• Title/Summary/Keyword: alloy 600

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Thermal Stability of Ta-Mo Alloy Film on Silicon Dioxide (실리콘 산화막에 대한 Ta-Mo 합금 게이트의 열적 안정성)

  • 노영진;이충근;홍신남
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.17 no.4
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    • pp.361-366
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    • 2004
  • The interface stability of Ta-Mo alloy film on SiO$_2$ was investigated. Ta-Mo alloy films were formed by co-sputtering method, and the alloy composition was varied by controlling Ta and Mo sputtering power, When the atomic composition of Ta was about 91%, the measured work function was 4.24 eV that is suitable for NMOS gate. To identify interface stability between Ta-Mo alloy film and SiO$_2$, C-V and XRD measurements were performed on the samples annealed with rapid thermal processor between $600^{\circ}C$ and 90$0^{\circ}C$. Even after 90$0^{\circ}C$ rapid thermal annealing, excellent interface stability and electrical properties were observed. Also, thermodynamic analysis was studied to compare with experimental results.

A Study on the Reliability of Ru-Zr Metal Gate with Thin Gate Oxide (박막 게이트 산화막에 대한 Ru-Zr 금속 게이트의 신뢰성에 관한 연구)

  • 이충근;서현상;홍신남
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.53 no.4
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    • pp.208-212
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    • 2004
  • In this paper, the characteristics of co-sputtered Ru-Zr metal alloy as gate electrode of MOS capacitors have been investigated. The atomic compositions of alloy were varied by using the combinations of relative sputtering power of Ru and .Zr. C-V and I-Vcharacteristics of MOS capacitors were measured to find the effective oxide thickness and work function. The alloy made of about 50% of Ru and 50% of Zr exhibited an adequate work function for nMOS. C-V and I-V measurements after 600 and $700^{\circ}C$ rapid thermal annealing were performed to prove the thermal and chemical stability of the Ru-Zr alloy film. Negligible changes in the accumulated capacitance and work function before and after annealing were observed. Sheet resistance of Ru-Zr alloy was lower than that of poly-silicon. It can be concluded that the Ru-Zr alloy can be a possible substitute for the poly-silicon used as a gate of nMOS.

Characteristics of Ta-Ti Gate Electrode for NMOS Device (NMOS 소자의 Ta-Ti 게이트 전극 특성)

  • Kang, Young-Sub;Seo, Hyun-Sang;Noh, Young-Gin;Lee, Chung-Keun;Hong, Shin-Nam
    • Journal of Advanced Navigation Technology
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    • v.7 no.2
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    • pp.211-216
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    • 2003
  • In this paper, characteristics of Ta-Ti alloy was studied as a gate electrode for NMOS devices to replace the widely used polysilicon. Ta-Ti alloy was deposited directly on $SiO_2$ by a co-sputtering method using two of Ta and Ti targets. The sputtering power of each metal target was 100W. To compare with Ta-Ti, Ta deposited with a 100W sputtering power was fabricated as well. In order to investigate the thermal/chemical stability of the Ta-Ti alloy gate, the alloy was annealed at $600^{\circ}C$ with rapid thermal annealer. No appreciable degradation of the device was observed. Also the results of electrical analysis showed that the work function of Ta-Ti metal alloy was about 4.1eV which was suitable for NMOS devices and sheet resistance of alloy was lower than that of polysilicon.

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Ordering of Alloy 690 Steam Generator Tubings in a Nuclear Power Plant (원자력발전소 증기발생기 Alloy 690 전열관 재료의 규칙화 반응)

  • Seong Sik Hwang;Min Jae Choi;Sung Woo Kim
    • Corrosion Science and Technology
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    • v.22 no.3
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    • pp.214-219
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    • 2023
  • Considering the case in the United States where most nuclear power plants with an initial design life of 40 years continue to operate until 60 or 80 years after undergoing material soundness evaluation, it is time to plan a more robust long-term operation strategy for nuclear power plants in Korea. There are some reports that SRO/LRO might be formed when Alloy 690 is heat treated for 10,000 hours to 100,000 hours at 360 to 450 ℃. The possibility of LRO formation in Alloy 690 steam generator tubings of Kori nuclear power plant unit 1 (Kori-1) was investigated using existing research papers. The mechanism in which SRO/LRO occurred was also surveyed. Alloy 690 was found to be more likely to cause ordering than Alloy 600 in terms of alloy composition. The ordering could be evaluated through changes in material properties. However, it is difficult to evaluate it from a microstructural point of view. The likelihood of LRO in Alloy 690 of the Kori-1 plant operated at 320 ℃ for 19 years seemed to be low in terms of time and exposure temperature.

Characteristics of the laser brazing on AZ31 magnesium alloy and Zn coated steel dissimilar joint (AZ31 마그네슘합금과 아연도금강판 이종소재의 레이저 브레이징 특성)

  • Lee, Mok-Young;Kim, Sook-Whan;NASIRI, ALI M.;ZHOU, NORMAN Y.
    • Laser Solutions
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    • v.17 no.1
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    • pp.7-12
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    • 2014
  • The dissimilar welding between magnesium alloy and steel sheet was required in automobile industry to increase the strength of the dissimilar joints. Laser brazing is one of the good joining processes for Mg- steel dissimilar joint. In this study, AZ31 magnesium alloy and Zn coated steel dissimilar joint was brazed using diode direct laser with Mg600 filler wire and Superior #21 flux. The wetting of Mg filler wire on Zn coating was very good because of the formation of eutectic phase with low melting temperature. The strength of the brazed joint between AZ31 magnesium alloy and Zn coated steel was 131.3N/mm. The fracture occurred at brazement.

