• Applied Chemistry for Engineering
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• v.23 no.2
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• pp.190-194
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• 2012

10 wt% Mn supported on various commercial $TiO_2$ catalysts were prepared by wet-impregnation method for the low temperature selective catalytic reduction (SCR) of NO with $NH_3$. A combination of various physico-chemical techniques such as BET, XRD, XPS and TPR were used to characterize these catalysts. MnOx surface densities on MnOx/$TiO_2$ catalyst were related to surface area. As MnOx surface density lowered with high dispersion, the SCR activity for low temperature was increased and the reduction temperature ($MnO_2$ ${\rightarrow}$ $Mn_2O_3$) of surface MnOx was lower. For a high SCR, MnOx could be supported on a high surface area of $TiO_2$ and should be existed a high dispersion of non-crystalline species.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2003.05a
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• pp.41-41
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• 2003

텅스텐(W)은 높은 thermal stability 와 process compatibility 및 우수한 corrosion r resistance 둥으로 integrated circuit (IC)의 gate 및 interconnection 둥으로의 활용이 대두되고 있으며, 차세대 thin film transistor liquid crystal display (TFT-LCD)의 gate 및 interconnection m materials 둥으로 사용되고 았다. 그러나, 이러한 장점을 가지고 있는 팅스텐 박막이 실제 공정상에 적용되가 위해서는 건식 식각이 주로 사용되는데, 이는 wet chemical 을 이용한 습식 식각을 사용할 경우 낮은 etch rate, line width 의 감소 및 postetch residue 잔류 동의 문제가 발생하기 때문이다. 또한 W interconnection etching 을 하기 위해서는 높은 텅스텐 박막의 etch rate 과 하부 layer ( (amorphous silicon 또는 poly-SD와의 높은 etch selectivity 가 필수적 이 라 할 수 있다. 그러 나, 지금까지 연구되어온 결과에 따르면 텅스탠과 하부 layer 와의 etch selectivity 는 2 이하로 매우 낮게 관찰되고 았으며, 텅스텐의 etch rate 또한 150nm/min 이하로 낮은 값을 나타내고 있다. 따라서 본 연구에서는 halogen-based inductively coupled plasma 를 이용하여 텅스텐 박막 식각시 여러 가지 첨가 가스에 따른 높은 텅스탠 박막의 etch rate 과 하부 layer 와의 높은 etch s selectivity 를 얻고자 하였으며, 그에 따른 식각 메커니즘에 대하여 알아보고자 하였다. $CF_4/Cl_2$ gas chemistry 에 첨 가 가스로 $N_2$와 Ar을 첨 가할 경 우 텅 스텐 박막과 하부 layer 간의 etch selectivity 증가는 관찰되지 않았으며, 반면에 첨가 가스로 $O_2$를 사용할 경우, $O_2$의 첨가량이 증가함에 따라 etch s selectivity 는 계속적으로 증가렴을 관찰할 수 있었다. 이는 $O_2$ 첨가에 따라 형성되는 WOF4 에 의한 텅스텐의 etch rates 의 감소에 비하여, $Si0_2$ 등의 형성에 의한 poly-Si etch rates 이 더욱 크게 감소하였기 때문으로 사료된다. W 과 poly-Si 의 식각 특성을 이해하기 위하여 X -ray photoelectron spectroscopy (XPS)를 사용하였으며, 식각 전후의 etch depth 를 측정하기 위하여 stylus p pmfilometeT 를 이용하였다.

• Journal of the Microelectronics and Packaging Society
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• v.31 no.2
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• pp.9-15
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• 2024

The effect of the residual impurity on the prepreg surface on the wettability of encapsulant for chip on board package was analyzed with microstructure, compositions and chemical bonds using a scanning electron microscope and X-ray photoelectron spectroscopy. As a result, the contact angle of w/ residual impurity sample was measured to be 28° higher than that of w/o residual impurity sample, and the C-O bond was decreased to be 4% lower than that of w/o residual impurity sample. The surface energy of the prepreg decreased because the impurity ions, Na and F, generated by the manufacturing process and wet etching, reacted chemically with the C on the prepreg surface, forming C-F bonds and breaking the C-O bonds on the prepreg surface. Therefore, the wettability of the encapsulant was degraded because the contact angle between the encapsulant and the prepreg was increased.

