Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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The properties of $(Ba_{0.7}\;Sr_{0.3})TiO_3$ by Multilayer structure

다층 구조에 의한 $(Ba_{0.7}\;Sr_{0.3})TiO_3$의 물리적 특성

  • 홍경진 (광주대학교 컴퓨터전자통신공학부) ;
  • 조재철 (초당대학교 전자공학과)
  • Published : 2006.05.19
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Abstract

In this study, $(Ba_{0.7}\;Sr_{0.3})TiO_3$ was coated on Pt/Ti/$SiO_2$/Si wafer by using Sol-Gel method. Coating process was repeated 3~5 times and then sintered at 750[$^{\circ}C$] for 1 hour. Each specimen was analyzed structure and electrical characteristics. In structure characteristics, EDX analyzed the samples ratio of the formation on the structural property. Thermal behavior was observed with TG-DTA and concluded that the heat-treatment of the samples was degreed 750[$^{\circ}C$]. Surface and section of thin films were observed with SEM.

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