• 대한전기학회:학술대회논문집
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• 대한전기학회 2011년도 제42회 하계학술대회
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• pp.1540-1541
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• 2011

We calculated the electron transport coefficients in $H_2$+Ar gas calculated E/N values 0.01 ~ 1 Td by the Boltzmann equation method. This study gained the values of the electron swarm parameters such as the electron drift velocity and the transverse diffusion coefficients for $H_2$+Ar gas at a range of E/N. The transport coefficient W and Dt/u have been calculated in mixtures of 0.5% and 4% hydrogen in argon. All values were made at 293 K.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2009년도 제40회 하계학술대회
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• pp.1404_1405
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• 2009

For quantitative understanding of gas discharge phenomena, we should know electron collision cross section. $GeH_4$ is used in many applications with $Si_2H_6$ gas, such as amorphous alloy, a thin film of silicon and solar cell. Therefore, we understand the electron transport characteristics and analysed the electron transport coefficients, the electron drift velocity W, the longitudinal and transverse diffusion coefficient $ND_L$ and $ND_T$, and the ionization coefficient $\alpha$/N in $GeH_4$gas over the E/N range from 0.01 to 1000 Td by two-term approximation of the Boltzmann equation.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1994년도 추계학술대회 논문집 학회본부
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• pp.281-283
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• 1994

The impedance characteristics of planar ICP have been measured and compared with the theoretical results obtained by the field equation. The resistance of the total impedance had a maximum point and the inductance decreased monotonically as the electron density increased from $2.5{\times}10^{10}cm^{-3}$ to $7{\times}10^{11}cm^{-3}$ and the Pressure from 1mT to 50mT. The impedance characteristics were also dependent on the profile of the electron density. The effective collision frequency, ${\nu}_{eff}$ was $9.0{\times}10^6Hz$ at 5mT and $.5{\times}10^7Hz$ at 100mT. The effective collision frequency at 5mT was not so different from that at 100mT and it is doe to the reduction of the discharge channel cross-section at high pressure. The estimated effective collision frequency from the simulation data was of the same order as the measured one.

• 전기학회논문지P
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• 제62권1호
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• pp.18-22
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• 2013

This paper describes the information for quantitative simulation of weakly ionized plasma. We must grasp the meaning of the plasma state condition to utilize engineering application and to understand materials of plasma state. Using quantitative simulations of weakly ionized plasma, we can analyze gas characteristic. In this paper, the electron transport characteristic in $CH_4$ has been analysed over the E/N range 0.1~300[Td], at the 300[$_{\circ}\;K$] by the two term approximation Boltzmann equation method and Monte Carlo Simulation. Boltzmann equation method has also been used to predict swarm parameter using the same cross sections as input. The behavior of electron has been calculated to give swarm parameter for the electron energy distribution function has been analysed in $CH_4$ at E/N=10, 100 for a case of the equilibrium region in the mean energy. A set of electron collision cross section has been assembled and used in Monte Carlo simulation to predict values of swarm parameters. The result of Boltzmann equation and Monte Carlo Simulation has been compared with experimental data by Ohmori, Lucas and Carter. The swarm parameter from the swarm study are expected to sever as a critical test of current theories of low energy scattering by atoms and molecules.

• 전기학회논문지P
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• 제63권4호
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• pp.317-321
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• 2014

This paper describes the information for quantitative simulation of weakly ionized plasma. We must grasp the meaning of the plasma state condition to utilize engineering application and to understand materials of plasma state. Using quantitative simulations of weakly ionized plasma, we can analyze gas characteristic. In this paper, the electron Ionization and diffusion Coefficients in $CH_4$ has been analysed over the E/N range 0.1~300[Td], at the 300[$^{\circ}K$] by the two term approximation Boltzmann equation method and Monte Carlo Simulation. Boltzmann equation method has also been used to predict swarm parameter using the same cross sections as input. The behavior of electron has been calculated to give swarm parameter for the electron energy distribution function has been analysed in $CH_4$ at E/N=10, 100 for a case of the equilibrium region in the mean energy. A set of electron collision cross section has been assembled and used in Monte Carlo simulation to predict values of swarm parameters. The result of Boltzmann equation and Monte Carlo Simulation has been compared with experimental data by Ohmori, Lucas and Carter. The swarm parameter from the swarm study are expected to sever as a critical test of current theories of low energy scattering by atoms and molecules.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 춘계학술대회 논문집 유기절연재료 전자세라믹 방전플라즈마 연구회
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• pp.201-203
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• 2001

