• 제목/요약/키워드: ferroelectric material

검색결과 472건 처리시간 0.025초

Pt 코팅된 Si 기판에 제조한 KLN 박막의 구조적 특성 (Structural Properties of KLN Thin Film Deposited on Pt Coated Si Substrate)

  • 박성근;이기직;백민수;전병억;김진수;남기홍
    • 한국전기전자재료학회논문지
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    • 제14권5호
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    • pp.410-416
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    • 2001
  • KLN thin films were fabricated on Pt coated Si(100) wafer using an rf-magnetron sputtering method. The grown KLN thin film consists of 4-fold grains. In this experiment, the structure of 4-fold grained thin film was investigated using XRD and SEM measurements. Pt layer was also deposited using the rf-magnetron sputtering method,. XRD measurement showed that he Pt thin film has Gaussian distribution form with strong (111) direction orientation. The KLN thin film has preferred-orientation of (001) direction, and the peak consists of 2 separate peaks; one with broad FWHM and the other with narrow FWHM. The sharp peak is due to single crystal, and combining with Em results, the 4-fold grain consists of singel crystals with c-axis normal to substrate.

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Pb(Sn1/2Sb1/2)O3-PZT계 세라믹스의 초전특성 (Pyroelectric Properties on Pb(Sn1/2Sb1/2)O3 Modified PZT Ceramics)

  • 정형진;손정호;윤상옥;김현재
    • 한국세라믹학회지
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    • 제26권6호
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    • pp.755-762
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    • 1989
  • A pyroelectric ceramic material based on Pb(Sn1/2Sb1/2)O3 modified PZT system is studied as a function of the amount of Pb(Sn1/2Sb1/2)O3 and PbTiO3. With increasing the Pb(Sn1/2Sb1/2)O3 amount the dielectric constant increases up to 10mol% and then decreases, but the pyroelectric coefficient decreases and as the PbTiO3 contents increase in the 10mol% added PZT system, the dielectric constant increases but the infrared sensitivity decreases. The good pyroelectric material has low dielectric constant and no pyrochlore phase, but does not depend in the amount of remanent dipole, and its composition sites around ferroelectric-to-antiferroelectric phase boundary.

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Eu 첨가에 따른 PZT 박막의 유전 특성 (Dielectric properties of Eu-doped PZT thin films)

  • 손영훈;김경태;김창일;장의구;이병기
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2002년도 추계학술대회 논문집 Vol.15
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    • pp.155-158
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    • 2002
  • Eu-doped lead zirconium titanate $Pb_{1.1}(Zr_{0.3}Ti_{0.7})O_{3}$ thin films on the Pt/Ti/$SiO_2$/Si substrates prepared by a metalorganic decomposition (MOD) method. The effect on the structural and electrical properties of the films measured according to Eu content. Eu-doping altered significantly the dielectric and ferroelectric properties. The remanent polarization and coercive field decreased with increasing the concentration of Eu content. The dielectric constant and dielectric loss of the film decreased with increasing Eu contents. The 3 mol% of Eu-doped PZT thin film showed large remanent polarization and the fatigue characteristic of the film did not change up to $10^9$ switching cycles.

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스퍼터링 및 후 열처리 조건변화에 따른 SBN 강유전체 박막의 배향성에 관한 연구 (Effect of Sputtering and Post-Annealing Condition on The Orientation of SBN Thin Films)

  • 이채종;이희영
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2006년도 영호남 합동 학술대회 및 춘계학술대회 논문집 센서 박막 기술교육
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    • pp.133-135
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    • 2006
  • SBN60 and SBN60/30 thin films were deposited by ion beam sputtering technique. Using the ceramic target of the same composition and Pt(100)/$TiO_2$/$SiO_2$/Si or Pt(111)/Ti/$SiO_2$/Si substrate, crystallization and orientation behavior as well as electric properties of the films were examined, Thickness was controlled to $3000{\AA}$ and the films were heat-treated at $650^{\circ}C{\sim}800^{\circ}C$. The orientation and crystallization behavior were observed which showed the dependence on processing condition($O_2$/Ar ratio, substrate temp, annealing temp...).

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다층 구조에 의한 $(Ba_{0.7}\;Sr_{0.3})TiO_3$의 물리적 특성 (The properties of $(Ba_{0.7}\;Sr_{0.3})TiO_3$ by Multilayer structure)

  • 홍경진;조재철
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2006년도 영호남 합동 학술대회 및 춘계학술대회 논문집 센서 박막 기술교육
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    • pp.31-34
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    • 2006
  • In this study, $(Ba_{0.7}\;Sr_{0.3})TiO_3$ was coated on Pt/Ti/$SiO_2$/Si wafer by using Sol-Gel method. Coating process was repeated 3~5 times and then sintered at 750[$^{\circ}C$] for 1 hour. Each specimen was analyzed structure and electrical characteristics. In structure characteristics, EDX analyzed the samples ratio of the formation on the structural property. Thermal behavior was observed with TG-DTA and concluded that the heat-treatment of the samples was degreed 750[$^{\circ}C$]. Surface and section of thin films were observed with SEM.

