of difference in predicted snow depth at each Ensemble Prediction System (EPS) was investigated by using THe Observing system Research and Predictability EXperiment (THORPEX) Interactive Grand Global Ensemble (TIGGE) data. This snowfall event occurred due to low pressure passing through South Sea of Korea. Amount of 6 hr accumulated snow depth was more than 10 cm over southern region of South Korea In this case study, ECMWF showed best prediction skill for the spatio-temporal distribution of snow depth. At first, ECMWF EPS has been consistently enhancing the indications present in ensemble mean snow depth forecasts from 7-day lead time. Secondly, its ensemble probabilities in excess of 2~5 cm/6 hour have been coincided with observation frequencies. And this snowfall case could be predicted from 5-day lead time by using 10-day lag ensemble mean 6 hr accumulated snow depth distribution. In addition, the cause of good performances at ECMWF EPS in predicted snow depth amounts was due to outstanding prediction ability of forming inversion layer with below $0^{\circ}C$ temperature in low level (below 850 hPa) according to $35^{\circ}N$ at 1-day lead time.

• 한국환경복원기술학회지
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• 제21권5호
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• pp.17-28
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• 2018

Cyclonic-dissolved air flotation(Cyclonic-DAF), an advanced form of pressure flotation, applies a structure that enables the forming of twirling flows. This in turn allows for suspended matter to adhere to microbubbles and float to the surface of a treatment tank during the process of intake water flowing through a float separation tank. This study conducted a lab-scale test and pursued geometrical modeling using computational fluid dynamics(CFD) to establish a pilot scale design. Based on the design parameters found through the above process, a pilot cyclonic-DAF system($10m^3/hr$) for removing algae was created. Upon developing the pilot-scale cyclonic-DAF system, a type of algae coagulant(R-119) was applied as the coagulant to the system for field testing through which the removal rates of chlorophyll-a and cyanobacteria were evaluated. The chlorophyll-a and harmful cyanobacteria of the raw water at region B, the field-test site, were found to be $177.9mg/m^3$ and 652,500cells/mL respectively. Treated waters applied with 60mg/L and 100mg/L of algae coagulant presented removal efficiencies of approximately 95% and 97%, respectively. The cyanobacteria cell number of the treated waters applied with 60mg/L and 100mg/L of algae coagulant both that were equal to or less than 1,000cells/mL and were below attention level criteria for the issuance of algae boundary.

• 한국세라믹학회지
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• 제41권3호
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• pp.229-234
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• 2004

수계슬러리의 동결건조 공정을 이용하여 배향성 기공을 갖는 NiO-YSZ 지지체를 제조하였다. 슬러리의 동결과정에서 형성된 얼음 결정은 진공건조 과정을 거치면서 승화되어 그 자리에 기공을 형성하였으며. 열전달 방향과 속도를 조절함으로써 얼음결정의 성장을 제어할 수 있음을 알 수 있었다. 제조된 NiO-YSZ 지지체는 배향성을 가진 거대(macro) 기공과 함께 표면에는 미세기공이 존재하는 독특한 기공구조를 형성하였다. 이것은 동결과정에 있어서 성형체의 위치에 따라 얼음의 성장속도가 다르기 때문에 발생하는 현상으로 생각된다. 얻어진 다공체 표면에 YSZ 슬러리를 dip 코팅하여 막을 형성한 후 140$0^{\circ}C$에서 동시소성(co-firing)하여 다공성 NiO-YSZ 지지체의 표면에 치밀한 YSZ 막이 코팅된 bilayer 제조에 성공하였다.