• Title/Summary/Keyword: annealing conditions

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Laser annealing on ZnO:P thin films (ZnO:P 박막의 레이저 어닐링 연구)

  • Chang, Hyun-Woo;Kang, Hong-Seong;Kim, Gun-Hee;Lim, Sung-Hoon;Lee, Sang-Yeol
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2005.11a
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    • pp.51-52
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    • 2005
  • Phosphorus doped ZnO thin films on (001) $Al_2O_3$ substrate have been prepared by a pulsed laser deposition (PLD) technique using a Nd:YAG laser. After deposition, phosphorus doped ZnO thin films have been annealed in vacuum, air, nitrogen, and oxygen ambients using pulsed Nd:YAG laser. We report the electrical properties of phosphorus doped ZnO thin films with the variation of the laser annealing conditions for the applications of optoelectronic devices.

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Characteristics of CdS thin film depending on annealing temperature (열처리온도에 따른 CdS박막 특성)

  • 김성구;박계춘;유용택
    • Electrical & Electronic Materials
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    • v.7 no.1
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    • pp.49-56
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    • 1994
  • Polycrystalline CdS thin films were deposited by using EBE method and its crystal structure, surface morphology, electrical and optical properties as a function of annealing temperature were investigated. It was found that optimum growth conditions were substrate temperature annealing temperature 300[.deg. C]. The films were hexagonal structure preferred(002) plane and maximum grain size was 421[.angs.]. As the results, resistivity and optical transmittance of CdS thin films were $8.3{\times}{10^3}$[.ohm.cm] and 89[%] respectively.

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Synthesis of Graphene Using 3C-SiC Thin Films with Thermal Annealing Conditions (열처리 조건에 따른 3C-SiC 박막을 이용한 그래핀 합성)

  • Kim, Kang-San;Chung, Gwiy-Sang
    • Journal of Sensor Science and Technology
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    • v.21 no.5
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    • pp.385-388
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    • 2012
  • This paper describes the synthesis and characterization of graphene by RTA process. Amorphous 3C-SiC were deposited using APCVD for carbon source and Ni layer were employed for transition layer. Various parameters of the ramping speed, the annealing time and the cooling speed are evaluated for the optimized combination allowed for the reproducible fabrication of graphene using 3C-SiC thin film. For analysis of crystalline Raman spectra was employed. Transferred graphene shows a high IG/ID ratio of 2.73. SEM and TEM images show the optical transparency and 6 carbon network, respectively. Au electrode deposited on the transferred graphene shows linear I-V curve and its resistance is 358 ${\Omega}$.

Structural Properties of SCT Thin Film with Deposition and Annealing Temperature (증착 및 열처리온도에 따른 SCT 박막의 구조적인 특성)

  • Kim, Jin-Sa
    • Journal of the Semiconductor & Display Technology
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    • v.6 no.3
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    • pp.41-45
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    • 2007
  • The (SrCa)$TiO_3$(SCT) thin films were deposited on Pt-coated electrode(Pt/TiN/$SiO_2$/Si) using RF sputtering method according to the deposition condition. The crystallinity of SCT thin films were increased with increase of deposition temperature in the temperature range of $100{\sim}500[^{\circ}C]$. The optimum conditions of RF power and Ar/$O_2$ ratio were 140[W] and 80/20, respectively. Deposition rate of SCT thin films was about $18.75[{\AA}/min]$ at the optimum condition. The composition of SCT thin films deposited on Si substrate is close to stoichiometry (1.081 in A/B ratio). The maximum dielectric constant of SCT thin film was obtained by annealing at $600[^{\circ}C]$.

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Effect of Pre/Post-Treatment on the Performance of Cu(In,Ga)(S,Se)2 Absorber Layer Manufactured in a Two-Step Process (KCN 에칭 및 CdS 후열처리가 Cu(In,Ga)(S,Se)2 광흡수층 성능에 미치는 영향)

  • Kim, A-Hyun;Lee, GyeongA;Jeon, Chan-Wook
    • New & Renewable Energy
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    • v.17 no.4
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    • pp.36-45
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    • 2021
  • To remove the Cu secondary phase remaining on the surface of a CIGSSe absorber layer manufactured by the two-step process, KCN etching was applied before depositing the CdS buffer layer. In addition, it was possible to increase the conversion efficiency by air annealing after forming the CdS buffer layer. In this study, various pre-treatment/post-treatment conditions wereapplied to the S-containing CIGSSe absorber layerbefore and after formation of the CdS buffer layer to experimentally confirm whether similareffects as those of Se-terminated CIGSe were exhibited. Contrary to expectations, it was noted that CdS air annealing had negative effects.

Influence of W Additions on the Corrosion Characteristics and Hardness of Super Duplex Stainless Steel (슈퍼 듀플렉스 내식강의 부식특성 및 경도에 미치는 텅스텐 첨가의 영향)

  • Yun-Gi Han;Jeong-Min Kim
    • Journal of the Korean Society for Heat Treatment
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    • v.36 no.5
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    • pp.261-269
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    • 2023
  • This study aims to investigate the effects of tungsten additions on the microstructure, corrosion characteristics, and hardness of super duplex stainless steel heat-treated at two different annealing temperatures. Under the annealing temperature of 1100℃, the microstructure of the stainless steels consisted mainly of ferrite, while under the annealing temperature of 1000℃, significant amounts of austenite and secondary phases were also observed. In terms of corrosion characteristics in 3.5 wt%NaCl solution, there was not a significant difference due to W addition at the 1100℃ conditions. However, at the 1000℃, a tendency of decreased corrosion resistance was observed with increasing the tungsten content. On the other hand, the micro-hardness of the stainless steel heat-treated 1000℃ showed an increasing trend with tungsten addition. This increase can be mainly attributed to the higher fraction of secondary phases, primarily sigma, known for their high hardness.