• The Journal of Engineering Research
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• v.3 no.1
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• pp.189-197
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• 1998

Hyeroxyapatite(HAp) which has good biocompatibility was made by Wet Chemical Process. The surface of Ti-6Al-4V, coated with HAp by lon Beam Assisted Deposition (IBAD), was treated with 5ppm, 10ppm, 20ppm, and 100ppm of $AgNO_3$ solution. In this Ag impregnation process, $Ca^{2+}$ of HAp was substituted with $Ag^+$ of $AgNO_3$. In this study, the antimicrobial effect and biocompatibility of Ti-6Al-4V alloy which was coated with Ag-HAp were examined. The antimicrobial test was carried out with two kinds of bacteria(P. Aeruginosa, S. Epidermidis), which are highly infectious in a transplanting operation of implant materials. As a result of the test, it was observed that Ti-6Al-4V alloy which was treated by 20ppm of $AgNO_3$ solution has good biocompatibility. In order to observe the antimicrobial mechanism of $Ag^+$, E. coli which is the most common bacterium was treated by Ag-HAp. Then cell morphology of E. coli was observed by the transmission electron microscope(TEM). The destruction of cell wall and cytoplasm of E. coil were observed. A black spot appeared in the cytoplasm was analyzed by energy dispersive analysis X-ray (EDAX) and it showed a small amount of $Ag^+$. Thus, it was proved that $Ag^+$ destroys bacteria effectively and Ti-6Al-4V alloy which was impregnate with Ag ion show antimicrobial effect on infection bacteria.

• Resources Recycling
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• v.16 no.5
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• pp.71-76
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• 2007

The mixed plastic waste generated from households after hand-picking and/or mechanical sorting processes amounts to 1,750,000 ton in 2006, and most of these waste are finally end up with landfill and/or incineration due to the lacks of separation technologies and economical reasons. The mixed plastic wastes can not be used as raw materials for chemical and/or thermal recycling processes because of their high content of PVC(upto 4.0 wt.%). In the present research, gravity separation system has been developed to remove PVC from the mixed plastic waste and to recover the PO-type plastics. This system mainly consists of air classification, magnetic separation, one-step crushing, feeding system at fixed rate and wet-type gravity separation system. The gravity system based on centrifugal separation has been developed at capacity of 0.5 ton/h and it consists of mixing, precleaning, separation, dewatering, recovery system and wastewater treatment system, etc. The main objective of this process is to achieve high separation efficiency of polyolefins with less than 0.3 wt.% PVC content and less than 10% moisture content in the final products. In addition, a crushing unit of with 8 rotor system is also developed to improve the crushing efficiency of soft-type plastics. The system with a capacity of 1.0 ton/h is developed and operational results are presented.

• Korean Chemical Engineering Research
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• v.47 no.5
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• pp.580-586
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• 2009

In this study, co-combustion characteristics of Chinese bituminous coal and North Korean anthracite were investigated using a 2 MWe scale circulating fluidized bed power plant. At first, the combustion efficiency of bituminous coal of China and Australia as a function of excess air ratio and temperature were observed. The results showed that the combustion efficiency was influenced by particle size and volatile content of coal, the combustion efficiency of Chinese bituminous coal was over 99.5%. The unburned carbon particles from fly ash and bottom ash were a content 5~7% and 0.3%, respectively. The combustion efficiency with the mixture ratio 20% of bituminous coal and anthracite decreased over 5% because of the increase of entrained particles by a small average particle size of anthracite in the combustor. However, the outlet concentration of $SO_2$ and $NO_x$ was not changed remarkably. The concentrations of the typical air pollutants such as $NO_x$ and $SO_2$ were 200~250 ppm($O_2$ 6%), 100~320 ppm($O_2$ 6%) respectively. The outlet concentration of $NO_x$ was decreased to 30~65% with $NH_3$ supplying rate of 2~13 l/min in SCR process. The $SO_x$ removal efficiency was up to 70% by in-furnace desulfurization using limestone with Ca/S molar of approximately 6.5. With wet scrubbing using $Mg(OH)_2$ as absorbent, the $SO_x$ removal efficiency reached 100% under near pH 5.0 of scrubbing liquid.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.345-346
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• 2013

