• 센서학회지
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• 제26권6호
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• pp.397-401
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• 2017

A DC resistance type humidity sensor using conductive carbon ink was fabricated and its performance was evaluated. The humidity sensor was fabricated using a screen printing technique and have a structure that does not require additional metal electrodes to measure resistance change. To evaluate the performance of the humidity sensor, we measured the DC resistance change under various relative humidity levels. The fabricated humidity sensor showed a resistance change of about $2.5{\sim}50k{\Omega}$ in 11 ~ 95% RH environment. It also shows a linear relationship in the relative humidity versus log DC resistance graph. In comparison with commercial humidity sensor under real environment, it can be confirmed that the resistance of the humidity sensor changes to almost the same level as the measured humidity. These results show that the resistance type humidity sensor can be operated stably in actual environment.

• 한국정밀공학회지
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• 제19권3호
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• pp.80-87
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• 2002

Tungsten carbide microshaft is used as micro-punch, electrode of MEDM (micro-electro-discharge machining), and micro-tool because it has high hardness and high rigidity. In this study, the tungsten carbide microshaft was fabricated using electrochemical machining. Concentration of material removal at the sharp edge and metal corrosion layer affect the shape of the microshaft. Control of microshaft shape was possib1e through conditioning the machining voltage and electrolyte concentration. By applying periodic voltage, material removal rate increased and surface roughness improved. The fabricated microshaft in $H_2 SO_4$ electrolyte maintained sharper end edge and better surface finish than those fabricated by other electrolytes.

• 한국초전도학회:학술대회논문집
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• 한국초전도학회 2000년도 High Temperature Superconductivity Vol.X
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• pp.140-140
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• 2000

The effects of partial pressures of various gases on the qualities of coated conductors are studied, where the long samples were fabricated in a vacuum of a large physical vapour deposition system. The various gases such as $0_25,$H_2$,H_20$,$C_n H_m$, and CO come out from the large heating system and gives somewhat complicated effects on the interfacial chemistry at CeO/Ni which Is Important for the epitaxial growth of the film. The results of XRD measurements on the films fabricated in the controlled partial pressures of thoes gases will be presented.

• 전자공학회논문지A
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• 제32A권12호
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• pp.166-172
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• 1995

A novel passive TE/TM polarization mode converter is fabricated by using poled polymer waveguides. The optic axis of the poling induced waveguide is slowly rotated by using a slowly varying structure of poling electrodes. Thus the polarization conversion is achieved as the guided mode propagates through the waveguide. The proposed device is simulated by a full vectorial beam propagation method (VBPM) for anisotropic medium. For the rotation length of 1 mm, the TE polarization of the guided mode is successfully converted to the TM polarization with negligible loss. Based on the simulation results, we fabricated the polarization converter which is tested by using 1.3 $\mu$m laser diode. TE to TM mode conversion is observed with a polarization extinction ratio higher than 30 dB, and the excess loss is less than 1 dB. The polarization conversion is relatively insensitive to wavelength since the device contains no periodic structures. These devices are easier to fabricate than others containing periodic structures.

• 한국전자파학회:학술대회논문집
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• 한국전자파학회 2003년도 종합학술발표회 논문집 Vol.13 No.1
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• pp.506-510
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• 2003

In this paper, a meander-line chip antenna with stacked layer is suggested, designed and fabricated employing the LTCC(Low Temperature Co-fired Ceramic) fabrication techniques. To reduce the antenna chip size, the meander-line antenna strip is distributed over three layer. Layers one interconnected using via holes. A 2.4 GHz chip antenna with size of $3.75{\times}7.9{\times}1.0 mm^3$ is designed and fabricated using the LTCC technique. Measurements of the fabricated antenna show 160 MHz bandwidth and 3.75 dBi maximum gain. The Measured reflection coefficient and radiation patterns agree well with the prediction by electromagnetic simulation.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1996년도 하계학술대회 논문집 C
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• pp.1977-1979
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• 1996

Single-crystaIline silicon diaphgrams and features are fabricated without using an etch stop process. The process involves vertical dry etching, double-sided alignment, followed by wet-chemical etching from the back side. The abvantages of this process are that $5{\sim}50{\mu}m$ diaphgrams and features can be fabricated accurately and inexpensively. In addition, since no impurity-based process is introduced, highly uniform and homogenous properties can be achieved

• 대한전기학회:학술대회논문집
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• 대한전기학회 1997년도 추계학술대회 논문집 학회본부
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• pp.609-611
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• 1997

Pt thin films flow sensors were fabricated by using aluminum oxide films as medium layer and their characteristics were investigated after annealing at $600^{\circ}C$ for 60min. Aluminum oxide improved adhesion of Pt thin films to $SiO_2$ layer without any chemical reactions to Pt thin films under high annealing temperatures. Output voltages increased as gas flow rate and gas conductivity increased because heat loss of heater, which was integrated with a sensing resistor in the flow sensor, increased. Output voltage of flow sensor fabricated on membrane structure was 101mV at $O_2$ flow rate of 2000sccm, heating power of 0.8W while flow sensor fabricated on Si substrate without membrane had output voltage of 78mV under the same conditions.

• Transactions on Electrical and Electronic Materials
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• 제18권5호
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• pp.250-252
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• 2017

High-performance full swing logic inverters were fabricated using amorphous 1 wt% Si doped indium-zinc-oxide (a-SIZO) thin films with different channel layer thicknesses. In the inverter configuration, the threshold voltage was adjusted by varying the thickness of the channel layer. The depletion mode (D-mode) device used a TFT with a channel layer thickness of 60 nm as it exhibited the most negative threshold voltage (-1.67 V). Inverters using enhancement mode (E-mode) devices were fabricated using TFTs with channel layer thicknesses of 20 or 40 nm with excellent subthreshold slope (S.S). Both the inverters exhibited high voltage gain values of 30.74 and 28.56, respectively at $V_{DD}=15V$. It was confirmed that the voltage gain can be improved by increasing the S.S value.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1996년도 하계학술대회 논문집 C
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• pp.1957-1959
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• 1996

In this paper, a piezoelectric micropump is fabricated and tested. The micropump consists of an actuator and two micronozzles have been made of silicon. It contains a piezoelectric polymer which allows opening and closing of the valves electrically. The actuator and the two micronozzles are fabricated by the anisotropic etch using EPW. Then, the fabricated actuator and the valves are anodically bonded with the pyrex glass which consists of the inlet and the outlet channels. The measured deflection of the piezoelectric polymer is $54\;{\mu}m$ at 1.6 kHz. The maximum pumping flow rate and the backward pressure of the micropump are $22\;{\mu}{{\ell}/min$, 8.7 Pa at 10 Hz, respectively.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1996년도 하계학술대회 논문집 C
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• pp.1495-1497
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• 1996

In this study, Object restoration of ultrasonic transducer fabricated with porous piezoelectric ceramics using Modified SCL(Simple Competitive Learning) neural networks are presented. Using the acquired object data $16{\times}16$ pixels, Modified SCL neural networks using the $16{\times}16$ low resolution image was used for object restoration of $32{\times}32$ high resolution image. The experimental results show that the ultrasonic transducer fabricated with porous piezoelectric ceramics could be applied for sonar system.