Electrical Characteristics of Super Junction MOSFET According to Trench Etch Angle of P-pillar (P-pillar 식각 각도에 따른 Super Junction MOSFET의 전기적 특성 분석에 관한 연구)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.27 no.8
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- pp.497-500
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- 2014