InGaN material is being studied increasingly as a prospective material for solar cells. One of the merits for solar cell applications is that the band gap energy can be engineered from 0.7 eV for InN to 3.4 eV for GaN by varying of indium composition, which covers almost of solar spectrum from UV to IR. It is essential for better cell efficiency to improve not only the crystalline quality of the epitaxial layers but also fabrication of the solar cells. Fabrication includes transparent top electrodes and surface texturing which will improve the carrier extraction. Surface texturing is one of the most employed methods to enhance the extraction efficiency in LED fabrication and can be formed on a p-GaN surface, on an N-face of GaN, and even on an indium tin oxide (ITO) layer. Surface texturing method has also been adopted in InGaN-based solar cells and proved to enhance the efficiency. Since the texturing by direct etching of p-GaN, however, was known to induce the damage and result in degraded electrical properties, texturing has been studied widely on ITO layers. However, it is important to optimize the ITO thickness in Solar Cells applications since the reflectance is fluctuated by ITO thickness variation resulting in reduced light extraction at target wavelength. ITO texturing made by wet etching or dry etching was also revealed to increased series resistance in ITO film. In this work, we report a new way of texturing by deposition of thickness-optimized ITO films on ITO nano dots, which can further reduce the reflectance as well as electrical degradation originated from the ITO etching process.

• Applied Chemistry for Engineering
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• v.17 no.1
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• pp.106-110
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• 2006

If drugs are made from nanoparticles, their formulations can be more effective than the conventional ones. Especially, water insoluble drugs having low absorption rates into our body could show improvement in their adsorption and bioavailability by decreasing their particle sizes to nanometers. In this study, polyvinylpyrrolidone (PVP) and various sugars were employed as stabilizers for the nanoparticles of a water insoluble drug, Itraconazole. Nanoparticles were successfully produced by the wet slurry process for five days. Then, spray drying converted the aqueous dispersions into dry powders, and the redispersibility of dried nanoparticles into water was investigated. The effects of temperature, pressure, and flow rate were studied to understand the importance of processing variables on redispersibility. It was found in particle size analysis that nanoparticles containing sugars have better redispersibility than those without sugars. Additionally, the mainly spherical morphology of dried nanoparticles was identified by SEM (Scanning Electron Microscopy) and AFM (Atomic Force Microscopy).

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.29 no.1
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• pp.30-34
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• 2016

In this paper, we report that selective etching on N-polar face by EC (electro-chemical)-etching effect on the reduction of bowing and strain of FS (free-standing)-GaN substrates. We applied the EC-etching to concave and convex type of FS-GaN substrates. After the EC-etching for FS-GaN, nano porous structure was formed on N-polar face of concave and convex type of FS-GaN. Consequently, the bowing in the convex type of FS-GaN substrate was decreased but the bowing in the concave type of FS-GaN substrate was increased. Furthermore, the FWHM (full width at half maximum) of (1 0 2) reflection for the convex type of FS-GaN was significantly decreased from 601 to 259 arcsec. In the case, we confirmed that the EC-etching method was very effective to reduce the bowing in the convex type of FS-GaN and the compressive stress in N-polar face of convex type of FS-GaN was fully released by Raman measurement.

• Polymer(Korea)
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• v.29 no.5
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• pp.440-444
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• 2005

An increase in the surface area of drugs by reducing particle sizes from microns to nanometers has been known as an efficient method to improve the bioavailability of water-insoluble drugs. To prevent drug nanoparticles from aggregation during the processes of drug formulation, a limited number of pharmaceutical inactive ingredients such as hydroxypropyl cellulose has been employed as stabilizers or dispersants. In this study, copolymers of hydrophilic and hydrophobic amino acids were synthesized by the ring opening polymerization of their N-carboxyanhydride monomers and evaluated as novel candidates to stabilize the nanoparticles of a water insoluble drug, naproxen. Naproxen nanoparticles stabilized by synthesized amino acid copolymers were successfully prepared in the size of $200\~500nm$ in 60 min by a wet comminution process. Particle size analysis showed that the effective stabilization performance of copolymers required the hydrophobic moiety content to be higher than $10 mol\%$. However, the molecular weight and morphology of copolymers was not the critical parameters in determining the particle size reduction. Their particle size was found to be stable up to 14 days without significant aggregation.