• 센서학회지
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• 제21권4호
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• pp.311-317
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• 2012

Disposable amperometric screen-printed biosensor strips have been fabricated by a sol-gel encapsulation for the analysis of glucose. The glucose oxidase(GOx) is entrapped in the gel matrix through sol-gel transition of tetraethoxysliane(TEOS). The biosensor is fabricated by GOx containing thin film of TEOS gel on the surface of screen-printed carbon electrode(SPCE). The GOx-containing thin film of TEOS gel offers a one-step modification process on the surface of SPCE. The optimum conditions for glucose determination have been characterized with respect to the applied potential, enzyme loading ratio, and pH. The linear range and detection limit of glucose detection were from 2.0 mM to 16.0 mM and 0.25 mM, respectively.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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• pp.359-360
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• 2007

In this paper, the elastic modulus and hardness of poly 3C-SiC thin films growed by APCVD were measured using nanoindentation test. The resulting values of elastic modulus E and hardness H of the poly 3C-SiC film are 305 GPa and 26 GPa, respectively. The mechanical properties of the poly 3C-SiC film are better than bulk Si wafers. Therefore, the poly 3C-SiC thin film is suitable for abrasion resistance, high frequency, and bio MEMS applications.

• 한국재료학회지
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• 제14권6호
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• pp.443-450
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• 2004

Parylene polymer thin film shows excellent homogeneous coverage chracteristics when it was deposited onto very complex three dimensional solid matters, such as deep hole and micro crack. The parylene deposition process can be conducted at room temperature although most of chemical vapor deposition processes request relatively high processing temperature. Therefore, the parylene coating process does not induce any thermal problems. Parylene thin film is transparent and has extremly high chemical stability. For example, it shows high chemical stability with high reactive chemical solutions such as strong acid, strong alkali and acetone. The bio-stability of this material gives good chances to use for a packaging of biomedical devices and electronic devices such as display. In this review article, principle of deposition process, properties and application fields of parylene polymer thin film are introduced.

• Korean Chemical Engineering Research
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• 제47권6호
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• pp.715-719
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• 2009

본 연구에서는 DNA 정보를 상변화 물질의 전기저항 변화특성으로 검출할 수 있는 상변화 전극 기판을 개발하였다. 이를 위해 반도체 공정에서 사용하는 Al을 사용하여 전극 기판을 제작하였다. 하지만 주사전자현미경을 이용하여 Al 전극의 단면 상태를 확인해 본 결과 PETEOS(plasma enhanced tetraethyoxysilane) 내에서 보이드(void)가 발생하여 후속공정인 에치백과 세정공정 분위기에 과도하게 노출되어 심하게 손상되어 전극과 PETEOS 사이에 홀(hole)로 변형된다. 이 문제점을 해결하기 위하여 에치백 및 세정 공정을 진행하지 않으면서 $Ge_2Sb_2Te_5$(GST) 박막의 단차피복성(stepcoverage)을 좋게 할 수 있고, 열역학적으로 GST 박막과의 반응성을 고려했을 때 안정적이면서 비저항이 낮은 TiN 재료를 사용하여 상변화 전극 기판을 제작하였다. 주사전자현미경을 통하여 전극의 단면의 상태를 관찰하였으며 TiN 전극과 GST 박막이 정상적으로 연결되어 있는 것을 확인하였다. 또한 저항측정 장비를 사용하여 TiN 상변화 전극 기판 위에 증착된 GST의 비정질과 결정질의 저항을 측정하였고, GST의 비정질과 결정질저항의 차이는 약 1,000배 정도로 신호를 검출하는데 충분함을 확인하였다.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2004년도 학술대회지
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• pp.162-170
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• 2004

A kinetic theory analysis is used to study the ultra-thin gas flow field in gas slider hearings. The Boltzmann equation simplified by a collision model is solved by means of a finite difference approximation with the discrete ordinate method. Calculations are made for the flow field inside stepped and straight slider bearings. The results are compared well with those from the DSMC method. Special attention has been paid to the effect of the pressure build-up in front of a hearing, which has never been assessed before. It has been shown that the pressure build-up at the inlet is about $4.5\%$ of the operating pressure and the resulting load capacity is about $25\%$ higher for the case considered in the present study.