Effect on the Thermal Treatment for Improving Efficiency in Silicon Heterojunction Solar Cells (이종접합 실리콘 태양전지의 효율 개선을 위한 열처리의 효과)

  • Hyeong Gi Park;Junsin Yi
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.37 no.4
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    • pp.439-444
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    • 2024
  • This study investigates the post-thermal treatment effects on the efficiency of silicon heterojunction solar cells, specifically examining the influence of annealing on p-type microcrystalline silicon oxide and ITO thin films. By assessing changes in carrier concentration, mobility, resistivity, transmittance, and optical bandgap, we identified conditions that optimize these properties. Results reveal that appropriate annealing significantly enhances the fill factor and current density, leading to a notable improvement in overall solar cell efficiency. This research advances our understanding of thermal processing in silicon-based photovoltaics and provides valuable insights into the optimization of production techniques to maximize the performance of solar cells.

(A Study on the Annealing Methods for the Formation of Shallow Junctions) (박막 접합 형성을 위한 열처리 방법에 관한 연구)

  • 한명석;김재영;이충근;홍신남
    • Journal of the Institute of Electronics Engineers of Korea TE
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    • v.39 no.1
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    • pp.31-36
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    • 2002
  • Low energy boron ions were implanted into the preamorphized and crystalline silicon substrates to form 0.2${\mu}m$ $p^+-n$ junctions. The rapid thermal annealing(RTA) was used to annihilate the crystal defects due to implantation and to activate the implanted boron ions, and the furnace annealing was employed to reflow the BPSG(bolo-phosphosilicate glass). The implantation conditions for Gepreamorphization were the energy of 45keV and the dose of 3$\times$1014cm-2. BF2 ions employed as a p-type dopant were implanted with the energy of 20keV and the dose of 2$\times$1015cm-2. The thermal conditions of RTA and furnace annealing were $1000^{\circ}C$/10sec and $850^{\circ}C$/40min, respectively. The junction depths were measured by SIMS and ASR techniques, and the 4-point probe was used to measure the sheet resistances. The electrical characteristics were analyzed via the leakage currents of the fabricated diodes. The single thermal processing with RTA produced shallow junctions of good qualities, and the thermal treatment sequence of furnace anneal and RTA yielded better junction characteristics than that of RTA and furnace anneal.

Effect of the Annealing Conditions on the Ferromagnetic Resonance of YIG Thin Film Prepared on GGG Substrate (Gd3Ga5O12 기판위에 성장된 Y3Fe5O12 박막의 열처리 조건에 따른 강자성 공명 특성 연구)

  • Lee, Yelim;Phuoc, Cao Van;Park, Seung-Young;Jeong, Jong-Ryul
    • Korean Journal of Materials Research
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    • v.25 no.12
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    • pp.703-707
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    • 2015
  • In this study, we investigated the effect of annealing conditions on the ferromagnetic resonance(FMR) of yttrium iron garnet ($Y_3Fe_5O_{12}$, YIG) thin film prepared on gadolinium gallium garnet ($Gd_3Ga_5O_{12}$, GGG) substrate. The YIG thin films were grown by rf magnetron sputtering at room temperature and were annealed at various temperatures from 700 to $1000^{\circ}C$. FMR characteristics of the YIG thin films were investigated with a coplanar waveguide FMR measurement system in a frequency range from 5 to 20 GHz. X-ray diffraction(XRD) and X-ray photoelectron spectroscopy(XPS) were used to characterize the phase formation, crystal structure and composition of the YIG thin films. Field dependent magnetization curves at room temperature were obtained by using a vibrating sample magnetometer(VSM). The FMR measurements revealed that the resonance magnetic field was highly dependent on the annealing condition: the lowest FMR linewidth can be observed for the $800^{\circ}C$ annealed sample, which agrees with the VSM results. We also found that the Fe and O composition changes during the annealing process play important roles in the observed magnetic properties.

Effect of Annealing Conditions on Properties of BSCCO-2212 Bulk (열처리조건이 BSCCO-2212 벌크의 특성에 미치는 영향)

  • Kim, Kyu-Tae;Kim, Chan-Joong;Lim, Jun-Hyung;Park, Eui-Cheol;Park, Jin-Hyun;Joo, Jin-Ho;Hyun, Ok-Bae;Kim, Hye-Rim
    • Progress in Superconductivity
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    • v.9 no.2
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    • pp.193-198
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    • 2008
  • We fabricated BSCCO-2212(2212) bulk superconductors by using a casting process and evaluated the superconducting properties. The effects of annealing conditions on microstructure and critical properties were studied. It was found that the homogeneous and uniform microstructure improved the critical properties and the microstructures of ingot and annealed rods were different with the size of 2212 rod and tube. The critical current($I_c$) of rods increased with increasing annealing time, probably due to increased grain size of 2212. Annealing time of the highest $I_c$ for the smaller rod(diameter of 10 mm) was shorter(150 hr) than that of the larger rod(diameter of 16 mm, 400 hr). This size effect seems to be related to different grain sizes of the intermediate phases such as 2201 and secondary phases in the ingot. In addition, we fabricated 2212 tubes from the rod by removing the center region which contained inhomogeneous microstructures. The $I_c$ of 2212 tube with the outer diameter of 16 mm and the thickness of 2 mm was measured to 844 A, which corresponds to the critical current density of $1017\;A/cm^2$ at 77 K.

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