• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.11a
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• pp.125-125
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• 2009

In this paper, we have investigated about MgO thin films on Si(100) substrate by RF magnetron Sputtering. MgO thin films were affected by RF input power, gas pressure, gas composition, and substrate temperatures. So, we focused on most effective RF input power in deposition condition. Thickness of MgO thin films was measured by surface profiler. And structural analysis carried out by X-ray Diffraction(XRD). physical characteristic and thickness of thin films changed with RF input power.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.224-225
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• 2009

Aluminium nitride thin film was deposited on Au electrode and Si substrate by radio frequency sputtering system. X-ray diffraction (XRD) was utilized to identify the AlN phase, and Atomic Force Microscope (AFM) was used to obtain the images of surface morphology and roughness value of AlN thin film. The result of XRD and AFM measurement showed that the AlN thin film has strong c-axs orientation and smooth surface. In order to investigate piezoelectric response and polarization properties along to the direction of electric field, PFM (Piezoresponse Force Microscope) system was used, and the images of piezoelectric response due to switching of polarization was observed by PFM.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.15 no.6
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• pp.518-523
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• 2002

The influences of ion beam energy and reactive oxygen partial pressure on the physical and crystallographic characteristics of transition metal oxide compound(CrOx) film were studied in this paper. Chromium oxide films were deposited onto a cover-glass using ion Beam Sputter Deposition(IBSD) technique according to the various processing parameters. Crystallinity and grain size of as-deposited films were analyzed using XRD analysis. Thickness and Resistivity of the films were measured by $\alpha$-step and 4-point probe measurement. According to the XRD, XPS and resistivity results, the deposited films were the cermet type films which had crystal structure including amorphous oxide(a-oxide) phase and metal Cr phase simultaneously. The increment of the ion beam energy during the deposition process led to decreasing of metal Cr grain size and the rapid change of resistivity above the critical $O_2$ partial pressure.

• Journal of the Korean Ceramic Society
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• v.24 no.3
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• pp.227-234
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• 1987

With the content of ZnO varing from 10.5 to 47.4 wt%, the crystallization of lithium zinc silicate glass was investigated by DTA, XRD, and SEM. In this work P2O5 was used as nucleation agent. The crystallization temperature was found to increase with the content of ZnO and the microstructure of formed crystalling phases was studied through the scanning electron microscopy. According to the XRD analysis, the crystal phases formed are summarized as follows. 1) The major phases are lithium orthosilicate, lithium disilicate and quartz at 10.5 wt% ZnO. 2) Lithium zinc silicate polymorphous and cristobalite occur in the composition varying 21.3 to 30.8 wt% ZnO. 3) At composition containing 47.4wt% ZnO some quantity of willemite is formed.

• Proceedings of the KIEE Conference
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• 1991.07a
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• pp.213-216
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• 1991

In this study, PZT powder was synthesized by coprecipitation method us ing $Pb(NO_3)2$, $ZrOCl_2{\cdot}8H_2O$ and $TiCl_4$ as starting raw materials. Homogeneous and fine-grained PZT powder was obtained by the coprecipitation method. PZT powder was characterized by DTA, SEM and XRD analysis. The XRD peaks were observed at $600(^{\circ}C)$ and over.

• Journal of The Korean Society of Agricultural Engineers
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• v.55 no.2
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• pp.65-75
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• 2013

In this study, the engineering characteristics of volcanic ash-cement soil mixtures and zeolite-cement soil mixtures are investigated by using unconfined compression test, freezing-thawing test, SEM and XRD analysis. The samples were mixed with volcanic ash from Mt. Baekdusan or porous zeolite, and cement as the ratios of 3.5:1, 4.0:1, 4.5:1, 5.0:1 with and without metakaolin. It is confirmed that compressive strength degraded with increasing of the amount of volcanic ash or zeolite, and increased with addition of metakaolin as a binder. Moreover, test results suggested that the mixtures provided sufficient freezing-thawing resistance. In addition, ettringite as a product of cement hydration was detected by SEM and XRD, and that possibly contributes to the strength of the mixtures.

• Journal of Energy Engineering
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• v.2 no.3
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• pp.300-307
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• 1993

To develop high performance nickel-iron secondary battery, the characteristics of charge-discharge reaction of iron electrode were examined by cyclic voltammetry technique, SEM and XRD analysis. The capacity of the test electrodes was determined by the constant current charge-discharge method. It was found that the temperature and concentration of electrolyte were the major determinant factors of electrode capacity, and especially the 1st discharge capacity was increased with the increase of temperature. The effect of fore forming agent on the electrode capacity was negligible. The electrode capacity was above 350 ㎃h/g(36% utility) at 0.25C discharge rate. The stability of electrode was very good, but the activation occurred slowly.

• Analytical Science and Technology
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• v.26 no.1
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• pp.27-33
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• 2013

Polyalkylsilanes such as poly(dialkyl)silanes and poly(monoalkyl)silanes were synthesized by sonochemical dechlorination-condensation method from (dialkyl or monoalkyl)chlorosilanes with sodium metal. Those polyalkylsilanes were analyzed for the properties such as thermal behaviors from TGA analysis and obtained ceramic yields of 10-20% for poly(dialkyl)silanes and 40-60% for poly(monoalkyl)silanes. Ceramic composite discs were prepared by the combined mixture of polyalkylsilanes and SiC powder and were tested by TGA and analyzed by SEM and XRD for the application as binder for ceramic composite precursors.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.07a
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• pp.165-169
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• 2001

Carbon nitride films were grown on Si (100) substrate by a laser-electric discharge method with and without a magnetic field assistance. The magnetic field leads to vapor plume plasma expending upon the ambient arc discharge plasma area. Influence of the magnetic field has resulted in increase of a crystallite size in the films due to bombardment (heating) of Si substrates by energetic carbon and nitrogen species generated during cyclotron motion of electrons in the discharge zone. Many crystalline grains were observed in the morphology of the deposited films by scanning electron microscopy. In order to determine the structural crystalline parameters, X-ray diffraction (XRD) was used to analysis the grown films.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.14 no.10
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• pp.835-844
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• 2001

In this paper, we report the successful growth of crystalline carbon nitride films in Si(100) by a laser-electric discharge method. The laser ablation of the target leads to vapor plume plasma expending into the ambient nitrogen arc discharge area. X-ray photoelectron spectroscopy (XPS) and Auger electron spectroscopy(AES) were used to identify the binding structure and the content of the nitrogen species in the deposited films. The surface morphology of the films with a deposition time of 2 hours is studied using a scanning electron microscopy (SEM). In order to determine the structural crystalline parameters, X-ray diffraction (XRD) was used to analysis the grown films.