• Transactions on Electrical and Electronic Materials
• /
• v.14 no.5
• /
• pp.254-257
• /
• 2013

In-situ optical emission spectroscopy (OES) is employed for PECVD chamber monitoring. OES is used as an addon sensor to monitoring and cleaning end point detection (EPD). On monitoring plasma chemistry using OES, the process gas and by-product gas are simultaneously monitored. Principal component analysis (PCA) enhances the capability of end point detection using OES data. Through chamber cleaning monitoring using OES, cleaning time is reduced by 53%, in general. Therefore, the gas usage of fluorine is also reduced, so satisfying Green Fab challenge in semiconductor manufacturing.

• BMB Reports
• /
• v.46 no.1
• /
• pp.53-58
• /
• 2013

We constructed deletion mutants and seven point mutants by polymerase chain reaction to investigate the specificity of feline foamy virus integrase functional domains. Complementation reactions were performed for three enzymatic activities such as 3'-end processing, strand transfer, and disintegration. The complementation reactions with deletion mutants showed several activities for 3'-end processing and strand transfer. The conserved central domain and the combination of the N-terminal or C-terminal domains increased disintegration activity significantly. In the complementation reactions between deletion and point mutants, the combination between D107V and deletion mutants revealed 3'-end processing activities, but the combination with others did not have any activity, including strand transfer activities. Disintegration activity increased evenly, except the combination with glutamic acid 200. These results suggest that an intact central domain mediates enzymatic activities but fails to show these activities in the absence of the N-terminal or C-terminal domains.

• 제어로봇시스템학회:학술대회논문집
• /
• 1990.10b
• /
• pp.890-895
• /
• 1990

A theoretical and experimental study of a single link flexible arm a tip mass is presented for the translational end-point positioning. The problem of shifting the end-point from its initial position to the commanded position by the amount of W $_{d}$ is considered for the open loop control such that the base follows up the given path function. The theoretical results are obtained by applying the method of the Laplace transform to the governing equation, and the solution is calculated by the method of numerical inversion. Experimental results are obtained and compared with the theoretical ones.s.

• Proceedings of the Korean Society of Computer Information Conference
• /
• 2017.01a
• /
• pp.133-134
• /
• 2017

본 논문에서는 APT 공격의 공격 시나리오와 그에 따른 방어 시나리오를 구상하여 기존 방어법의 문제점을 찾고 방어대책을 제시하고 솔루션을 구축하였다. 제안된 방어 프로세스는 기존의 방식과 달리 END-POINT에서 침투에 대해 모니터링을 통하여 APT공격에 대응하는 방식이다. 공격 툴 넷버스, 백오리피스, 서브세븐, 스쿨버스를 이용해서 공격을 시도 한 뒤 본 논문에서 구축한 방어 프로세스를 이용하여 방어 실험을 실시하였다.

• KIEE International Transactions on Electrophysics and Applications
• /
• v.3C no.1
• /
• pp.28-32
• /
• 2003

In this paper, we have studied the in-situ end point detection (EPD) for direct chemical mechanical polishing (CMP) of shallow trench isolation (STI) structures without the reverse moat etch process. In this case, we applied a high selectivity $1n (HSS) that improves the silicon oxide removal rate and maximizes oxide to nitride selectivity Quite reproducible EPD results were obtained, and the wafer-to-wafer thickness variation was significantly reduced compared with the conventional predetermined polishing time method without EPD. Therefore, it is possible to achieve a global planarization without the complicated reverse moat etch process. As a result, the STI-CMP process can be simplified and improved using the new EPD method.

• Transactions of the Korean Society of Mechanical Engineers
• /
• v.18 no.12
• /
• pp.3357-3368
• /
• 1994

Total pressure losses required to calculate the total-to-total efficiency are estimated by integrating empirical loss coefficients of four loss mechanisms along the mean-line of blades as follows; blade profile loss, secondary flow loss, end wall loss and tip clearance loss. The off-design points are obtained on the basis of Howell's off-design performance of a compressor cascade. Also, inlet-outlet air angles and camber angle are obtained from semi-empirical relations of transonic airfoils' minimum loss incidence and deviation angles. And nominal point is replaced by the design point. It is concluded that relatively simple loss models and Howell's off-design data permit us to calculate the off-design performance with satisfactory accuracy. And this method can be easily extended for off-design performance prediction of multi-stage compressors.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2002.10a
• /
• pp.570-575
• /
• 2002

This paper presents a new circular curve fitting approach of articulated manipulators, based on pseudoinverses. The paper aims at gaining the interpolation of circle from n data points, under the condition that the fitted circle should pass both a start point and an end point. In this paper, two algorithms of circular interpolation are presented. Prior to circular interpolation, are a spherical fitting should be performed, using least squares. In the first algorithm, the relationship between point data and normal vector on the sphere is used. In the second algorithm. the equation of plane which can be obtained from 3 points, i.e., a start point, an end point, and center of a sphere. The proposed algorithms are show to be efficient by using MATLAB-based simulation.

• 한국HCI학회:학술대회논문집
• /
• 2009.02a
• /
• pp.178-185
• /
• 2009

A signal processing algorithm is proposed for end point detection which is used commonly in accelerometers-based pattern recognition problem. In the conventional method, end points are detected by manual manipulation with an additive button or algorithm based on statistical computation and highpass filtering to cause critical time delay and difficulty for parameters optimization. As an solution, we propose a focused Time Lagged Feedforward Network(TLFN) with respect to a differential signal of acceleration, which is widely applied for time series forecasting. The simple experiment is conducted with handwriting and the detection performance and response characteristic of the proposed algorithm is tested and analyzed.

• 제어로봇시스템학회:학술대회논문집
• /
• 1996.10a
• /
• pp.263-266
• /
• 1996

A method to determine an optimal temperature trajectory that guarantees polymer products having controlled molecular weight distribution and desired values of molecular weight is presented. The coordinate transformation method and the optimal control theory are applied to a batch PMMA polymerization system to calculate the optimal temperature trajectory. Coordinate transformation method converts the original fixed-end-point, free-end-time problem to a free-end-point, fixed-end-time problem. The idea is that by making the reactor temperature track the optimal temperature trajectory one may be able to produce polymer products having the prespecified physical property in a minimum time. The on-line control experiments with the PID control algorithm have been conducted to establish the validity of the scheme proposed in this study. The experimental results show that prespecified polymer product could be obtained with tracking the calculated optimal temperature trajectory.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 1997.04a
• /
• pp.942-946
• /
• 1997

In this research,we suggest a virtual machining system that can simulate sutting forces at the stage of design. Cutting forces,here, are modeled form the machanistic model of the ball end milling. To this end, we need undeformed chip thickness which is used for calculating chip load. It is derived form the z-map data of a CAD model. That is, chip load is the height difference between the cutting tool contact point and the workpiece at arbitrary position. The tool contact point is referred from the cutter location. Form the experimental verification, we can simulate machining process effectively to the slot and the side cutting of ball end mill.