• 한국정밀공학회지
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• 제27권2호
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• pp.29-33
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• 2010

We have investigated fs-laser ablation as well as optoperforation threshold of PDMS (Polydimethylsiloxane) thin lid cover on ${\mu}$-channel with changing the flow medium from water to hemoglobin. The ablation threshold is found to be independent of both PDMS thin film thickness and flow medium, but the optoperforation threshold is dependent on the films thickness. The observation that the ablation process is well described with simple two-temperature model supposed that the cover lid PDMS of $\mu$-channel be processed with minimized thermal effects by fs-laser with low laser fluence.

• Biotechnology and Bioprocess Engineering:BBE
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• 제9권2호
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• pp.143-146
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• 2004

A surface plasmon resonance (SPR) imaging system was constructed and used to detect the hexahistidine-ubiquitin-tagged human parathyroid hormone fragment (His$\sub$6/-Ub-hPTHF(1-34)) expressed in Escherichia coli. The hexahistidine-specific antibody was immobilized on a thin gold film coated with ProLinker$\^$TM/ B, a novel calixcrown derivative with a bifunctional coupling property that permits efficient immobilizaton of capture proteins on solid matrices. The soluble and insoluble fractions of an E. coli cell lysate were spotted onto the antibody-coated gold chip, which was then washed with buffer (pH 7.4) solution and dried. SPR imaging measurements were carried out to detect the expressed His$\sub$6/-Ub-hPTHF(1-34). There was no discernible protein image in the uninduced cell lysate, indicating that non-specific binding of contaminant proteins did not occur on the gold chip surface. It is expected that the approach used here to detect affinity-tagged recombinant proteins using an SPR imaging technique could be used as a powerful tool for the analyses of a number of proteins in a high-throughput mode.

• 한국전기전자재료학회논문지
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• 제33권5호
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• pp.344-349
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• 2020

Modern thin film deposition processes require high deposition rates, low costs, and high-quality films. Atmospheric pressure plasma-enhanced chemical vapor deposition (AP-PECVD) meets these requirements. AP-PECVD causes little damage on thin film deposition surfaces compared to conventional PECVD. Moreover, a higher deposition rate is expected due to the surface heating effect of atomic hydrogens in AP-PECVD. In this study, polycrystalline silicon thin film was deposited at a low temperature of 100℃ and then AP-PECVD experiments were performed with various plasma powers and hydrogen gas flow rates. A deposition rate of 15.2 nm/s was obtained at the VHF power of 400 W. In addition, a metal foam showerhead was employed for uniform gas supply, which provided a significant improvement in the thickness uniformity.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
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• pp.189.1-189.1
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• 2013

Titanium dioxide (TiO2) is a wide bandgap semiconductor possessing photochemical stability and thus widely used for photocatalysis. However, enhancing photocatalytic efficiency is still a challenging issue. In general, the efficiency is affected by physio-chemical properties such as crystalline phase, crystallinity, exposed crystal facets, crystallite size, porosity, and surface/bulk defects. Here we propose an alternative approach to enhance the efficiency by studying interfaces between thin TiO2 layers to be stacked; that is, the interfacial phenomena influencing on the formation of porous structures, controlling crystallite sizes and crystallinity. To do so, multi-layered TiO2 thin films were fabricated by using a sol-gel method. Specifically, a single TiO2 thin layer with a thickness range of 20~40 nm was deposited on a silicon wafer and annealed at $600^{\circ}C$. The processing step was repeated up to 6 times. The resulting structures were characterized by conventional electron microscopes, and followed by carrying out photocatalytic performances. The multi-layered TiO2 thin films with enhancing photocatalytic efficiency can be readily applied for bio- and gas sensing devices.

• 한국자기학회지
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• 제19권4호
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• pp.142-146
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• 2009

이온빔 증착법으로 제작한 코닝유리(Corning glass)/Ta(5 nm)/(Permalloy, Conetic)/Ta(5 nm) 박막에 대한 연자성의 특성에 대해 연구하였다. 퍼멀로이(Permalloy; NiFe)층과 코네틱(Conetic; NiFeCuMo)층을 증착하여 인가 자기장 방향에 용이축과 곤란축의 자기저항곡선으로부터 얻은 보자력과 포화자기장에 대해 각각 비교하였다. 두께가 10${\sim}$15 nm인 코네틱 박막의 표면저항값은 퍼멀로이 박막보다 2배 정도 높았으나 보자력과 포화자기장은 1/3배 정도 낮았으며, 자화율은 2${\sim}$3배 정도 높은 초연자성의 특성을 가졌다. 퍼멀로이 박막보다 연자성의 특성이 높은 코네틱 박막을 이용한 스핀밸브나 터널접합의 소자를 개발할 수 있는 가능성을 확인하였다.