• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2008.11a
• /
• pp.430-430
• /
• 2008

Using multi plasma enhanced chemical vapor deposition system (Multi-PECVD), p-a-Si:H deposition layer as a $p^+$ region which was annealed by laser (Q-switched fiber laser, $\lambda$ = 1064 nm) on an n-type single crystalline Si (100) plane circle wafer was prepared as new doping method for single crystalline interdigitated back contact (IBC) solar cells. As lots of earlier studies implemented, most cases dealt with the excimer (excited dimer) laserannealing or crystallization of boron with the ultraviolet wavelength range and $10^{-9}$ sec pulse duration. In this study, the Q-switched fiber laser which has higher power, longer wavelength of infrared range ($\lambda$ = 1064 nm) and longer pulse duration of $10^{-8}$ sec than excimer laser was introduced for uniformly deposited p-a-Si:H layer to be annealed and to make sheet resistance expectable as an important process for IBC solar cell $p^+$ layer on a polished n-type Si circle wafer. A $525{\mu}m$ thick n-type Si semiconductor circle wafer of (100) plane which was dipped in a buffered hydrofluoric acid solution for 30 seconds was mounted on the Multi-PECVD system for p-a-Si:H deposition layer with the ratio of $SiH_4:H_2:B_2H_6$ = 30:120:30, at $200^{\circ}C$, 50 W power, 0.2 Torr pressure for 20 minutes. 15 mm $\times$ 15 mm size laser cut samples were annealed by fiber laser with different sets of power levels and frequencies. By comparing the results of lifetime measurement and sheet resistance relation, the laser condition set of 50 mm/s of mark speed, 160 kHz of period, 21 % of power level with continuous wave mode of scanner lens showed the features of small difference of lifetime and lowering sheet resistance than before the fiber laser treatment with not much surface damages. Diode level device was made to confirm these experimental results by measuring C-V, I-V characteristics. Uniform and expectable boron doped layer can play an important role to predict the efficiency during the fabricating process of IBC solar cells.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2012.08a
• /
• pp.86-86
• /
• 2012

The new approaches for silicon solar cell of new concept have been actively conducted. Especially, solar cells with wire array structured radial p-n junctions has attracted considerable attention due to the unique advantages of orthogonalizing the direction of light absorption and charge separation while allowing for improved light scattering and trapping. One-dimenstional semiconductor nano/micro structures should be fabricated for radial p-n junction solar cell. Most of silicon wire and/or pillar arrays have been fabricated by vapour-liquid-solid (VLS) growth because of its simple and cheap process. In the case of the VLS method has some weak points, that is, the incorporation of heavy metal catalysts into the growing silicon wire, the high temperature procedure. We have tried new approaches; one is electrochemical etching, the other is noble metal catalytic etching method to overcome those problems. In this talk, the silicon pillar formation will be characterized by investigating the parameters of the electrochemical etching process such as HF concentration ratio of electrolyte, current density, back contact material, temperature of the solution, and large pre-pattern size and pitch. In the noble metal catalytic etching processes, the effect of solution composition and thickness of metal catalyst on the etching rate and morphologies of silicon was investigated. Finally, radial p-n junction wire arrays were fabricated by spin on doping (phosphor), starting from chemical etched p-Si wire arrays. In/Ga eutectic metal was used for contact metal. The energy conversion efficiency of radial p-n junction solar cell is discussed.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.30 no.6
• /
• pp.366-371
• /
• 2017

In this paper, we introduce an electrocardiogram (ECG) system designed to solve problems caused by wetgels and motion artifacts in measuring active movement. The system is called a dry-contact ECG and was designed by considering impedance matching between skin and electrode as well as the frictional electricity between electrode and clothes. In order to create the system, we measured impedance on the skin-electrode interface, and the result was applied to the electronic circuit scheme. Moreover, we added an electrode on the back of the measurement electrode to make a flow path to ground the electrical noise. The final ECG circuit and novel electrode were used to detect real human cardiac signals from a subject who was tested while standing still and walking. The signals obtained from the two activities were nicely shaped, without any motion artifact noise. We took electrode size into account in this study because the impedance depended on the area of the electrode. An electrode of 50 mm diameter showed the best curve for the ECG signal without any electrical noise.