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Properties of Ru1Zr1 Alloy Gate Electrode for NMOS Devices (NMOS 소자에 대한 Ru1Zr1 합금 게이트 전극의 특성)

  • Lee, Chung-Keun;Kang, Young-Sub;Hong, Shin-Nam
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.17 no.6
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    • pp.602-607
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    • 2004
  • This paper describes the characteristics of Ru-Zr alloy gate electrodes deposited by co-sputtering. The various atomic composition was made possible by controlling sputtering power of Ru and Zr. Thermal stability was examined through 600 and 700 $^{\circ}C$ RTA annealing. Variation of oxide thickness and X-ray diffraction(XRD) pattern after annealing were employed to determine the reaction at interface. Low and relatively stable sheet resistances were observed for Ru-Zr alloy after annealing. Electrical properties of alloy film were measured from MOS capacitor and specific atomic composition of Zr and Ru was found to yield compatible work function for nMOS. Ru-Zr alloy was stable up to $700^{\circ}C$ while maintaining appropriate work function and oxide thickness.

Dissimilar Metal Welding of Inconel 600 and STS304 by a continuous wave Nd:YAG Laser (연속파형 Nd:YAG레이저를 이용한 Inconel 600와 STS 304의 이종금속용접)

  • Shin, Ho-Jun;Yoo, Young-Tae;Song, Seong-Wook
    • Proceedings of the KSME Conference
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    • 2004.04a
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    • pp.1120-1125
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    • 2004
  • Welding characteristics of STS304 stainless steel and Inconel 600 using a continuous wave Nd:YAG laser are experimentally investigated. Alloy 600 being used in steam generator tubing of pressurized water reactor(PWR) exposed to some corrosion environment, stress corrosion cracking can occur on this material. Presented here are the results from a series of experiments in which dissimilar metal welds were made using the gas tungsten arc welding process with pure argon shielding gas. But It is well known that solidification cracking susceptibility of austenitic alloys depends on the solidification temperature range and amount/distribution of solute rich liquid that exists at the terminal stages of solidification. An experimental study was conducted to determine effects of welding parameters and to optimize those parameters that have the most influence on eliminating or reducing the extent welding zone formation at dissimilar metal welds.

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Microscopic Study on the Laser Surface-Melted Alloy 600

  • Lim, Yun-Soo;Cho, Hai-Dong;Kuk, Il-Hiun;Kim, Joung-Soo
    • Proceedings of the Korean Nuclear Society Conference
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    • 1996.05c
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    • pp.347-352
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    • 1996
  • Studies on tile microstructural and compositional changes in sensitized Ni base Alloy 600 by laser surface melting have been carried out using TEM equipped with EDXA. The microstructure of the laser melted zone was mainly consisted of fine cells, and along the cell and grain boundaries, Cr enrichment due to its segregation was observed. Cr carbides having formed along the grain bundaries during the sensitization treatment have been completely dissloved. The cell walls were decorated with dislocations and the very tiny precipitates, found to be Ti(CN) type, were distributed randomly along the cell walls with tangled dislocations around them.

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Microstructural Evolution during the Equal Channel Angular Pressing of Ti-6Al-4V Alloy (Ti-6Al-4V 합금의 ECAP 가공시 미세 조직의 변화 연구)

  • 고영건;정원식;신동혁;이종수
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2002.05a
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    • pp.177-180
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    • 2002
  • The effects of pressing temperatures on the formability and the microstructural evolution during equal channel angular pressing (ECAP) of lamellar Ti-6Al-4V alloy were investigated in this study. ECAP above isothermally 600$^{\circ}C$ was successful without producing any noticeable segments at the specimen surfaces after a single pass of pressing. After 4 passes of ECA pressing, lamellar microstructures were significantly refined revealing equiaxed grains of 0.3$\mu\textrm{m}$ in diameter consisting of high angle grain boundaries. Also these ultrafine grains were relatively stable with little grain growth when annealed up to 600$^{\circ}C$ for 1hour.

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The study on the thermal stability with the changing current density of the electrodeposited Ni-P-Fe was formed inside Alloy600 tube (Alloy600 튜브 내면에 형성된 Ni-P-Fe 전기도금층의 전류밀도 변화와 열적안정성 대한 연구)

  • Kim, Myeong-Jin;Kim, Dong-Jin;Kim, Jeong-Su;Kim, Hong-Pyo
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2009.10a
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    • pp.153-154
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    • 2009
  • 원자력발전소 증기발생기 전열관 보수 기술의 하나로 니켈 합금 전기 도금이 연구되고 있다. 여러 도금 공정변수 중 peak current density를 달리하여 Ni-P-Fe 전기도금층을 제조한 뒤, 열처리 온도 $325^{\circ}C$에서 10, 30일간 열처리를 한 후, 인장강도와 연신율을 측정하고, 그 파단면을 관찰하였다. 50mA/$cm^2$로 제조된 도금층은 100mA/$cm^2$로 제조된 도금층에 비해 우수한 열적안정성을 가짐을 알 수 있었다.

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