This paper describes the information for quantitative simulation of weakly ionized plasma. We must grasp the meaning of the plasma state condition to utilize engineering application and to understand materials of plasma state. In this paper, the drift velocity of electron in Xenon gas calculated for range of E/N values from 0.01~500[Td] at the temperature is $300[^{\circ}K]$ and pressure is 1[Torr], using a set of electron collision cross sections determined by the authors and the values of drift velocity of electrons are obtained for TOF, PT, SST sampling method of Backward Prolongation by two term approximation Boltzmann equation method. it has also been used to predict swarm parameter using the values of cross section as input. The result of Boltzmann equation, the drift velocity of electrons, has been compared with experimental data by L. S. Frost and A. V. Phelps for a range of E/N. The swarm parameter from the study are expected to server as a critical test of current theories of low energy scattering by atoms and molecules.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 춘계학술대회 논문집 유기절연재료 전자세라믹 방전플라즈마 일렉트렛트 및 응용기술
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• pp.185-188
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• 2002

This paper describes the information for quantitative simulation of weakly ionized plasma. We should grasp the meaning of the plasma state condition to utilize engineering application and to understand materials of plasma state. In this paper, the drift velocity of electron in $SF_6+O_2$ mixture gas calculated for range E/N values l~900[Td] at the temperature is 300[$^{\circ}K$] and pressure is 1[Torr], using a set of electron collision cross sections determined by the authors and the values of drift velocity of electrons are obtained for TOF, PT, SST sampling method of Backward Prolongation by two term approximation Boltzmann equation method. It has also been used to predict swarm parameter using the values of cross section as input. The result of Boltzmann equation, the drift velocity of electrons, has been compared with pure $SF_6$, pure $O_2$ and mixture gas.

• 한국조명전기설비학회지:조명전기설비
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• 제3권4호
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• pp.49-56
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• 1989

약 이온화되어 있는 기체 방전에서 전자 에너지 분포함수는 계산상 어려움으로 인하여 맥스웰 분포를 가정하나 이러한 가정은 실제 방전내의 전자 에너지 분포함수와 차이를 보이게 된다. 본 논문에서는 저압 수은 방전에 대하여 전자온도, 관벽온도, 전자밀도, 포화증기압밀도를 변수로 사용하여 볼쯔만식을 해석하였다. 구성된 방정식으로부터 정상상태를 가정하여 구한 전자 에너지 분포함수는 보통 적용하는 맥스웰 분포와 꼬리부분에서는 많은 차이를 보였다. 특히 충돌 단면적을 에너지의 함수로 근사하여 식을 간략화함으로써 분포함수를 간편하게 구할 수 있으며 광범위하게 적용할 수 있는 방법을 제안하였다. 또한 명확한 이론에 근거한 해석적 모델을 제시하여 분포함수의 해석을 용이하게 하고 계산과정을 간편하게 하였다.

• E2M - 전기 전자와 첨단 소재
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• 제3권2호
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• pp.138-146
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• 1990

볼츠만 수송방정식에 관한 홀스타인의 식을 사용하여 온도는 273.deg.K, 상대전계의 세기가 1.leq.E/P..leq.30(V/cm Torr)인 때의 Na와 He 단일기체중을 통과하는 전자의 에너지분포함수와 수송계수를 계산하였다. 그리고 전자 이동속도의 결과치를 실험값과 비교하였으며 실험치와 계산치가 일치하도록 충돌단면적을 수정하여 계산에 적용하였다. 이러한 방법으로 Hesms 0.1[eV]-50[eV]까지 Na는 0.1[eV]-5[eV]까지의 에너지범위에서 결정된 운동량변환단면적의 값은 제한된 범위에서 Crompton 및 Nakamura의 값과 거의 일치하였다. 또한 이와 같이하여 계산된 Na와 He 단일기체의 충돌단면적을 이용하여 온도는 273.degK, 상대전계의 세기는 1.leq.E/P$_{o}$ .leq.30(V/cm Torr)의 범위에서 Na-He 혼합증기의 혼합비율을 He:Na는 99.5:0.5, 99:1, 9:1. 1:1로 변화시켜 특성에너지, 평균에너지, 전자이동속도, 전자에너지 분포함수를 게산하였다.

• Journal of Astronomy and Space Sciences
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• 제34권4호
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• pp.343-352
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• 2017

A space plasma facility has been operated with a back-diffusion-type plasma source installed in a mid-sized vacuum chamber with a diameter of ~1.5 m located in Satellite Technology Research Center (SaTReC), Korea Advanced Institute of Science and Technology (KAIST). To generate plasma with a temperature and density similar to the ionospheric plasma, nickel wires coated with carbonate solution were used as filaments that emit thermal electrons, and the accelerated thermal electrons emitted from the heated wires collide with the neutral gas to form plasma inside the chamber. By using a disk-type Langmuir probe installed inside the vacuum chamber, the generation of plasma similar to the space environment was validated. The characteristics of the plasma according to the grid and plate anode voltages were investigated. The grid voltage of the plasma source is realized as a suitable parameter for manipulating the electron density, while the plate voltage is suitable for adjusting the electron temperature. A simple physical model based on the collision cross-section of electron impact on nitrogen molecule was established to explain the plasma generation mechanism.