• Journal of Korean Society of Coastal and Ocean Engineers
• /
• v.23 no.2
• /
• pp.139-146
• /
• 2011

The breaking wave pressure occurs when a plunging breaker instantaneously impinges on structural surface, and appears differently depending on whether or not to form air pockets at the instant of contact. The Wagner type normally forms a single pressure peak at the contact spot due to the direct collision of water volume to the structure whereas in the Bagnold type the time lagged oscillation of the air pocket causes pressure peaks even at areas away from the spot. In the present study, the Bagnold's impact pressure is numerically and experimentally investigated for the bulkhead of an underwater tunnel under construction which is subjected to nearby breaking waves. A numerical solver of Navier-Stokes equations was applied to reproduce the breaking waves near a bulkhead, and the results showed the Bagnold's impact pressure occurring on the back (land side) face of the bulkhead. The existence of the impact pressure was also verified by a hydraulic model testing, and it was found that the experimental results well conformed to their numerical counterparts.

• Korean Journal of Optics and Photonics
• /
• v.15 no.1
• /
• pp.79-85
• /
• 2004

We report on a transmittance controlled photomask with phase patterns on the back quartz surface. Theoretical analysis for changes in illumination pupil shape with respect to the variation of size and density of backside phase patterns and experimental results for improvement of critical dimension uniformity on a wafer by using the transmittance controlled photomask are presented. As phase patterns for controlling transmittance of the photomask we used etched contact-hole type patterns with 180" rotative phase with respect to the unetched region. It is shown that pattern size on the backside of the photomask must be made as small as possible in order to keep the illumination pupil shape as close as possible to the original pupil shape and to achieve as large an illumination intensity drop as possible at a same pattern density. The distribution of illumination intensity drop suitable for correcting critical dimension error was realized by controlling pattern density of the contact-hole type phase patterns. We applied this transmittance controlled photomask to a critical layer of DRAM (Dynamic Random Access Memory) having a 140nm design rule and could achieve improvement of the critical dimension uniformity value from 24.0 nm to 10.7 nm in 3$\sigma$.TEX>.

• Aerospace Engineering and Technology
• /
• v.11 no.2
• /
• pp.73-79
• /
• 2012

Because the contact time between satellite and ground station is very limited in LEO (Low Earth Orbit) satellite, all telemetry data generated on spacecraft bus are stored in a mass memory and downlinked to the ground together with real time data during the contact time. The mass memory is initialized in the first system initialization phase and the page status of each memory block is generated step by step. After the completion of the system initialization, the telemetry data are continuously stored and the stored data are played back to the ground by command. And the memory scrubbing is periodically performed for correction of single bit error which can be generated on harsh space environment. This paper introduces the mass memory operation method for telemetry processing of LEO satellite. It includes a general mass memory data structure, the methods of mass memory initialization, scrubbing, data storage and downlink, and mass memory management of primary and redundant mass memory.

