• Journal of Periodontal and Implant Science
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• 제26권1호
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• pp.244-254
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• 1996

The periodontal probe is a commonly used instrument to assess periodontal conditions. And so, there has been many studies to develop the accuracy and reproducibility of the periodontal probe. The purpose of this study was to compare two different periodontal probes for measurement reliability and time required to use in subjects with moderate periodontitis. It was done after evaluating reproducibility of probing depth by stent guiding for a Manual probe and a Florida probe in subjects with healthy periodontal condition. The results were as follows 1. In experiment to evaluate the reproducibility of probing depth by stent guiding for a Manual probe and Florida probe in subjects with healthy periodontal condition, there was no major significant difference between intraprobe and interprobe relationships. 2. There were reduced probing measuremint error by using the Florida probe for posterior teeth and by using the Manual probe for anterior teeth of subjects with moderate periodontitis. 3. At proximal area, there was higher measurement error by using the Manual probe than the Florida probe. 4. The mean of pocket depth measurement using Manual probe was signifi cantly higher than that using Florida probe(p<0.05). With increasing pocket depth, interprobe difference increased and reproducibility reduced. 5. There was no significant difference in time required to use between Manual probe and Florida probe(p<0.05). 6. There was slight probing measurement difference between Manual probe and Florida probe at different site, but both probes have similar degrees of reproducibility and similar time required to probe.

• E2M - 전기 전자와 첨단 소재
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• 제9권5호
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• pp.506-511
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• 1996

This paper deals with an inexpensive, simple and fast Langmuir probe sweeping circuit and its application. This sweeper completes a probe trace in a 1 ms order. Futhermore, the circuit drives a maximum probe voltage of $\pm$30V and has a maximum probe current capability of a few amperes. The plasma parameters are successfully determined using the fast Langmuir probe method.

• 한국전기전자재료학회논문지
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• 제18권12호
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• pp.1087-1091
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• 2005

Four-probe device of single ZnO nanowire was fabricated by electron beam lithography. Electrical characterizations in a two-probe and a four-probe configuration with a back-gate were carried out to clarify the relative contribution of the contact and the intrinsic part in a ZnO nanowire. I-V characteristic in four-probe measurement showed an ohmic behavior with a high conductivity, 100 S/cm, which was better than those of two-probe measurement by 10 times. At the same values of the current between two-probe and four-probe, the net voltage applied inside the nanowire were extracted with calculated voltages at the contact. Four-probe current-gate voltage characteristics showed bigger tendencies than those of two-probe measurement at low temperatures, indicating the reduced gate dependence in two-Probe measurements by the existence of the contact resistance.

• ETRI Journal
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• 제27권4호
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• pp.433-438
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• 2005

We present a new type of silicon micro-probe card using a three-dimensional probe beam of the cantilever type. It was fabricated using KOH and dry etching, a porous silicon micromachining technique, and an Au electroplating process. The cantilever-type probe beam had a thickness of $5 {\mu}m$, and a width of $50{\mu}$ and a length of $800 {\mu}m$. The probe beam for pad contact was formed by the thermal expansion coefficient difference between the films. The maximum height of the curled probe beam was $170 {\mu}m$, and an annealing process was performed for 20 min at $500^{\circ}C$. The contact resistance of the newly fabricated probe card was less than $2{\Omega}$, and its lifetime was more than 20,000 turns.

• 한국항공운항학회지
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• 제14권1호
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• pp.43-48
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• 2006

The present study was carried out in order to develope a seven-hole pressure probe which is able to measure high flow angles. The seven-hole pressure probe is a non-nulling, directional velocity probe used for measuring three dimensional flow that having high flow angles. A 4 mm diameter seven-hole conical pressure probe was manufactured with a cone angle of 70$^{\circ}$. The probe was comprised of seven 1 mm diameter stainless steel tubes packed close together and fitted into an outer stainless steel sleeve. The calibration procedure is based on the use of the Callington's polynomial curve-fit method. The validity of the seven-hole conical pressure probe is demonstrated by comparisons with hot-wire data.

