A study on fast langmuir probe driving circuit for measurement of plasma parameter and its application

플라즈마 파라메타 측정용 고속 langmuir프로브 구동회로 실현 및 적용

This paper deals with an inexpensive, simple and fast Langmuir probe sweeping circuit and its application. This sweeper completes a probe trace in a 1 ms order. Futhermore, the circuit drives a maximum probe voltage of $\pm$30V and has a maximum probe current capability of a few amperes. The plasma parameters are successfully determined using the fast Langmuir probe method.