• 한국태양에너지학회:학술대회논문집
• /
• 2011.04a
• /
• pp.105-110
• /
• 2011

The doping procedure in crystalline silicon solar cell fabrication usually contains oxygen injection during drive-in process and removal of phosphorous silicate glass(PSG). In this paper, we studied the effect of oxygen injection and PSG on conversion efficiency of solar cell. The mono crystalline silicon wafers with $156{\times}156mm^2$, $200{\mu}m$, $0.5-3.0{\Omega}{\cdot}cm$ and p-type were used. After etching $7{\mu}m$ of the surface to form the pyramidal structure, the P(phosphorous) was injected into silicon wafer using diffusion furnace to make the emitter layer. After then, the silicon nitride was deposited by the PECVD with 80 nm thickness and 2.1 refractive index. The silver and aluminium electrodes for front and back sheet, respectively, were formed by screen-printing method, followed by firing in 400-425-450-550-$880^{\circ}C$ five-zone temperature conditions to make the ohmic contact. Solar cells with four different types were fabricated with/without oxygen injection and PSG removal. Solar cell that injected oxygen during the drive-in process and removed PSG after doping process showed the 17.9 % conversion efficiency which is best in this study. This solar cells showed $35.5mA/cm^2$ of the current density, 632 mV of the open circuit voltage and 79.5 % of the fill factor.

• Journal of the Korean Solar Energy Society
• /
• v.31 no.1
• /
• pp.37-43
• /
• 2011

In this paper, the optimized doping condition of crystalline silicon solar cells with $156{\times}156\;mm^2$ area was studied. To optimize the drive-in temperature in the doping process, the other conditions except variable drive-in temperature were fixed. These conditions were obtained in previous studies. After etching$7\;{\mu}m$ of the surface to form the pyramidal structure, the silicon nitride deposited by the PECVD had 75~80nm thickness and 2 to 2.1 for a refractive index. The silver and aluminium electrodes for front and back sheet, respectively, were formed by screen-printing method, followed by firing in 400-425-450-550-$850^{\circ}C$ five-zone temperature conditions to make the ohmic contact. Drive-in temperature was changed in range of $830^{\circ}C$ to $890^{\circ}C$to obtain the sheet resistance $30{\sim}70\;{\Omega}/{\box}$ with $10\;\Omega}/{\box}$ intervals. Solar cell made in $890^{\circ}C$ as the drive-in temperature revealed 17.1% conversion efficiency which is best in this study. This solar cells showed $34.4\;mA/cm^2$ of the current density, 627 mV of the open circuit voltage and 79.3% of the fill factor.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2005.10a
• /
• pp.256-259
• /
• 2005

Analysis of behavior pattern and thermal response during bathing and showering provides important fundamental data when developing an automatic bathing/showering system. The behavior pattern and physiological changes during bathing/showering were measured und analyzed for the aged male group. We recorded the volunteers showering at front, back, left and right view using four CCTV cameras in order to study the behavior pattern during showering. The photographic data were analyzed by counting the frequencies of body contact and identifying zones where hands could reach. In order to study the thermal response, we measured the blood pressure (B.P), heart rate (H.R), body temperature (B.T.), breathing rate (B.R) for the different water temperatures and the locations of immersion for the young and old age groups. The results showed that the frequencies of body contacts were varied for different body sections. Also there were some body sections where hands could not be reached because of reduced pliability and muscular strength of the aged group. But we observed rather uniform body contact frequencies when a towel was used. In partial immersion bath experiments, we observed the changes of B.P. H.R and B.T in the case of young and old age groups, and the changes were more significant in the young age group.

• Applied Chemistry for Engineering
• /
• v.32 no.1
• /
• pp.68-74
• /
• 2021

Gas diffusion layer (GDL) compression is important parameter of polymer electrolyte membrane fuel cell (PEMFC) performance to have an effect on contact resistance, reactants transfer to electrode, water content in membrane and electrode assembly (MEA). In this study, the effect of GDL compression on fuel cell performance was investigated for commercial products, JNT20-A3. Polarization curve and electrochemical impedance spectroscopy was performed at different relative humidity and compression ratio using electrode area of 25 ㎠ unit cell. The contact resistance was reduced to 8, 30 mΩ·㎠ and membrane hydration was increased as GDL compression increase from 18.6% to 38.1% at relative humidity of 100 and 25%, respectively. It was identified through ohmic resistance change at relative humidity conditions that as GDL compression increased, water back-diffusion from cathode and electrolyte membrane hydration was increased because GDL porosity was decreased.