• Nuclear Engineering and Technology
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• 제32권5호
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• pp.433-445
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• 2000

The interfacial area concentration (IAC) is one of the most important parameters in the two-fluid model for two-phase flow analysis. The IAC can be measured by a local conductivity probe method that uses the difference of conductivity between water and air/steam. The number of sensors in the conductivity probe may be differently chosen by considering the flow regime of two-phase flow. The four sensor conductivity probe method predicts the IAC without any assumptions of the bubble shape. The local IAC can be obtained by measuring the three dimensional velocity vector elements at the measuring point, and the directional cosines of the sensors. The five sensor conductivity probe method proposed in this study is based on the four sensor probe method. With the five sensor probe, the local IAC for a given referred measuring area of the probe can be predicted more exactly than the four sensor probe. In this paper, the mathematical approach of the five sensor probe method for measuring the IAC is described, and a numerical simulation is carried out for ideal cap bubbles of which the sizes and locations are determined by a random number generator.

• KIEE International Transactions on Electrophysics and Applications
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• 제4C권4호
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• pp.149-154
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• 2004

This paper presents a silicon probe tip for vertical probe card application. The silicon probe tip was fabricated using MEMS technology such as porous silicon micromachining and deep- RIE (reactive ion etching). The thickness of the silicon epitaxial layers was 5 ${\mu}{\textrm}{m}$ and 7 ${\mu}{\textrm}{m}$, respectively. The width and length were 40 ${\mu}{\textrm}{m}$ and 600 ${\mu}{\textrm}{m}$, respectively. The probe structure was a multilayered structure and was composed of Au/Ni-Cr/Si$_3$N$_4$/n-epi layers. The height of the curled probe tip was measured as a function of the annealing temperature and time. Resistance characteristics of the probe tip were measured using a touchdown test.

• 한국정밀공학회지
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• 제23권6호
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• pp.166-173
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• 2006

In this study, a probe array has been developed for use in a data storage device that is based on scanning probe microscope (SPM) and MEMS technology. When recording data bits by poling the PZT thin layer and reading them by sensing its piezoresponse, commercial probes of which the tip heights are typically shorter than $3{\mu}m$ raise a problem due to the electrostatic forces occurring between the probe body and the bottom electrode of a medium. In order to reduce this undesirable effect, a poly-silicon probe with a high aspect-ratio tip was fabricated using a molding technique. Poly-silicon probes fabricated by the molding technique have several features. The tip can be protected during the subsequent fabrication processes and have a high aspect ratio. The tip radius can be as small as 15 nm because sharpening oxidation process is allowed. To drive the probe, electrostatic actuation mechanism was employed since the fabrication process and driving/sensing circuit is very simple. The natural frequency and DC sensitivity of a fabricated probe were measured to be 18.75 kHz and 16.7 nm/V, respectively. The step response characteristic was investigated as well. Overshoot behavior in the probe movement was hardly observed because of large squeeze film air damping forces. Therefore, the probe fabricated in this study is considered to be very useful in probe-based data storages since it can stably approach toward the medium and be more robust against external shock.

• 대한기계학회논문집
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• 제18권8호
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• pp.2081-2087
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• 1994

Touch trigger probes are widely used for inspection purposed in the CMM(Coordinate meauring machine) or machine tool. The errors introduced by measurement probe are fairy systematic, thus can be calibrated and compensated properly. This paper presents a technique for the error calibration and compensation of the probe errors, which can be easily applicable to the manufacturers and users of the measurement probe. The probe coordinate system is defined for the probe error assessment, and a reference sphere ball is measured, and the probe errors are calibrated. The calibrated probe errors are represented in the 3D error map and 2D error map along probing direction. Detail algorithms for the error compensation are proposed.

• Journal of Electrical Engineering and Technology
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• 제13권1호
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• pp.406-412
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• 2018

In this paper, we propose a narrow resonant waveguide probe that can improve the measurement sensitivity in near-field scanning microwave microscopy. The probe consists of a metal waveguide incorporating the following two sections: a straight section at the tip of the probe whose cross-section is a double-ridged rectangle, and whose height is much smaller than the waveguide width; and a standard waveguide section. The advantage of the narrow waveguide is the same as that of the quarter-wave transformer section i.e., it achieves impedance-matching between the sample under test (SUT) and the standard waveguide. The design procedure used for the probe is presented in detail and the performance of the designed resonant probe is evaluated theoretically by using an equivalent circuit. The calculated results are compared with those obtained using the finite element method (Ansoft HFSS), and consistency between the results is demonstrated. Furthermore, the performance of the fabricated resonant probe is evaluated experimentally. At X-band frequencies, we have measured the one-dimensional scanning reflection coefficient of the SUT using the probe. The sensitivity of the proposed resonant probe is improved by more than two times as compared to a conventional waveguide cavity type probe.