• Title/Summary/Keyword: amorphous silicon thin-film transistor

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The Influence of the Change of Patient Radiation Exposure Dose Distribution on the Grid Condition and Detector Acquisition Dose on the Exposure Distance in the Use of Amorphous Silicon Thin Film Transistor Detector with AEC (자동노출제어장치를 이용한 비정질 실리콘 평판형 검출기에서 격자의 조건에 따른 환자선량 변화와 촬영 거리의 변화가 검출기 획득선량에 미치는 영향)

  • Yoon, Seok-Hwan;Choi, Jun-Gu;Han, Dong-Kyoon
    • Korean Journal of Digital Imaging in Medicine
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    • v.9 no.2
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    • pp.23-30
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    • 2007
  • This study attempts to propose an appropriate method of using digital medical imaging equipments, by studying the effects of automatic exposure control(AEC), grid ratio and the change of radiography distance on the patient dose and detertor acquisition dose during the procedure of acquiring image through a digital medical imaging detector. The change of dose following the change of grid ratio's exposure and radiography distance was measured, by using an abdominal phantom organized with tissue equivalent materials in an amorphous silicon thin film transistor detecter installed with AWC. The case to use grid ratio 12 : 1, focal distance 180cm to radiography distance 110cm in AEC, the patient dose increased rather when we used grid ration 10 : 1, focal distance 110cm. When AEC was not used,the dose necessary for image acquisition decreased as the grid ratio became higher and the distance became further. but detector acquisition dose was not reduced when in applied AEC. When purchasing digiral medical imaging equipments, optional items such as AEC and grid shall be accurately selected to satisfy the use of the equipments. Radiography error made by radiation technologist and unnenessary patient dose can be reduced by selecting equipments with a radiography distance marker equipment when it did not apply AEC. These equipments can also be helpful in maintaining high imaging quality, one of the merits of digital detectors.

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Thermally Induced Metastability in Boron-Doped Amorphous Silicon Thin Film Transistor (보론 도우핑된 비정질 실리콘 박막 트랜지스터의 열에 의한 준안정성 연구)

  • Lee, Yi-Sang;Chu, Hye-Yong;Jang, Jin
    • Journal of the Korean Institute of Telematics and Electronics
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    • v.26 no.3
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    • pp.130-136
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    • 1989
  • Electrical transport and thermally induced metastability in hydrogenated amorphous silicon (a-Si:H) thin film transistors (TFTs) using boron-doped amorphous silicon as an active layer have been studied. The device characteristics n-channel and p-channel operations. The thermal quenching experiments on amorphous silicon-silicon nitride ambipolar TFT give clear evidence for the co-existence of two distinct metastable changes. The densities of metastable active dopants and dangling bonds increase with the quenching temperature. On the other hand, the interface state density appears to decrease with increasing quenching temperature.

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Magnetic Field-Assisted, Nickel-Induced Crystallization of Amorphous Silicon Thin Film

  • Moon, Sunwoo;Kim, Kyeonghun;Kim, Sungmin;Jang, Jinhyeok;Lee, Seungmin;Kim, Jung-Su;Kim, Donghwan;Han, Seung-Hee
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.313-313
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    • 2013
  • For high-performance TFT (Thin film transistor), poly-crystalline semiconductor thin film with low resistivity and high hall carrier mobility is necessary. But, conventional SPC (Solid phase crystallization) process has disadvantages in fabrication such as long annealing time in high temperature or using very expensive Excimer laser. On the contrary, MIC (Metal-induced crystallization) process enables semiconductor thin film crystallization at lower temperature in short annealing time. But, it has been known that the poly-crystalline semiconductor thin film fabricated by MIC methods, has low hall mobility due to the residual metals after crystallization process. In this study, Ni metal was shallow implanted using PIII&D (Plasma Immersion Ion Implantation & Deposition) technique instead of depositing Ni layer to reduce the Ni contamination after annealing. In addition, the effect of external magnetic field during annealing was studied to enhance the amorphous silicon thin film crystallization process. Various thin film analytical techniques such as XRD (X-Ray Diffraction), Raman spectroscopy, and XPS (X-ray Photoelectron Spectroscopy), Hall mobility measurement system were used to investigate the structure and composition of silicon thin film samples.

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Two-Dimensional Device Simulator TFT2DS for Hydrogenated Amorphous Silicon Thin Film Transistors (수소화된 비정질 실리콘 박막 트랜지스터의 이차원 소자 시뮬레이터 TFT2DS)

  • Choe, Jong-Seon;Neudeck, Gerold W.
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.48 no.1
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    • pp.1-11
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    • 1999
  • Hyrdogenated amorphous silicon thin film transistors are used as a pixel switching device of TFT-LCDs and very active research works on a-Si:H TFTs are in progress. Further development of the technology based on a-Si:H TFTs depends on the increased understanding of the device physics and the ability to accurately simulate the characteristics of them. A two-dimensional device simulator based on the realistic and flexible physical models can guide the device designs and their optimizations. A non-uniform finite-difference TFT Simulation Program, TFT2DS has been developed to solve the electronic transport equations for a-Si:H TFTs. In TFT2DS, many of the simplifying assumptions are removed. The developed simulator was used to calculate the transfer and output characteristics of a-Si:H TFTs. The measured data were compared with the simulated ones for verifying the validity of TFT2DS. Also the transient behaviors of a-Si:H TFTs were calculated even if the values of the related parameters are not accurately specified.

