Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2002.05c
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- Pages.11-14
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- 2002
The study of electron collision cross sections and electron transport coefficients in gases
전자충돌단면적과 전자수송계수에 관한 연구
- Published : 2002.05.17
Abstract
Accurate sets of electron collision cross sections for atoms and molecules are necessary for quantitative understanding and modeling of plasma phenomena. So, in this study, we explains the concept of electron collision cross sections for gases, and the principle of determination of the electron collision cross sections for atoms and molecules by using the present electron swarm method.
Keywords
- electron collision cross section;
- electron beam method;
- electron swarm method;
- differential cross section;
- integral cross section