Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1997.11a
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- Pages.609-611
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- 1997
The Fabrication of Flow Sensors Using Pt Micro Heater
백금 미세발열체를 이용한 유량센서의 제작
- Noh, Sang-Soo (Division of Electronics and Mechanical Engineering, Dongseo university) ;
- Chung, Gwiy-Sang (Division of Electronics and Mechanical Engineering, Dongseo university)
- Published : 1997.11.29
Abstract
Pt thin films flow sensors were fabricated by using aluminum oxide films as medium layer and their characteristics were investigated after annealing at
Keywords