• Earthquakes and Structures
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• v.9 no.1
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• pp.111-126
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• 2015

In this study, the coupled effects of magnetic field, stress and thermal field on gravity waves propagating in a liquid layer over a solid surface are discussed. Due to change in temperature, initial hydrostatic stress and magnetic field, the gravity-sound Rayleigh waves can propagate in the liquid-solid interface. Dispersion properties of waves are derived by using classical dynamical theory of thermoelasticity. The phase velocity of gravity waves influenced quite remarkably in the presence of initial stress parameter, magneto-thermoelastic coupling parameter in the half space. Numerical solutions are also discussed for gravity-Rayleigh waves. In the absence of temperature, stress and magnetic field, the obtained results are in agreement with classical results.

• Structural Engineering and Mechanics
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• v.63 no.4
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• pp.481-495
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• 2017

The present article examines the static response of multilayered magneto-electro-elastic (MEE) beam in thermal environment through finite element (FE) methods. On the basis of the minimum total potential energy principle and the coupled constitutive equations of MEE material, the FE equilibrium equations of cantilever MEE beam is derived. Maxwell's equations are considered to establish the relation between electric field and electric potential; magnetic field and magnetic potential. A simple condensation approach is employed to solve the global FE equilibrium equations. Further, numerical evaluations are made to examine the influence of different in-plane and through-thickness temperature distributions on the multiphysics response of MEE beam. A parametric study is performed to evaluate the effect of stacking sequence and different temperature profiles on the direct and derived quantities of MEE beam. It is believed that the results presented in this article serve as a benchmark for accurate design and analysis of the MEE smart structures in thermal applications.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.07a
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• pp.863-865
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• 2001

In this study, RuO$_2$thin films were etched in inductively coupled $O_2$plasma. Etching characteristics of RuO$_2$thin films including etch rate and selectivity were evaluated as a function of rf power in $O_2$plasma and gas mixing ratio in $O_2$/Ar plasma. In $O_2$ plasma, the etch rate of RuO$_2$thin film increases as rf power increases. In $O_2$/Ar plasma, the etch rate of RuO$_2$thin film increases up to 10% Ar, but decrease with furthermore increasing Ar mixing ratio. The enhanced etch rate can be obtained with increasing rf power and small addition of Ar gas.

• 한국초전도학회:학술대회논문집
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• v.9
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• pp.161-164
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• 1999

We have fabricated the direct-coupled planar type 1st-order SQUID gradiometers. The gradiometer consists of moats or slots in SQUID loop. It is made by YBa$_2Cu_3O_7$ thin films using pulsed laser deposition method on SrTiO$_3$ single crystal and bi-crystal substrates. We have studied the effects of slots and moats in SQUID loop by measuring the voltage modulation signals under uniform field and 1st-order gradient, and the noise properties under non-shielded environment.

• Journal of Welding and Joining
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• v.19 no.5
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• pp.492-498
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• 2001

In the previous study, temperature monitoring of case about shrinkage fit process was performed and heat transfer model was developed in detail by feedback and tuning among monitoring result, process investigation, and analysis result. The gap element in contact between case and core was effectively used in analysis model. In present study, following things are performed to solve deformation of case due to shrinkage fit process on the basis of previous result. Above all, mechanical material properties of case are measured by case specimen for deformation analysis considering weldment of case. Deformation of case before and after shrinkage fit process is measured, too. Three dimensional deformation model is developed by the comparison and inspection between these experimental data and analysis results. Deformation analysis is simulated with the result of heat transfer analysis, in other words, non-coupled analysis is used. Finally the countermeasure for deformation is brought up through those.

• Journal of the Korean Vacuum Society
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• v.4 no.2
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• pp.210-216
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• 1995

최근에 연구되고 있는 저온, 저압 플라즈마를 이용한 식각기술 중 차세대 반도체 metallization 공정에 응용될 수 있는 가장 적합한 기술이라 사료되는 유도 결합형 플라즈마(Inductively Coupled Plasma : ICP)를 이용한 RF 스퍼터 식각 반응로를 제작하고 이에 대한 특성을 조사하였다. 유도용 주파수로서 13.56 MHz를 사용하였으며 유도결합을 일으키기 위해 3.5회의 나선형 평판형 코일을 사용함으로써 비교적 대면적에 균일한 고밀도 플라즈마를 얻을 수 있었다. 또한 기판에 독립적인 13.56MHz RF power를 가해 DC 바이어스를 인가함으로써 기판으로 입사하는 하전입자들의 에너지를 조절하여 기판에의 손상을 최소화하며 SiO2의 스퍼터 식각 속도를 극대화할 수 있었다. 따라서 이러한 특성을 갖는 유도 결합형 플라즈마 식각장치를 차세대 반도체의 RF스퍼터 식각 공정에 응용할 수 있으리라 사료된다.

• Transactions of Materials Processing
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• v.23 no.8
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• pp.475-481
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• 2014

Water quenching is one method of cooling after hot forming, which is presently being used for the manufacturing of automobile parts. The formed parts at room temperature are heated and then cooled rapidly in a water bath to produce high strength. The formed parts may undergo excessive thermal distortion during the water quench. In order to predict the distortion during water quenching, a coupled thermo-mechanical simulation is needed. In the current study, the simulation of heating and cooling of boron steel cylinders was performed. The material properties for the simulation were calculated from JMatPro, and the convective heat transfer coefficient was obtained from experimental tests. The results show that the thermal distortion and the residual stresses are well predicted by the coupled simulation.

• Proceedings of the KIEE Conference
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• 2000.11a
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• pp.269-272
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• 2000

The flow accelerated galvanic corrosion characteristics of a carbon steel coupled to stainless steel were investigated in deaerated alkaline-chloride solutions as a function of flow velocities(0, 0.2, 0.4 and 0.6 m/s), pH(8, 9, and 10) and temperature(25, 50 and $75^{\circ}C$). The electrochemical properties of specimens were investigated by potentiodynamic test and galvanic corrosion test using RCE(Rotating Cylinder Electrode). Carbon steel did not show passive behavior in the alkaline-chloride solution. The galvanic current density increases with increasing flow velocity and temperature, but decreased with increasing pH. Flow velocity had a small effect on the galvanic current density at $25^{\circ}C$, whereas the flow velocity increased galvanic current density significantly at $50^{\circ}C$ and $75^{\circ}C$. This might be due to the increased solubility of magnetite at the higher temperature.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2010.06a
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• pp.383-383
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• 2010

TiN is one of the mostly used barrier materials in copper metallization because of low friction coefficient and superior electrical properties. We need to investigate for the etching characteristic of TiN. In this study, we investigated about etching characteristic of TiN using $BCl_3$/Ar inductively coupled plasma system. The etch rate was measured by a depth pro filer. The chemical etching reactions of the TiN surface was investigated X-ray photoelectron spectroscopy.

• Proceedings of the Korea Electromagnetic Engineering Society Conference
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• 2002.11a
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• pp.157-160
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• 2002

In this paper, a novel lumped equivalent circuit for a conventional parallel directional coupler is proposed. The equivalent circuit and design formula for the presented lumped element coupler is derived based on the even-and odd-mode properties of a parallel-coupled line. By using the derived design formula, we have designed the 3㏈ and 10㏈ lumped element directional couplers at the center frequency of 100Mhz. Furthermore, a chip type directional coupler has been designed to fabricate with multilayer configurations by employing the Low Temperature CofiredCeramic (LTCC) process. Designed chip-type directional coupler has a 10㏈-coupling value at the center frequency of 2㎓. Excellent agreements between simulations and measurements on the designed directional couplers show the validity of this paper