Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
권호 표지

A study on the Ferroelectric Properties of PZT(10/90)/(90/10) Heterolayered Thin Films

PZT(10/90)/(90/10)이종층 박막의 강유전특성에 관한 연구

  • 김경태 (광운대학교 전자재료공학과) ;
  • 박인길 (서남대학교 전기전자공학과) ;
  • 이성갑 (신성대학 전자과) ;
  • 이영희 (광운대학교 전자재료공학과)
  • Published : 1999.05.01
Download PDF
⟨ Previous Next ⟩

Abstract

The PZT(10/90)/(90/17) heterolayered thin films were fabricated by the spin-coaling on the Pt/Ti/SiO$_2$/Si substrate using the PZT(10/90) and PZT(70/10) metal alkoxide solutions. The effect of heterolayered thin films on the ferroelectrics and electrical properties have been investigated. The lower PZT layers provided the nucleation site for the formation of a perovskite phase of the upper PZT films. Dielectric constant increased with increasing the number of coatings, and it was about 569.9 at PZT-6 heterolayered films.

Keywords