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Joule-heating Induced Crystallization (JIC) of Amorphous Silicon Films

  • Ko, Da-Yeong;Ro, Jae-Sang
    • Journal of the Microelectronics and Packaging Society
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    • v.25 no.4
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    • pp.101-104
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    • 2018
  • An electric field was applied to a Mo conductive layer in the sandwiched structure of $glass/SiO_2/Mo/SiO_2/a-Si$ to induce Joule heating in order to generate the intense heat needed to carry out the crystallization of amorphous silicon. Polycrystalline silicon was produced via Joule heating through a solid state transformation. Blanket crystallization was accomplished within the range of millisecond, thus demonstrating the possibility of a new crystallization route for amorphous silicon films. The grain size of JIC poly-Si can be varied from few tens of nanometers to the one having the larger grain size exceeding that of excimer laser crystallized (ELC) poly-Si according to transmission electron microscopy. We report here the blanket crystallization of amorphous silicon films using the $2^{nd}$ generation glass substrate.

Metallizations and Electrical Characterizations of Low Resistivity Electrodes(Al, Ta, Cr) in the Amorphous Silicon Thin Film Transistor (비정질 실리콘 박막 트랜지스터 소자 특성 향상을 위한 저 저항 금속 박막 전극의 형성 및 전기적 저항 특성 평가)

  • Kim, Hyung-Taek
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1993.05a
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    • pp.96-99
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    • 1993
  • Electrical properties of the Thin Film Transistor(TFT) electrode metal films were investigated through the Test Elements Group(TEG) experiment. The main purpose of this investigation was to characterize the electrical resistance properties of patterned metal films with respect to the variations of film thickness and TEG metal line width. Aluminum(Al), Tantalum(Ta) and Chromium(Cr) that are currently used as TFT electrode films were selected as the probed metal films. To date, no work in the electrical characterizations of patterned electrodes of a-Si TFT was accomplished. Bulk resistance$(R_b)$, sheet resistance$(R_s)$, and resistivities($\rho$) of TEG patterned metal lines were obtained. Electrical continuity test of metal film lines was also performed in order to investigate the stability of metallization process. Almost uniform-linear variations of the electrical properties with respect to the metal line displacements was also observed.

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Operating Characteristics of Amorphous GeSe-based Resistive Random Access Memory at Metal-Insulator-Silicon Structure (금속-절연층-실리콘 구조에서의 비정질 GeSe 기반 Resistive Random Access Memory의 동작 특성)

  • Nam, Ki-Hyun;Kim, Jang-Han;Chung, Hong-Bay
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.29 no.7
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    • pp.400-403
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    • 2016
  • The resistive memory switching characteristics of resistive random access memory (ReRAM) using the amorphous GeSe thin film have been demonstrated at Al/Ti/GeSe/$n^+$ poly Si structure. This ReRAM indicated bipolar resistive memory switching characteristics. The generation and the recombination of chalcogen cations and anions were suitable to explain the bipolar switching operation. Space charge limited current (SCLC) model and Poole-Frenkel emission is applied to explain the formation of conductive filament in the amorphous GeSe thin film. The results showed characteristics of stable switching and excellent reliability. Through the annealing condition of $400^{\circ}C$, the possibility of low temperature process was established. Very low operation current level (set current: ~ ${\mu}A$, reset current: ~ nA) was showed the possibility of low power consumption. Particularly, $n^+$ poly Si based GeSe ReRAM could be applied directly to thin film transistor (TFT).

Trend of Crystallization Technology and Large Scale Research for Fabricating Thin Film Transistors of AMOLED Displays (AMOLED 디스플레이의 박막트랜지스터 제작을 위한 결정화 기술 동향 및 대형화 연구)

  • Kim, Kyoung-Bo;Lee, Jongpil;Kim, Moojin;Min, Youngsil
    • Journal of Convergence for Information Technology
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    • v.9 no.5
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    • pp.117-124
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    • 2019
  • This paper discusses recent trends in the fabrication of semiconducting materials among the components of thin film transistors used in AMOLED display. In order to obtain a good semiconductor film, it is necessary to change the amorphous silicon into polycrystalline silicon. There are two ways to use laser and heat. Laser-based methods include sequential lateral solidification (SLS), excimer laser annealing (ELA), and thin-beam directional crystallization (TDX). Solid phase crystallization (SPC), super grain silicon (SGS), metal induced crystallization (MIC) and field aided lateral crystallization (FALC) were crystallized using heat. We will also study research for manufacturing large AMOLED displays.

Circuit Modeling of Amorphous Silicon Thin Film Transistor (비정질 실리콘 박막 트랜지스터의 회로 해석 모델링)

  • Choi, Hong-Seok;Park, Jin-Seok;Choi, Yeon-Ik;Han, Min-Koo
    • Proceedings of the KIEE Conference
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    • 1990.11a
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    • pp.106-109
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    • 1990
  • We develop the analytical model of the static and dynamic characteristics of hydrogenated amorphous silicon thin film transistors. It is found out that, compared with the conventional MOS model, our a-Si model has been in better agreement with experimental static and dynamic results. It may be also suggested that our a-Si model is suitable for incorporation into a widely used curcuit simulation.

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Fabrication and New Model of Saturated I-V Characteristics of Hydrogenerated Amorphous Silicon Thin Film Transistor (비정질 실리콘 박막 트랜지터 포화전압 대 전류특성의 새로운 모델)

  • Lee, Woo-Sun;Kang, Yong-Chul;Yang, Tae-Hwan;Chung, Hae-In
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1992.11a
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    • pp.3-6
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    • 1992
  • A new analytical expression for the saturated I-V characteristics of hydrogenerated amorphous silicon thin film transistors(a-si:H TFT) is presented and experimentally verified. The results show that the experimental transfer and output characteristics at several temperatures are easily modeled. The model is based on three functions obtained from the experimental data of $I_D$ versus $V_G$. Theoretical results confirm the simple form of the model in terms of the device geometry. It was determined that the saturated drain current increased at a fixed gate voltage and the device saturated at increasingly larger drain voltages while the threshold voltages decreased.

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