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The Electrical Characteristics of Chromium Oxide Film Produced by Son Beam Sputter Deposition

이온선 스퍼터 증착법에 의하여 제조된 CrOx의 전기적 특성

  • 조남제 (부경대학교 대학원 기계공학과) ;
  • 이규용 (부경대학교 기계공학과)
  • Published : 2002.06.01

Abstract

The influences of ion beam energy and reactive oxygen partial pressure on the physical and crystallographic characteristics of transition metal oxide compound(CrOx) film were studied in this paper. Chromium oxide films were deposited onto a cover-glass using ion Beam Sputter Deposition(IBSD) technique according to the various processing parameters. Crystallinity and grain size of as-deposited films were analyzed using XRD analysis. Thickness and Resistivity of the films were measured by $\alpha$-step and 4-point probe measurement. According to the XRD, XPS and resistivity results, the deposited films were the cermet type films which had crystal structure including amorphous oxide(a-oxide) phase and metal Cr phase simultaneously. The increment of the ion beam energy during the deposition process led to decreasing of metal Cr grain size and the rapid change of resistivity above the critical $O_2$ partial pressure.

Keywords

References

  1. 한국진공학회지 v.4 no.2 열처리에 따른 CVD Cu 박막의 미세구조 및 전기비저항의 변화 이원준;민재식;라사균;이영중;김우식;김동원;박종욱
  2. 한국전기전자재료학회논문지 v.10 no.9 Cu-Ni박막스트레인 게이지를 이용한 다이어프램식 압력센서-1 : Cu-Ni 박막 스트레인게이지 개발 민남기;이성래;김정환;조완기
  3. Technical Digest of The 12Th Sensor Symposium CrOx Thin film pressure sensor prepared directly on the stainless steel diaphragm Y.Suzuki;H.Takenaka;T.Nosaka;S.Ogawa
  4. 한국진공학회지 v.6 no.1 초정밀 다층 Cermet박막저항체 제조에 관한 연구 허명수;최성우;천희곤;권식철;이건환;조동율
  5. Surf. and Coat. Technol. v.107 Structural and electrical properties of cathodic sputtered thin chromium films A.K.Butilenko;A.Ya;Vovk.H.R;Khan https://doi.org/10.1016/S0257-8972(98)00583-0
  6. Thin Solid Films v.292 Deposition process study of chromium oxide thin films obtaind by d.c.magnetron sputtering G.Contoux;F.Cosset;A.Celerier;J.Machet https://doi.org/10.1016/S0040-6090(96)08941-9
  7. 한국전기전자재료학회논문지 v.10 no.2 Magnetron sputtering 으로 증착한 ZnO박막의 특성과 열처리에 따른 비저항과 미세구조 이승환;성영권;김종관
  8. Surf. and Coat. Technol. v.102 Aluminium-aluminium nitride cermet films : preparation by co-sputtering and microstructure L.Sauques;S.Fagnent;M.Christine;S.Catherine;C.Sella https://doi.org/10.1016/S0257-8972(97)00527-6
  9. Thin Solid Films v.290 Influence of oxygen on some oxide films prepared by ion beam sputter deposition C.C.Lee;D.T.Wei;J.C.Hsu;C.H.Shen
  10. Surf. and Coat. Technol. v.843 Structure of ZrO₂optical thin films prepared by dual ion beam reactive sputter deposition J.P.Riviere;S.Harel;P.Gucrin;A.Straboni
  11. 한국전기전자재료학회논문지 v.11 no.4 이온빔 스퍼터법에 의한 BSCCO박막의 순차증착 박용필;이준응
  12. Elements of X-Ray Diffraction B.D.Cullity