The Study on the Characteristic of Mono Crystalline Silicon Solar Cell with Change of $O_2$ Injection during Drive-in Process and PSG Removal
단결정 실리콘 태양전지 도핑 확산 공정에서 주입되는 $O_2$ 가스와 PSG 유무에 따른 특성 변화
- Choi, Sung-Jin (Dept. of Electronic Eng, Chungnam National University) ;
- Song, Hee-Eun (Korea Institute of Energy Research) ;
- Yu, Gwon-Jong (Korea Institute of Energy Research) ;
- Lee, Hi-Deok (Dept. of Electronic Eng, Chungnam National University)
- Published : 2011.04.07
Abstract
The doping procedure in crystalline silicon solar cell fabrication usually contains oxygen injection during drive-in process and removal of phosphorous silicate glass(PSG). In this paper, we studied the effect of oxygen injection and PSG on conversion efficiency of solar cell. The mono crystalline silicon wafers with
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