• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.07a
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• pp.236-239
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• 2002

The electron-atom collision studies has been essentially use\ulcorner for testing and developing suitable theories of the scattering and collision processes, and for providing a tool for obtaining detailed information on the structure of the target atoms and molecules and final collision products. And, the development of that has also been strongly motivated by the need for electron collision data in such fields as laser physic and development, astrophysics, plasma devices, upper atmospheric processes and radiation physics. Therefore, we explains the concept and the principle of determination of the electron collision cross sections for atoms and molecules by using the present electron swarm method.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.16 no.5
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• pp.435-440
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• 2003

The electron-atom collision studies have been essentially used for testing and developing suitable theories of the scattering and collision processes, and for providing a tool for obtaining detailed information on the structure of the target atoms and molecules and final collision products. And, the development of that has also been strongly motivated by the need for electron collision data in such fields as laser Physics and development, astrophysics, Plasma devices, upper atmospheric processes and radiation physics. The concept and the Principle of determination of the electron collision cross sections for atoms and molecules by using the present electron swarm method are explained.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.05c
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• pp.11-14
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• 2002

Accurate sets of electron collision cross sections for atoms and molecules are necessary for quantitative understanding and modeling of plasma phenomena. So, in this study, we explains the concept of electron collision cross sections for gases, and the principle of determination of the electron collision cross sections for atoms and molecules by using the present electron swarm method.

• Journal of the Korean Physical Society
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• v.73 no.12
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• pp.1855-1862
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• 2018

A reliable set of low-energy electron collision cross sections for the triethoxysilane (TRIES) molecule was derived based on the measured electron transport coefficients for a pure TRIES molecule by using an electron swarm method and a two-term approximation of the Boltzmann equation. The electron transport coefficients calculated using the derived set are in good agreement with experimental value over a wide range of E/N values (ratio of the electric field E to the neutral number density N). The present electron collision cross section set for the TRIES molecule, therefore, is the most reliable so far for plasma discharges and for materials processing using the TRIES molecule. Moreover, the electron transport coefficients for the TRIES-Ar and the $TRIES-O_2$ mixtures were also calculated and analyzed over a wide range of E/N for the first time.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1998.11a
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• pp.155-158
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• 1998

This paper is calculated at electron swarm simulation by Back Prolongation of Boltzmann equation for range of E/N values from 0.1~200[Td], pressure P= 1.0[Torr], temperature T=300[ 。K], the electron swarm parameter(drift velocity, longitudinal . transverse diffusion coefficients, characteristic energy, etc) in He gas is used by electron collision cross section, particularly explicate the simulation technique, and consider electrical conduction characteristic of He gas.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.34-34
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• 2010

Absolute electron-impact cross sections for molecular targets including their radicals are important in developing plasma reactors and testing various plasma processing gases. However, low-energy electron collision data for these gases are sparse and only the limited cross section data are available. In this presentation, the methods and the status of measurements of, mainly, absolute elastic cross sections for electron-polyatomic molecule collisions will be discussed with recent results from Chungnam National University. Elastic cross sections are essential for the absolute scale conversion of inelastic cross sections, as well as for testing computational methods.

• Transactions on Electrical and Electronic Materials
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• v.2 no.1
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• pp.7-11
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• 2001

We measured the electron transport coefficients, the electron drift velocity, W, and the longitudinal diffusion coefficient, $D_{L}$, over the E/N range from 0.03 to 100 Td and gas pressure range from 0.133 to 122 kPa in the 0.526% and 5.05% $C_{3}F_{8}$-Ar mixtures by the double shutter drift tube with variable drift distance. And we calculated these electron transport coefficients by using multi-term approximation of Boltzmann equation analysis. We determined the electron collision cross sections set for $C_{3}F_{8}$ molecule by the comparison of measurement and calculation. Our special attention in the present study was focused upon the inelastic collision cross sections of the $C_{3}F_{8}$ molecule.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.19 no.3
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• pp.301-306
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• 2006

The electron drift velocity W and the product of the longitudinal diffusion coefficient and the gas number density $ND_{L}$ in the $0.525\;\%$ and $5.05\;\%$ $C_{3}F_8-Ar$ mixtures were measured by using the double shutter drift tube with variable drift distance over the E/N range from 0.03 to 100 Td and gas pressure range from 1 to 915 torr. And we determined the electron collision cross sections set for the $C_{3}F_8$ molecule by STEP 1 of electron swarm method using a multi-term Boltzmann equation analysis. Our special attention in the present study was focused upon the vibrational excitation and new excitations cross sections of the $C_{3}F_8$ molecule.

• Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference
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• 1989.10a
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• pp.19-24
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• 1989

The electron energy distribution function in mercury discharge positive columns are calculated numerically from the Boltzmann eqation under a set of parameters, such as the electron temperature to. the atomic temperature Tw. the electron number density no. and the electric field E. Especially, using the approximation that collision cross sections only depend on the energy, the calculated electron energy distribution function was shown that it falls off rapidly in the high energy tail.

• Electrical & Electronic Materials
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• v.9 no.7
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• pp.660-667
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• 1996

The electron transport characteristics in $SF_6$ gas is calculated for range of E/N values from 150 -800(Td) by the Monte Carlo simulation using a set of electron collision cross sections determined by the authors. The results suggest that the value of an electron swarm parameter such as the electron drift velocity, the electron ionization or attachment coefficients, longitudinal and transverse diffusion coefficients in nearly agreement with the respective experimental and theoretical for a range of E/N. The electron energy distributions function were analysed in sulphur hexaflouride at E/N:500 and 800(Td) for a case of the equilibrium region in the mean electron energy. The validity of the results obtained has been confirmed by a Time of Flight method also investigated as a set of electron collision cross section for sulphur Hexaflouride.