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MFSFET의 신경회로망 응용을 위한 CUJT와 PUT 소자를 이용한 발진 회로에 관한 연구 (Study on Oscillation Circuit Using CUJT and PUT Device for Application of MFSFET′s Neural Network)

  • 강이구;장원준;장석민;성만영
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1998년도 춘계학술대회 논문집
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    • pp.55-58
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    • 1998
  • Recently, neural networks with self-adaptability like human brain have attracted much attention. It is desirable for the neuron-function to be implemented by exclusive hardware system on account of huge quantity in calculation. We have proposed a novel neuro-device composed of a MFSFET(ferroelectric gate FET) and oscillation circuit with CUJT(complimentary unijuction transistor) and PUT(programmable unijuction transistor). However, it is difficult to preserve ferroelectricity on Si due to existence of interfacial traps and/or interdiffusion of the constitutent elements, although there are a few reports on good MFS devices. In this paper, we have simulated CUJT and PUT devices instead of fabricating them and composed oscillation circuit. Finally, we have resented, as an approach to the MFSFET neuron circuit, adaptive learning function and characterized the elementary operation properties of the pulse oscillation circuit.

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PZT(10/90)/(90/10)이종층 박막의 강유전특성에 관한 연구 (A study on the Ferroelectric Properties of PZT(10/90)/(90/10) Heterolayered Thin Films)

  • 김경태;박인길;이성갑;이영희
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1999년도 춘계학술대회 논문집
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    • pp.109-112
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    • 1999
  • The PZT(10/90)/(90/17) heterolayered thin films were fabricated by the spin-coaling on the Pt/Ti/SiO$_2$/Si substrate using the PZT(10/90) and PZT(70/10) metal alkoxide solutions. The effect of heterolayered thin films on the ferroelectrics and electrical properties have been investigated. The lower PZT layers provided the nucleation site for the formation of a perovskite phase of the upper PZT films. Dielectric constant increased with increasing the number of coatings, and it was about 569.9 at PZT-6 heterolayered films.

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$BaMgF_4$ 박막을 이용한 MFS 디바이스의 열처리 의존성 (Thermal treatment dependences of MFS devices in $BaMgF_4$ thin films on silicon structures)

  • 김채규;정순원;이상우;김광호
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1998년도 춘계학술대회 논문집
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    • pp.59-62
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    • 1998
  • Thermal treatment dependences of MFS devices in $BaMgF_4$ on Si structures have been investigated. $BaMgF_4$ thin films have been directly deposited on the p-Si(100) wafers at a low temperature of $300^{\circ}$ in an ultra high vacuum(UHV) system. After in-situ post-deposition annealing was conducted for 20 s at $650^{\circ}$, bias and temperature were applied to $BaMgF_4/Si$ structures. Although X-ray diffraction analysis showed that the films were polycrystalline in nature before and after bias temperature, the C-V properties were some different between with and without bias-temperature treatment.

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고집적 DRAM소자용 14/50/50 PLZT 박막의 특성에 관한 연구 (A Study on Characteristic of the 14/50/50 PLZT Thin Film for DRAM Capacitor)

  • 박용범;장낙원;백동수;마석범;최형욱;박창엽
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1999년도 춘계학술대회 논문집
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    • pp.118-121
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    • 1999
  • PLZT thin films were fabricated with different energy density by pulsed laser deposition. PLZT films deposited on Pt/Ti/SiO$_2$/Sr substrate. This PLZT thin films of 5000$\AA$ thickness were crystallized at $600^{\circ}C$, 200mTorr $O_2$ pressure for 2 J/$\textrm{cm}^2$ laser energy density. 14/50/50 PLZT thin film showed a maximum dielectric constant value of $\varepsilon$$_{r}$=1289.9 P-E hysteresis loop of 14/ 50/50 PLZT thin film was slim ferroelectric. Leakage current density of 14/50/50 PLZT thin film was 10/ sup -7/=A/$\textrm{cm}^2$.>.

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$BiFeO_3-PrFeO_3-PbTiO_3$계의 강자성-강유전 특성 (Ferroelectric and ferromagnetic properties of $BiFeO_3-PrFeO_3-PbTiO_3$ solid solutions)

  • Kim, Jeong-Seog;Cheon, Chae-Il;Park, Yong-Nam;Jang, Pyung-Woo
    • 한국자기학회:학술대회 개요집
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    • 한국자기학회 2002년도 동계연구발표회 논문개요집
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    • pp.40-41
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    • 2002
  • Synthesis of the ferroelectromagnetic material exhibiting ferromagnetism and ferroelectricity simultaneously has been an interesting subject due to not only for a possible application in electronic devices but also from the view point of solid state physics. In this study bulk ceramics and thin films of xBiFeO$_3$-yPrFeO$_3$-zPbTiO$_3$(x+y+z=1) and (1-w)BiFeO$_3$-wPbTiO$_3$ have been explored for finding ferroelectromagnetic material, in which ferroelectricity and ferromagnetism coexist simultaneously. (omitted)

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